8/12/2011	8:02:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/12/2011	8:02:23 AM	Recipe started at 8:02 AM
8/12/2011	8:02:23 AM	Helium valve closed
8/12/2011	8:02:23 AM	H2 valve closed
8/12/2011	8:02:23 AM	BCl3 valve closed
8/12/2011	8:02:23 AM	PH3 valve closed
8/12/2011	8:02:23 AM	SiCl4 pre valve closed
8/12/2011	8:02:23 AM	SiCl4 post valve closed
8/12/2011	8:02:23 AM	Main Vac valve closed
8/12/2011	8:02:23 AM	Bypass valve closed
8/12/2011	8:02:23 AM	Bubbler valve closed
8/12/2011	8:02:23 AM	Helium MFC set to  0.000000
8/12/2011	8:02:23 AM	H2 MFC set to  0.000000
8/12/2011	8:02:23 AM	BCl3 MFC set to  0.000000
8/12/2011	8:02:23 AM	PHl3 MFC set to  0.000000
8/12/2011	8:02:23 AM	SiCl4 MFC set to  0.000000
8/12/2011	8:02:23 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	8:02:23 AM	Tube furnace set to 0
8/12/2011	8:02:26 AM	H2 valve closed
8/12/2011	8:02:26 AM	BCl3 valve closed
8/12/2011	8:02:26 AM	PH3 valve closed
8/12/2011	8:02:26 AM	SiCl4 pre valve closed
8/12/2011	8:02:26 AM	SiCl4 post valve closed
8/12/2011	8:02:26 AM	Main Vac valve closed
8/12/2011	8:02:26 AM	Bypass valve closed
8/12/2011	8:02:26 AM	Bubbler valve closed
8/12/2011	8:02:26 AM	Helium valve opened
8/12/2011	8:02:26 AM	Helium MFC set to  500.000000
8/12/2011	8:02:26 AM	H2 MFC set to  0.000000
8/12/2011	8:02:26 AM	BCl3 MFC set to  0.000000
8/12/2011	8:02:26 AM	PHl3 MFC set to  0.000000
8/12/2011	8:02:26 AM	SiCl4 MFC set to  0.000000
8/12/2011	8:02:26 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	8:02:26 AM	Tube furnace set to 0
8/12/2011	8:02:44 AM	Helium valve closed
8/12/2011	8:02:44 AM	H2 valve closed
8/12/2011	8:02:44 AM	BCl3 valve closed
8/12/2011	8:02:44 AM	PH3 valve closed
8/12/2011	8:02:44 AM	SiCl4 pre valve closed
8/12/2011	8:02:44 AM	SiCl4 post valve closed
8/12/2011	8:02:44 AM	Main Vac valve closed
8/12/2011	8:02:44 AM	Bypass valve closed
8/12/2011	8:02:44 AM	Bubbler valve closed
8/12/2011	8:02:44 AM	Helium MFC set to  0.000000
8/12/2011	8:02:44 AM	H2 MFC set to  0.000000
8/12/2011	8:02:44 AM	BCl3 MFC set to  0.000000
8/12/2011	8:02:44 AM	PHl3 MFC set to  0.000000
8/12/2011	8:02:44 AM	SiCl4 MFC set to  0.000000
8/12/2011	8:02:44 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	8:02:44 AM	Tube furnace set to 0
8/12/2011	8:02:45 AM	Run finished at 8:02 AM
8/12/2011	8:02:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/12/2011	8:05:12 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/12/2011	8:05:13 AM	Recipe started at 8:05 AM
8/12/2011	8:05:13 AM	Helium valve closed
8/12/2011	8:05:13 AM	H2 valve closed
8/12/2011	8:05:13 AM	BCl3 valve closed
8/12/2011	8:05:13 AM	PH3 valve closed
8/12/2011	8:05:13 AM	SiCl4 pre valve closed
8/12/2011	8:05:13 AM	SiCl4 post valve closed
8/12/2011	8:05:13 AM	Main Vac valve closed
8/12/2011	8:05:13 AM	Bubbler valve closed
8/12/2011	8:05:13 AM	Bypass valve opened
8/12/2011	8:05:13 AM	Helium MFC set to  0.000000
8/12/2011	8:05:13 AM	H2 MFC set to  0.000000
8/12/2011	8:05:13 AM	BCl3 MFC set to  0.000000
8/12/2011	8:05:13 AM	PHl3 MFC set to  0.000000
8/12/2011	8:05:13 AM	SiCl4 MFC set to  0.000000
8/12/2011	8:05:13 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	8:05:13 AM	Tube furnace set to 0
8/12/2011	8:06:28 AM	Helium valve closed
8/12/2011	8:06:28 AM	H2 valve closed
8/12/2011	8:06:28 AM	BCl3 valve closed
8/12/2011	8:06:28 AM	PH3 valve closed
8/12/2011	8:06:28 AM	SiCl4 pre valve closed
8/12/2011	8:06:28 AM	SiCl4 post valve closed
8/12/2011	8:06:28 AM	Main Vac valve closed
8/12/2011	8:06:28 AM	Bubbler valve closed
8/12/2011	8:06:28 AM	Bypass valve opened
8/12/2011	8:06:28 AM	Helium MFC set to  0.000000
8/12/2011	8:06:28 AM	H2 MFC set to  0.000000
8/12/2011	8:06:28 AM	BCl3 MFC set to  0.000000
8/12/2011	8:06:28 AM	PHl3 MFC set to  0.000000
8/12/2011	8:06:28 AM	SiCl4 MFC set to  0.000000
8/12/2011	8:06:28 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	8:06:28 AM	Tube furnace set to 0
8/12/2011	8:07:28 AM	Helium valve closed
8/12/2011	8:07:28 AM	H2 valve closed
8/12/2011	8:07:28 AM	BCl3 valve closed
8/12/2011	8:07:28 AM	PH3 valve closed
8/12/2011	8:07:28 AM	SiCl4 pre valve closed
8/12/2011	8:07:28 AM	SiCl4 post valve closed
8/12/2011	8:07:28 AM	Bypass valve closed
8/12/2011	8:07:28 AM	Bubbler valve closed
8/12/2011	8:07:28 AM	Main Vac valve opened
8/12/2011	8:07:28 AM	Helium MFC set to  0.000000
8/12/2011	8:07:28 AM	H2 MFC set to  0.000000
8/12/2011	8:07:28 AM	BCl3 MFC set to  0.000000
8/12/2011	8:07:28 AM	PHl3 MFC set to  0.000000
8/12/2011	8:07:28 AM	SiCl4 MFC set to  0.000000
8/12/2011	8:07:28 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	8:07:29 AM	Tube furnace set to 0
8/12/2011	8:07:30 AM	Run finished at 8:07 AM
8/12/2011	8:07:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/12/2011	8:16:47 AM	Recipe started at 8:16 AM
8/12/2011	8:16:47 AM	Helium valve closed
8/12/2011	8:16:47 AM	H2 valve closed
8/12/2011	8:16:47 AM	BCl3 valve closed
8/12/2011	8:16:47 AM	PH3 valve closed
8/12/2011	8:16:47 AM	SiCl4 pre valve closed
8/12/2011	8:16:47 AM	SiCl4 post valve closed
8/12/2011	8:16:47 AM	Bypass valve closed
8/12/2011	8:16:47 AM	Bubbler valve closed
8/12/2011	8:16:47 AM	Main Vac valve opened
8/12/2011	8:16:47 AM	Helium MFC set to  0.000000
8/12/2011	8:16:47 AM	H2 MFC set to  0.000000
8/12/2011	8:16:47 AM	BCl3 MFC set to  0.000000
8/12/2011	8:16:47 AM	PHl3 MFC set to  0.000000
8/12/2011	8:16:47 AM	SiCl4 MFC set to  0.000000
8/12/2011	8:16:47 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	8:16:47 AM	Tube furnace set to 150
8/12/2011	8:17:17 AM	H2 valve closed
8/12/2011	8:17:17 AM	BCl3 valve closed
8/12/2011	8:17:17 AM	PH3 valve closed
8/12/2011	8:17:17 AM	SiCl4 pre valve closed
8/12/2011	8:17:17 AM	SiCl4 post valve closed
8/12/2011	8:17:17 AM	Bypass valve closed
8/12/2011	8:17:17 AM	Bubbler valve closed
8/12/2011	8:17:17 AM	Helium valve opened
8/12/2011	8:17:17 AM	Main Vac valve opened
8/12/2011	8:17:17 AM	Helium MFC set to  20.000000
8/12/2011	8:17:17 AM	H2 MFC set to  0.000000
8/12/2011	8:17:17 AM	BCl3 MFC set to  0.000000
8/12/2011	8:17:17 AM	PHl3 MFC set to  0.000000
8/12/2011	8:17:17 AM	SiCl4 MFC set to  0.000000
8/12/2011	8:17:17 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	8:17:17 AM	Tube furnace set to 150
8/12/2011	8:17:47 AM	Helium valve closed
8/12/2011	8:17:47 AM	H2 valve closed
8/12/2011	8:17:47 AM	BCl3 valve closed
8/12/2011	8:17:47 AM	PH3 valve closed
8/12/2011	8:17:47 AM	SiCl4 pre valve closed
8/12/2011	8:17:47 AM	SiCl4 post valve closed
8/12/2011	8:17:47 AM	Bypass valve closed
8/12/2011	8:17:47 AM	Bubbler valve closed
8/12/2011	8:17:47 AM	Main Vac valve opened
8/12/2011	8:17:47 AM	Helium MFC set to  0.000000
8/12/2011	8:17:47 AM	H2 MFC set to  0.000000
8/12/2011	8:17:47 AM	BCl3 MFC set to  0.000000
8/12/2011	8:17:47 AM	PHl3 MFC set to  0.000000
8/12/2011	8:17:47 AM	SiCl4 MFC set to  0.000000
8/12/2011	8:17:47 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	8:17:48 AM	Tube furnace set to 150
8/12/2011	8:18:18 AM	H2 valve closed
8/12/2011	8:18:18 AM	BCl3 valve closed
8/12/2011	8:18:18 AM	PH3 valve closed
8/12/2011	8:18:18 AM	SiCl4 pre valve closed
8/12/2011	8:18:18 AM	SiCl4 post valve closed
8/12/2011	8:18:18 AM	Bypass valve closed
8/12/2011	8:18:18 AM	Bubbler valve closed
8/12/2011	8:18:18 AM	Helium valve opened
8/12/2011	8:18:18 AM	Main Vac valve opened
8/12/2011	8:18:18 AM	Helium MFC set to  20.000000
8/12/2011	8:18:18 AM	H2 MFC set to  0.000000
8/12/2011	8:18:18 AM	BCl3 MFC set to  0.000000
8/12/2011	8:18:18 AM	PHl3 MFC set to  0.000000
8/12/2011	8:18:18 AM	SiCl4 MFC set to  0.000000
8/12/2011	8:18:18 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	8:18:18 AM	Tube furnace set to 150
8/12/2011	8:18:48 AM	Helium valve closed
8/12/2011	8:18:48 AM	H2 valve closed
8/12/2011	8:18:48 AM	BCl3 valve closed
8/12/2011	8:18:48 AM	PH3 valve closed
8/12/2011	8:18:48 AM	SiCl4 pre valve closed
8/12/2011	8:18:48 AM	SiCl4 post valve closed
8/12/2011	8:18:48 AM	Bypass valve closed
8/12/2011	8:18:48 AM	Bubbler valve closed
8/12/2011	8:18:48 AM	Main Vac valve opened
8/12/2011	8:18:48 AM	Helium MFC set to  0.000000
8/12/2011	8:18:48 AM	H2 MFC set to  0.000000
8/12/2011	8:18:48 AM	BCl3 MFC set to  0.000000
8/12/2011	8:18:48 AM	PHl3 MFC set to  0.000000
8/12/2011	8:18:48 AM	SiCl4 MFC set to  0.000000
8/12/2011	8:18:48 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	8:18:48 AM	Tube furnace set to 150
8/12/2011	8:19:18 AM	H2 valve closed
8/12/2011	8:19:18 AM	BCl3 valve closed
8/12/2011	8:19:18 AM	PH3 valve closed
8/12/2011	8:19:18 AM	SiCl4 pre valve closed
8/12/2011	8:19:18 AM	SiCl4 post valve closed
8/12/2011	8:19:18 AM	Bypass valve closed
8/12/2011	8:19:18 AM	Bubbler valve closed
8/12/2011	8:19:18 AM	Helium valve opened
8/12/2011	8:19:18 AM	Main Vac valve opened
8/12/2011	8:19:18 AM	Helium MFC set to  20.000000
8/12/2011	8:19:18 AM	H2 MFC set to  0.000000
8/12/2011	8:19:18 AM	BCl3 MFC set to  0.000000
8/12/2011	8:19:18 AM	PHl3 MFC set to  0.000000
8/12/2011	8:19:18 AM	SiCl4 MFC set to  0.000000
8/12/2011	8:19:18 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	8:19:18 AM	Tube furnace set to 150
8/12/2011	8:19:48 AM	Helium valve closed
8/12/2011	8:19:48 AM	H2 valve closed
8/12/2011	8:19:48 AM	BCl3 valve closed
8/12/2011	8:19:48 AM	PH3 valve closed
8/12/2011	8:19:48 AM	SiCl4 pre valve closed
8/12/2011	8:19:48 AM	SiCl4 post valve closed
8/12/2011	8:19:48 AM	Bypass valve closed
8/12/2011	8:19:48 AM	Bubbler valve closed
8/12/2011	8:19:48 AM	Main Vac valve opened
8/12/2011	8:19:48 AM	Helium MFC set to  0.000000
8/12/2011	8:19:48 AM	H2 MFC set to  0.000000
8/12/2011	8:19:48 AM	BCl3 MFC set to  0.000000
8/12/2011	8:19:48 AM	PHl3 MFC set to  0.000000
8/12/2011	8:19:48 AM	SiCl4 MFC set to  0.000000
8/12/2011	8:19:48 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	8:19:48 AM	Tube furnace set to 150
8/12/2011	8:20:18 AM	H2 valve closed
8/12/2011	8:20:19 AM	BCl3 valve closed
8/12/2011	8:20:19 AM	PH3 valve closed
8/12/2011	8:20:19 AM	SiCl4 pre valve closed
8/12/2011	8:20:19 AM	SiCl4 post valve closed
8/12/2011	8:20:19 AM	Bypass valve closed
8/12/2011	8:20:19 AM	Bubbler valve closed
8/12/2011	8:20:19 AM	Helium valve opened
8/12/2011	8:20:19 AM	Main Vac valve opened
8/12/2011	8:20:19 AM	Helium MFC set to  20.000000
8/12/2011	8:20:19 AM	H2 MFC set to  0.000000
8/12/2011	8:20:19 AM	BCl3 MFC set to  0.000000
8/12/2011	8:20:19 AM	PHl3 MFC set to  0.000000
8/12/2011	8:20:19 AM	SiCl4 MFC set to  0.000000
8/12/2011	8:20:19 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	8:20:19 AM	Tube furnace set to 150
8/12/2011	8:20:49 AM	Helium valve closed
8/12/2011	8:20:49 AM	H2 valve closed
8/12/2011	8:20:49 AM	BCl3 valve closed
8/12/2011	8:20:49 AM	PH3 valve closed
8/12/2011	8:20:49 AM	SiCl4 pre valve closed
8/12/2011	8:20:49 AM	SiCl4 post valve closed
8/12/2011	8:20:49 AM	Bypass valve closed
8/12/2011	8:20:49 AM	Bubbler valve closed
8/12/2011	8:20:49 AM	Main Vac valve opened
8/12/2011	8:20:49 AM	Helium MFC set to  0.000000
8/12/2011	8:20:49 AM	H2 MFC set to  0.000000
8/12/2011	8:20:49 AM	BCl3 MFC set to  0.000000
8/12/2011	8:20:49 AM	PHl3 MFC set to  0.000000
8/12/2011	8:20:49 AM	SiCl4 MFC set to  0.000000
8/12/2011	8:20:49 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	8:20:49 AM	Tube furnace set to 150
8/12/2011	8:21:19 AM	H2 valve closed
8/12/2011	8:21:19 AM	BCl3 valve closed
8/12/2011	8:21:19 AM	PH3 valve closed
8/12/2011	8:21:19 AM	SiCl4 pre valve closed
8/12/2011	8:21:19 AM	SiCl4 post valve closed
8/12/2011	8:21:19 AM	Bypass valve closed
8/12/2011	8:21:19 AM	Bubbler valve closed
8/12/2011	8:21:19 AM	Helium valve opened
8/12/2011	8:21:19 AM	Main Vac valve opened
8/12/2011	8:21:19 AM	Helium MFC set to  20.000000
8/12/2011	8:21:19 AM	H2 MFC set to  0.000000
8/12/2011	8:21:19 AM	BCl3 MFC set to  0.000000
8/12/2011	8:21:19 AM	PHl3 MFC set to  0.000000
8/12/2011	8:21:19 AM	SiCl4 MFC set to  0.000000
8/12/2011	8:21:19 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	8:21:19 AM	Tube furnace set to 150
8/12/2011	8:21:49 AM	Helium valve closed
8/12/2011	8:21:49 AM	H2 valve closed
8/12/2011	8:21:49 AM	BCl3 valve closed
8/12/2011	8:21:49 AM	PH3 valve closed
8/12/2011	8:21:49 AM	SiCl4 pre valve closed
8/12/2011	8:21:49 AM	SiCl4 post valve closed
8/12/2011	8:21:49 AM	Bypass valve closed
8/12/2011	8:21:49 AM	Bubbler valve closed
8/12/2011	8:21:49 AM	Main Vac valve opened
8/12/2011	8:21:49 AM	Helium MFC set to  0.000000
8/12/2011	8:21:49 AM	H2 MFC set to  0.000000
8/12/2011	8:21:49 AM	BCl3 MFC set to  0.000000
8/12/2011	8:21:49 AM	PHl3 MFC set to  0.000000
8/12/2011	8:21:49 AM	SiCl4 MFC set to  0.000000
8/12/2011	8:21:49 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	8:21:49 AM	Tube furnace set to 150
8/12/2011	8:22:19 AM	H2 valve closed
8/12/2011	8:22:19 AM	BCl3 valve closed
8/12/2011	8:22:19 AM	PH3 valve closed
8/12/2011	8:22:19 AM	SiCl4 pre valve closed
8/12/2011	8:22:19 AM	SiCl4 post valve closed
8/12/2011	8:22:19 AM	Bypass valve closed
8/12/2011	8:22:19 AM	Bubbler valve closed
8/12/2011	8:22:19 AM	Helium valve opened
8/12/2011	8:22:19 AM	Main Vac valve opened
8/12/2011	8:22:19 AM	Helium MFC set to  20.000000
8/12/2011	8:22:19 AM	H2 MFC set to  0.000000
8/12/2011	8:22:19 AM	BCl3 MFC set to  0.000000
8/12/2011	8:22:19 AM	PHl3 MFC set to  0.000000
8/12/2011	8:22:19 AM	SiCl4 MFC set to  0.000000
8/12/2011	8:22:19 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	8:22:20 AM	Tube furnace set to 150
8/12/2011	8:22:50 AM	Helium valve closed
8/12/2011	8:22:50 AM	H2 valve closed
8/12/2011	8:22:50 AM	BCl3 valve closed
8/12/2011	8:22:50 AM	PH3 valve closed
8/12/2011	8:22:50 AM	SiCl4 pre valve closed
8/12/2011	8:22:50 AM	SiCl4 post valve closed
8/12/2011	8:22:50 AM	Bypass valve closed
8/12/2011	8:22:50 AM	Bubbler valve closed
8/12/2011	8:22:50 AM	Main Vac valve opened
8/12/2011	8:22:50 AM	Helium MFC set to  0.000000
8/12/2011	8:22:50 AM	H2 MFC set to  0.000000
8/12/2011	8:22:50 AM	BCl3 MFC set to  0.000000
8/12/2011	8:22:50 AM	PHl3 MFC set to  0.000000
8/12/2011	8:22:50 AM	SiCl4 MFC set to  0.000000
8/12/2011	8:22:50 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	8:22:50 AM	Tube furnace set to 150
8/12/2011	8:23:20 AM	H2 valve closed
8/12/2011	8:23:20 AM	BCl3 valve closed
8/12/2011	8:23:20 AM	PH3 valve closed
8/12/2011	8:23:20 AM	SiCl4 pre valve closed
8/12/2011	8:23:20 AM	SiCl4 post valve closed
8/12/2011	8:23:20 AM	Bypass valve closed
8/12/2011	8:23:20 AM	Bubbler valve closed
8/12/2011	8:23:20 AM	Helium valve opened
8/12/2011	8:23:20 AM	Main Vac valve opened
8/12/2011	8:23:20 AM	Helium MFC set to  20.000000
8/12/2011	8:23:20 AM	H2 MFC set to  0.000000
8/12/2011	8:23:20 AM	BCl3 MFC set to  0.000000
8/12/2011	8:23:20 AM	PHl3 MFC set to  0.000000
8/12/2011	8:23:20 AM	SiCl4 MFC set to  0.000000
8/12/2011	8:23:20 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	8:23:20 AM	Tube furnace set to 150
8/12/2011	8:23:50 AM	Helium valve closed
8/12/2011	8:23:50 AM	H2 valve closed
8/12/2011	8:23:50 AM	BCl3 valve closed
8/12/2011	8:23:50 AM	PH3 valve closed
8/12/2011	8:23:50 AM	SiCl4 pre valve closed
8/12/2011	8:23:50 AM	SiCl4 post valve closed
8/12/2011	8:23:50 AM	Bypass valve closed
8/12/2011	8:23:50 AM	Bubbler valve closed
8/12/2011	8:23:50 AM	Main Vac valve opened
8/12/2011	8:23:50 AM	Helium MFC set to  0.000000
8/12/2011	8:23:50 AM	H2 MFC set to  0.000000
8/12/2011	8:23:50 AM	BCl3 MFC set to  0.000000
8/12/2011	8:23:50 AM	PHl3 MFC set to  0.000000
8/12/2011	8:23:50 AM	SiCl4 MFC set to  0.000000
8/12/2011	8:23:50 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	8:23:50 AM	Tube furnace set to 150
8/12/2011	8:24:20 AM	H2 valve closed
8/12/2011	8:24:20 AM	BCl3 valve closed
8/12/2011	8:24:20 AM	PH3 valve closed
8/12/2011	8:24:20 AM	SiCl4 pre valve closed
8/12/2011	8:24:20 AM	SiCl4 post valve closed
8/12/2011	8:24:20 AM	Bypass valve closed
8/12/2011	8:24:20 AM	Bubbler valve closed
8/12/2011	8:24:20 AM	Helium valve opened
8/12/2011	8:24:20 AM	Main Vac valve opened
8/12/2011	8:24:20 AM	Helium MFC set to  20.000000
8/12/2011	8:24:20 AM	H2 MFC set to  0.000000
8/12/2011	8:24:20 AM	BCl3 MFC set to  0.000000
8/12/2011	8:24:20 AM	PHl3 MFC set to  0.000000
8/12/2011	8:24:20 AM	SiCl4 MFC set to  0.000000
8/12/2011	8:24:20 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	8:24:20 AM	Tube furnace set to 150
8/12/2011	8:24:50 AM	Helium valve closed
8/12/2011	8:24:50 AM	H2 valve closed
8/12/2011	8:24:50 AM	BCl3 valve closed
8/12/2011	8:24:50 AM	PH3 valve closed
8/12/2011	8:24:50 AM	SiCl4 pre valve closed
8/12/2011	8:24:50 AM	SiCl4 post valve closed
8/12/2011	8:24:50 AM	Bypass valve closed
8/12/2011	8:24:50 AM	Bubbler valve closed
8/12/2011	8:24:50 AM	Main Vac valve opened
8/12/2011	8:24:50 AM	Helium MFC set to  0.000000
8/12/2011	8:24:50 AM	H2 MFC set to  0.000000
8/12/2011	8:24:50 AM	BCl3 MFC set to  0.000000
8/12/2011	8:24:50 AM	PHl3 MFC set to  0.000000
8/12/2011	8:24:50 AM	SiCl4 MFC set to  0.000000
8/12/2011	8:24:50 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	8:24:51 AM	Tube furnace set to 150
8/12/2011	8:25:21 AM	H2 valve closed
8/12/2011	8:25:21 AM	BCl3 valve closed
8/12/2011	8:25:21 AM	PH3 valve closed
8/12/2011	8:25:21 AM	SiCl4 pre valve closed
8/12/2011	8:25:21 AM	SiCl4 post valve closed
8/12/2011	8:25:21 AM	Bypass valve closed
8/12/2011	8:25:21 AM	Bubbler valve closed
8/12/2011	8:25:21 AM	Helium valve opened
8/12/2011	8:25:21 AM	Main Vac valve opened
8/12/2011	8:25:21 AM	Helium MFC set to  20.000000
8/12/2011	8:25:21 AM	H2 MFC set to  0.000000
8/12/2011	8:25:21 AM	BCl3 MFC set to  0.000000
8/12/2011	8:25:21 AM	PHl3 MFC set to  0.000000
8/12/2011	8:25:21 AM	SiCl4 MFC set to  0.000000
8/12/2011	8:25:21 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	8:25:21 AM	Tube furnace set to 150
8/12/2011	8:25:51 AM	Helium valve closed
8/12/2011	8:25:51 AM	H2 valve closed
8/12/2011	8:25:51 AM	BCl3 valve closed
8/12/2011	8:25:51 AM	PH3 valve closed
8/12/2011	8:25:51 AM	SiCl4 pre valve closed
8/12/2011	8:25:51 AM	SiCl4 post valve closed
8/12/2011	8:25:51 AM	Bypass valve closed
8/12/2011	8:25:51 AM	Bubbler valve closed
8/12/2011	8:25:51 AM	Main Vac valve opened
8/12/2011	8:25:51 AM	Helium MFC set to  0.000000
8/12/2011	8:25:51 AM	H2 MFC set to  0.000000
8/12/2011	8:25:51 AM	BCl3 MFC set to  0.000000
8/12/2011	8:25:51 AM	PHl3 MFC set to  0.000000
8/12/2011	8:25:51 AM	SiCl4 MFC set to  0.000000
8/12/2011	8:25:51 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	8:25:51 AM	Tube furnace set to 150
8/12/2011	8:26:21 AM	H2 valve closed
8/12/2011	8:26:21 AM	BCl3 valve closed
8/12/2011	8:26:21 AM	PH3 valve closed
8/12/2011	8:26:21 AM	SiCl4 pre valve closed
8/12/2011	8:26:21 AM	SiCl4 post valve closed
8/12/2011	8:26:21 AM	Bypass valve closed
8/12/2011	8:26:21 AM	Bubbler valve closed
8/12/2011	8:26:21 AM	Helium valve opened
8/12/2011	8:26:21 AM	Main Vac valve opened
8/12/2011	8:26:21 AM	Helium MFC set to  20.000000
8/12/2011	8:26:21 AM	H2 MFC set to  0.000000
8/12/2011	8:26:21 AM	BCl3 MFC set to  0.000000
8/12/2011	8:26:21 AM	PHl3 MFC set to  0.000000
8/12/2011	8:26:21 AM	SiCl4 MFC set to  0.000000
8/12/2011	8:26:21 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	8:26:21 AM	Tube furnace set to 150
8/12/2011	8:26:51 AM	Helium valve closed
8/12/2011	8:26:51 AM	H2 valve closed
8/12/2011	8:26:51 AM	BCl3 valve closed
8/12/2011	8:26:51 AM	PH3 valve closed
8/12/2011	8:26:51 AM	SiCl4 pre valve closed
8/12/2011	8:26:51 AM	SiCl4 post valve closed
8/12/2011	8:26:51 AM	Bypass valve closed
8/12/2011	8:26:51 AM	Bubbler valve closed
8/12/2011	8:26:51 AM	Main Vac valve opened
8/12/2011	8:26:51 AM	Helium MFC set to  0.000000
8/12/2011	8:26:51 AM	H2 MFC set to  0.000000
8/12/2011	8:26:51 AM	BCl3 MFC set to  0.000000
8/12/2011	8:26:51 AM	PHl3 MFC set to  0.000000
8/12/2011	8:26:51 AM	SiCl4 MFC set to  0.000000
8/12/2011	8:26:51 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	8:26:52 AM	Tube furnace set to 150
8/12/2011	8:26:53 AM	Run finished at 8:26 AM
8/12/2011	8:45:35 AM	Main Vac valve closed
8/12/2011	8:45:47 AM	Main Vac valve opened
8/12/2011	8:46:53 AM	Recipe started at 8:46 AM
8/12/2011	8:46:53 AM	Helium valve closed
8/12/2011	8:46:53 AM	H2 valve closed
8/12/2011	8:46:53 AM	BCl3 valve closed
8/12/2011	8:46:53 AM	PH3 valve closed
8/12/2011	8:46:53 AM	SiCl4 pre valve closed
8/12/2011	8:46:53 AM	SiCl4 post valve closed
8/12/2011	8:46:53 AM	Main Vac valve closed
8/12/2011	8:46:53 AM	Bypass valve closed
8/12/2011	8:46:53 AM	Bubbler valve closed
8/12/2011	8:46:53 AM	Helium MFC set to  0.000000
8/12/2011	8:46:53 AM	H2 MFC set to  0.000000
8/12/2011	8:46:53 AM	BCl3 MFC set to  0.000000
8/12/2011	8:46:53 AM	PHl3 MFC set to  0.000000
8/12/2011	8:46:53 AM	SiCl4 MFC set to  0.000000
8/12/2011	8:46:53 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	8:46:53 AM	Tube furnace set to 0
8/12/2011	8:46:56 AM	Helium valve closed
8/12/2011	8:46:56 AM	BCl3 valve closed
8/12/2011	8:46:56 AM	PH3 valve closed
8/12/2011	8:46:56 AM	SiCl4 pre valve closed
8/12/2011	8:46:56 AM	SiCl4 post valve closed
8/12/2011	8:46:56 AM	Main Vac valve closed
8/12/2011	8:46:56 AM	Bypass valve closed
8/12/2011	8:46:56 AM	Bubbler valve closed
8/12/2011	8:46:56 AM	H2 valve opened
8/12/2011	8:46:56 AM	Helium MFC set to  0.000000
8/12/2011	8:46:56 AM	H2 MFC set to  500.000000
8/12/2011	8:46:56 AM	BCl3 MFC set to  0.000000
8/12/2011	8:46:56 AM	PHl3 MFC set to  0.000000
8/12/2011	8:46:56 AM	SiCl4 MFC set to  0.000000
8/12/2011	8:46:56 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	8:46:57 AM	Tube furnace set to 0
8/12/2011	8:48:01 AM	Helium valve closed
8/12/2011	8:48:01 AM	BCl3 valve closed
8/12/2011	8:48:01 AM	PH3 valve closed
8/12/2011	8:48:01 AM	SiCl4 pre valve closed
8/12/2011	8:48:01 AM	SiCl4 post valve closed
8/12/2011	8:48:01 AM	Main Vac valve closed
8/12/2011	8:48:01 AM	Bypass valve closed
8/12/2011	8:48:01 AM	H2 valve opened
8/12/2011	8:48:01 AM	Bubbler valve opened
8/12/2011	8:48:01 AM	Helium MFC set to  0.000000
8/12/2011	8:48:01 AM	H2 MFC set to  500.000000
8/12/2011	8:48:01 AM	BCl3 MFC set to  0.000000
8/12/2011	8:48:01 AM	PHl3 MFC set to  0.000000
8/12/2011	8:48:01 AM	SiCl4 MFC set to  0.000000
8/12/2011	8:48:01 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	8:48:01 AM	Tube furnace set to 0
8/12/2011	8:48:02 AM	Helium valve closed
8/12/2011	8:48:02 AM	BCl3 valve closed
8/12/2011	8:48:02 AM	PH3 valve closed
8/12/2011	8:48:02 AM	SiCl4 pre valve closed
8/12/2011	8:48:02 AM	SiCl4 post valve closed
8/12/2011	8:48:02 AM	Main Vac valve closed
8/12/2011	8:48:02 AM	Bypass valve closed
8/12/2011	8:48:02 AM	H2 valve opened
8/12/2011	8:48:02 AM	Bubbler valve opened
8/12/2011	8:48:02 AM	Helium MFC set to  0.000000
8/12/2011	8:48:02 AM	H2 MFC set to  500.000000
8/12/2011	8:48:02 AM	BCl3 MFC set to  0.000000
8/12/2011	8:48:02 AM	PHl3 MFC set to  0.000000
8/12/2011	8:48:02 AM	SiCl4 MFC set to  0.000000
8/12/2011	8:48:02 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	8:48:02 AM	Tube furnace set to 1000
8/12/2011	9:08:02 AM	Helium valve closed
8/12/2011	9:08:02 AM	PH3 valve closed
8/12/2011	9:08:02 AM	Main Vac valve closed
8/12/2011	9:08:02 AM	Bypass valve closed
8/12/2011	9:08:02 AM	H2 valve opened
8/12/2011	9:08:02 AM	BCl3 valve opened
8/12/2011	9:08:02 AM	SiCl4 pre valve opened
8/12/2011	9:08:02 AM	SiCl4 post valve opened
8/12/2011	9:08:02 AM	Bubbler valve opened
8/12/2011	9:08:02 AM	Helium MFC set to  0.000000
8/12/2011	9:08:02 AM	H2 MFC set to  500.000000
8/12/2011	9:08:02 AM	BCl3 MFC set to  2.500000
8/12/2011	9:08:02 AM	PHl3 MFC set to  0.000000
8/12/2011	9:08:02 AM	SiCl4 MFC set to  50.000000
8/12/2011	9:08:02 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	9:08:02 AM	Tube furnace set to 1000
8/12/2011	9:24:02 AM	Helium valve closed
8/12/2011	9:24:02 AM	BCl3 valve closed
8/12/2011	9:24:02 AM	Main Vac valve closed
8/12/2011	9:24:02 AM	Bypass valve closed
8/12/2011	9:24:02 AM	H2 valve opened
8/12/2011	9:24:02 AM	PH3 valve opened
8/12/2011	9:24:02 AM	SiCl4 pre valve opened
8/12/2011	9:24:02 AM	SiCl4 post valve opened
8/12/2011	9:24:02 AM	Bubbler valve opened
8/12/2011	9:24:02 AM	Helium MFC set to  0.000000
8/12/2011	9:24:02 AM	H2 MFC set to  500.000000
8/12/2011	9:24:02 AM	BCl3 MFC set to  0.000000
8/12/2011	9:24:02 AM	PHl3 MFC set to  15.000000
8/12/2011	9:24:02 AM	SiCl4 MFC set to  50.000000
8/12/2011	9:24:02 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	9:24:02 AM	Tube furnace set to 1000
8/12/2011	9:28:02 AM	Helium valve closed
8/12/2011	9:28:02 AM	BCl3 valve closed
8/12/2011	9:28:02 AM	PH3 valve closed
8/12/2011	9:28:03 AM	SiCl4 pre valve closed
8/12/2011	9:28:03 AM	SiCl4 post valve closed
8/12/2011	9:28:03 AM	Main Vac valve closed
8/12/2011	9:28:03 AM	Bypass valve closed
8/12/2011	9:28:03 AM	H2 valve opened
8/12/2011	9:28:03 AM	Bubbler valve opened
8/12/2011	9:28:03 AM	Helium MFC set to  0.000000
8/12/2011	9:28:03 AM	H2 MFC set to  500.000000
8/12/2011	9:28:03 AM	BCl3 MFC set to  0.000000
8/12/2011	9:28:03 AM	PHl3 MFC set to  0.000000
8/12/2011	9:28:03 AM	SiCl4 MFC set to  0.000000
8/12/2011	9:28:03 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	9:28:03 AM	Tube furnace set to 950
8/12/2011	9:31:03 AM	Helium valve closed
8/12/2011	9:31:03 AM	BCl3 valve closed
8/12/2011	9:31:03 AM	PH3 valve closed
8/12/2011	9:31:03 AM	SiCl4 pre valve closed
8/12/2011	9:31:03 AM	SiCl4 post valve closed
8/12/2011	9:31:03 AM	Main Vac valve closed
8/12/2011	9:31:03 AM	Bypass valve closed
8/12/2011	9:31:03 AM	H2 valve opened
8/12/2011	9:31:03 AM	Bubbler valve opened
8/12/2011	9:31:03 AM	Helium MFC set to  0.000000
8/12/2011	9:31:03 AM	H2 MFC set to  500.000000
8/12/2011	9:31:03 AM	BCl3 MFC set to  0.000000
8/12/2011	9:31:03 AM	PHl3 MFC set to  0.000000
8/12/2011	9:31:03 AM	SiCl4 MFC set to  0.000000
8/12/2011	9:31:03 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	9:31:03 AM	Tube furnace set to 900
8/12/2011	9:34:03 AM	Helium valve closed
8/12/2011	9:34:03 AM	BCl3 valve closed
8/12/2011	9:34:03 AM	PH3 valve closed
8/12/2011	9:34:03 AM	SiCl4 pre valve closed
8/12/2011	9:34:03 AM	SiCl4 post valve closed
8/12/2011	9:34:03 AM	Main Vac valve closed
8/12/2011	9:34:03 AM	Bypass valve closed
8/12/2011	9:34:03 AM	H2 valve opened
8/12/2011	9:34:03 AM	Bubbler valve opened
8/12/2011	9:34:03 AM	Helium MFC set to  0.000000
8/12/2011	9:34:03 AM	H2 MFC set to  500.000000
8/12/2011	9:34:03 AM	BCl3 MFC set to  0.000000
8/12/2011	9:34:03 AM	PHl3 MFC set to  0.000000
8/12/2011	9:34:03 AM	SiCl4 MFC set to  0.000000
8/12/2011	9:34:03 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	9:34:03 AM	Tube furnace set to 850
8/12/2011	9:37:03 AM	Helium valve closed
8/12/2011	9:37:03 AM	BCl3 valve closed
8/12/2011	9:37:03 AM	PH3 valve closed
8/12/2011	9:37:03 AM	SiCl4 pre valve closed
8/12/2011	9:37:03 AM	SiCl4 post valve closed
8/12/2011	9:37:03 AM	Main Vac valve closed
8/12/2011	9:37:03 AM	Bypass valve closed
8/12/2011	9:37:03 AM	H2 valve opened
8/12/2011	9:37:03 AM	Bubbler valve opened
8/12/2011	9:37:03 AM	Helium MFC set to  0.000000
8/12/2011	9:37:03 AM	H2 MFC set to  500.000000
8/12/2011	9:37:03 AM	BCl3 MFC set to  0.000000
8/12/2011	9:37:03 AM	PHl3 MFC set to  0.000000
8/12/2011	9:37:03 AM	SiCl4 MFC set to  0.000000
8/12/2011	9:37:03 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	9:37:03 AM	Tube furnace set to 800
8/12/2011	9:40:03 AM	Helium valve closed
8/12/2011	9:40:03 AM	BCl3 valve closed
8/12/2011	9:40:03 AM	PH3 valve closed
8/12/2011	9:40:03 AM	SiCl4 pre valve closed
8/12/2011	9:40:03 AM	SiCl4 post valve closed
8/12/2011	9:40:03 AM	Main Vac valve closed
8/12/2011	9:40:03 AM	Bypass valve closed
8/12/2011	9:40:03 AM	H2 valve opened
8/12/2011	9:40:03 AM	Bubbler valve opened
8/12/2011	9:40:03 AM	Helium MFC set to  0.000000
8/12/2011	9:40:03 AM	H2 MFC set to  500.000000
8/12/2011	9:40:03 AM	BCl3 MFC set to  0.000000
8/12/2011	9:40:03 AM	PHl3 MFC set to  0.000000
8/12/2011	9:40:03 AM	SiCl4 MFC set to  0.000000
8/12/2011	9:40:03 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	9:40:03 AM	Tube furnace set to 750
8/12/2011	9:43:03 AM	H2 valve closed
8/12/2011	9:43:03 AM	BCl3 valve closed
8/12/2011	9:43:03 AM	PH3 valve closed
8/12/2011	9:43:03 AM	SiCl4 pre valve closed
8/12/2011	9:43:03 AM	SiCl4 post valve closed
8/12/2011	9:43:03 AM	Main Vac valve closed
8/12/2011	9:43:03 AM	Bypass valve closed
8/12/2011	9:43:03 AM	Helium valve opened
8/12/2011	9:43:03 AM	Bubbler valve opened
8/12/2011	9:43:03 AM	Helium MFC set to  500.000000
8/12/2011	9:43:03 AM	H2 MFC set to  0.000000
8/12/2011	9:43:03 AM	BCl3 MFC set to  0.000000
8/12/2011	9:43:03 AM	PHl3 MFC set to  0.000000
8/12/2011	9:43:03 AM	SiCl4 MFC set to  0.000000
8/12/2011	9:43:03 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	9:43:04 AM	Tube furnace set to 0
8/12/2011	10:03:04 AM	Helium valve closed
8/12/2011	10:03:04 AM	H2 valve closed
8/12/2011	10:03:04 AM	BCl3 valve closed
8/12/2011	10:03:04 AM	PH3 valve closed
8/12/2011	10:03:04 AM	SiCl4 pre valve closed
8/12/2011	10:03:04 AM	SiCl4 post valve closed
8/12/2011	10:03:04 AM	Main Vac valve closed
8/12/2011	10:03:04 AM	Bypass valve closed
8/12/2011	10:03:04 AM	Bubbler valve closed
8/12/2011	10:03:04 AM	Helium MFC set to  0.000000
8/12/2011	10:03:04 AM	H2 MFC set to  0.000000
8/12/2011	10:03:04 AM	BCl3 MFC set to  0.000000
8/12/2011	10:03:04 AM	PHl3 MFC set to  0.000000
8/12/2011	10:03:04 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:03:04 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:03:04 AM	Tube furnace set to 0
8/12/2011	10:03:05 AM	Run finished at 10:03 AM
8/12/2011	10:08:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/12/2011	10:08:44 AM	Recipe started at 10:08 AM
8/12/2011	10:08:44 AM	Helium valve closed
8/12/2011	10:08:44 AM	H2 valve closed
8/12/2011	10:08:44 AM	BCl3 valve closed
8/12/2011	10:08:44 AM	PH3 valve closed
8/12/2011	10:08:44 AM	SiCl4 pre valve closed
8/12/2011	10:08:44 AM	SiCl4 post valve closed
8/12/2011	10:08:44 AM	Main Vac valve closed
8/12/2011	10:08:44 AM	Bubbler valve closed
8/12/2011	10:08:44 AM	Bypass valve opened
8/12/2011	10:08:44 AM	Helium MFC set to  0.000000
8/12/2011	10:08:44 AM	H2 MFC set to  0.000000
8/12/2011	10:08:44 AM	BCl3 MFC set to  0.000000
8/12/2011	10:08:44 AM	PHl3 MFC set to  0.000000
8/12/2011	10:08:44 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:08:44 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:08:44 AM	Tube furnace set to 0
8/12/2011	10:09:45 AM	Helium valve closed
8/12/2011	10:09:45 AM	H2 valve closed
8/12/2011	10:09:45 AM	BCl3 valve closed
8/12/2011	10:09:45 AM	PH3 valve closed
8/12/2011	10:09:45 AM	SiCl4 pre valve closed
8/12/2011	10:09:45 AM	SiCl4 post valve closed
8/12/2011	10:09:45 AM	Main Vac valve closed
8/12/2011	10:09:45 AM	Bubbler valve closed
8/12/2011	10:09:45 AM	Bypass valve opened
8/12/2011	10:09:45 AM	Helium MFC set to  0.000000
8/12/2011	10:09:45 AM	H2 MFC set to  0.000000
8/12/2011	10:09:45 AM	BCl3 MFC set to  0.000000
8/12/2011	10:09:45 AM	PHl3 MFC set to  0.000000
8/12/2011	10:09:45 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:09:45 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:09:45 AM	Tube furnace set to 0
8/12/2011	10:10:45 AM	Helium valve closed
8/12/2011	10:10:45 AM	H2 valve closed
8/12/2011	10:10:45 AM	BCl3 valve closed
8/12/2011	10:10:45 AM	PH3 valve closed
8/12/2011	10:10:45 AM	SiCl4 pre valve closed
8/12/2011	10:10:45 AM	SiCl4 post valve closed
8/12/2011	10:10:45 AM	Bypass valve closed
8/12/2011	10:10:45 AM	Bubbler valve closed
8/12/2011	10:10:45 AM	Main Vac valve opened
8/12/2011	10:10:45 AM	Helium MFC set to  0.000000
8/12/2011	10:10:45 AM	H2 MFC set to  0.000000
8/12/2011	10:10:45 AM	BCl3 MFC set to  0.000000
8/12/2011	10:10:45 AM	PHl3 MFC set to  0.000000
8/12/2011	10:10:45 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:10:45 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:10:45 AM	Tube furnace set to 0
8/12/2011	10:10:46 AM	Run finished at 10:10 AM
8/12/2011	10:10:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/12/2011	10:11:27 AM	Recipe started at 10:11 AM
8/12/2011	10:11:27 AM	Helium valve closed
8/12/2011	10:11:27 AM	H2 valve closed
8/12/2011	10:11:27 AM	BCl3 valve closed
8/12/2011	10:11:27 AM	PH3 valve closed
8/12/2011	10:11:27 AM	SiCl4 pre valve closed
8/12/2011	10:11:27 AM	SiCl4 post valve closed
8/12/2011	10:11:27 AM	Bypass valve closed
8/12/2011	10:11:27 AM	Bubbler valve closed
8/12/2011	10:11:27 AM	Main Vac valve opened
8/12/2011	10:11:27 AM	Helium MFC set to  0.000000
8/12/2011	10:11:27 AM	H2 MFC set to  0.000000
8/12/2011	10:11:27 AM	BCl3 MFC set to  0.000000
8/12/2011	10:11:27 AM	PHl3 MFC set to  0.000000
8/12/2011	10:11:27 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:11:27 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:11:27 AM	Tube furnace set to 150
8/12/2011	10:11:57 AM	H2 valve closed
8/12/2011	10:11:57 AM	BCl3 valve closed
8/12/2011	10:11:57 AM	PH3 valve closed
8/12/2011	10:11:57 AM	SiCl4 pre valve closed
8/12/2011	10:11:57 AM	SiCl4 post valve closed
8/12/2011	10:11:57 AM	Bypass valve closed
8/12/2011	10:11:57 AM	Bubbler valve closed
8/12/2011	10:11:57 AM	Helium valve opened
8/12/2011	10:11:57 AM	Main Vac valve opened
8/12/2011	10:11:57 AM	Helium MFC set to  20.000000
8/12/2011	10:11:57 AM	H2 MFC set to  0.000000
8/12/2011	10:11:57 AM	BCl3 MFC set to  0.000000
8/12/2011	10:11:57 AM	PHl3 MFC set to  0.000000
8/12/2011	10:11:57 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:11:57 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:11:57 AM	Tube furnace set to 150
8/12/2011	10:12:27 AM	Helium valve closed
8/12/2011	10:12:27 AM	H2 valve closed
8/12/2011	10:12:27 AM	BCl3 valve closed
8/12/2011	10:12:27 AM	PH3 valve closed
8/12/2011	10:12:27 AM	SiCl4 pre valve closed
8/12/2011	10:12:27 AM	SiCl4 post valve closed
8/12/2011	10:12:27 AM	Bypass valve closed
8/12/2011	10:12:27 AM	Bubbler valve closed
8/12/2011	10:12:27 AM	Main Vac valve opened
8/12/2011	10:12:27 AM	Helium MFC set to  0.000000
8/12/2011	10:12:27 AM	H2 MFC set to  0.000000
8/12/2011	10:12:27 AM	BCl3 MFC set to  0.000000
8/12/2011	10:12:27 AM	PHl3 MFC set to  0.000000
8/12/2011	10:12:27 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:12:28 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:12:28 AM	Tube furnace set to 150
8/12/2011	10:12:58 AM	H2 valve closed
8/12/2011	10:12:58 AM	BCl3 valve closed
8/12/2011	10:12:58 AM	PH3 valve closed
8/12/2011	10:12:58 AM	SiCl4 pre valve closed
8/12/2011	10:12:58 AM	SiCl4 post valve closed
8/12/2011	10:12:58 AM	Bypass valve closed
8/12/2011	10:12:58 AM	Bubbler valve closed
8/12/2011	10:12:58 AM	Helium valve opened
8/12/2011	10:12:58 AM	Main Vac valve opened
8/12/2011	10:12:58 AM	Helium MFC set to  20.000000
8/12/2011	10:12:58 AM	H2 MFC set to  0.000000
8/12/2011	10:12:58 AM	BCl3 MFC set to  0.000000
8/12/2011	10:12:58 AM	PHl3 MFC set to  0.000000
8/12/2011	10:12:58 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:12:58 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:12:58 AM	Tube furnace set to 150
8/12/2011	10:13:28 AM	Helium valve closed
8/12/2011	10:13:28 AM	H2 valve closed
8/12/2011	10:13:28 AM	BCl3 valve closed
8/12/2011	10:13:28 AM	PH3 valve closed
8/12/2011	10:13:28 AM	SiCl4 pre valve closed
8/12/2011	10:13:28 AM	SiCl4 post valve closed
8/12/2011	10:13:28 AM	Bypass valve closed
8/12/2011	10:13:28 AM	Bubbler valve closed
8/12/2011	10:13:28 AM	Main Vac valve opened
8/12/2011	10:13:28 AM	Helium MFC set to  0.000000
8/12/2011	10:13:28 AM	H2 MFC set to  0.000000
8/12/2011	10:13:28 AM	BCl3 MFC set to  0.000000
8/12/2011	10:13:28 AM	PHl3 MFC set to  0.000000
8/12/2011	10:13:28 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:13:28 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:13:28 AM	Tube furnace set to 150
8/12/2011	10:13:58 AM	H2 valve closed
8/12/2011	10:13:58 AM	BCl3 valve closed
8/12/2011	10:13:58 AM	PH3 valve closed
8/12/2011	10:13:58 AM	SiCl4 pre valve closed
8/12/2011	10:13:58 AM	SiCl4 post valve closed
8/12/2011	10:13:58 AM	Bypass valve closed
8/12/2011	10:13:58 AM	Bubbler valve closed
8/12/2011	10:13:58 AM	Helium valve opened
8/12/2011	10:13:58 AM	Main Vac valve opened
8/12/2011	10:13:58 AM	Helium MFC set to  20.000000
8/12/2011	10:13:58 AM	H2 MFC set to  0.000000
8/12/2011	10:13:58 AM	BCl3 MFC set to  0.000000
8/12/2011	10:13:58 AM	PHl3 MFC set to  0.000000
8/12/2011	10:13:58 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:13:58 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:13:58 AM	Tube furnace set to 150
8/12/2011	10:14:28 AM	Helium valve closed
8/12/2011	10:14:28 AM	H2 valve closed
8/12/2011	10:14:28 AM	BCl3 valve closed
8/12/2011	10:14:28 AM	PH3 valve closed
8/12/2011	10:14:28 AM	SiCl4 pre valve closed
8/12/2011	10:14:28 AM	SiCl4 post valve closed
8/12/2011	10:14:28 AM	Bypass valve closed
8/12/2011	10:14:28 AM	Bubbler valve closed
8/12/2011	10:14:28 AM	Main Vac valve opened
8/12/2011	10:14:28 AM	Helium MFC set to  0.000000
8/12/2011	10:14:28 AM	H2 MFC set to  0.000000
8/12/2011	10:14:28 AM	BCl3 MFC set to  0.000000
8/12/2011	10:14:28 AM	PHl3 MFC set to  0.000000
8/12/2011	10:14:28 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:14:28 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:14:28 AM	Tube furnace set to 150
8/12/2011	10:14:58 AM	H2 valve closed
8/12/2011	10:14:58 AM	BCl3 valve closed
8/12/2011	10:14:58 AM	PH3 valve closed
8/12/2011	10:14:58 AM	SiCl4 pre valve closed
8/12/2011	10:14:58 AM	SiCl4 post valve closed
8/12/2011	10:14:58 AM	Bypass valve closed
8/12/2011	10:14:58 AM	Bubbler valve closed
8/12/2011	10:14:58 AM	Helium valve opened
8/12/2011	10:14:58 AM	Main Vac valve opened
8/12/2011	10:14:58 AM	Helium MFC set to  20.000000
8/12/2011	10:14:58 AM	H2 MFC set to  0.000000
8/12/2011	10:14:58 AM	BCl3 MFC set to  0.000000
8/12/2011	10:14:58 AM	PHl3 MFC set to  0.000000
8/12/2011	10:14:58 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:14:58 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:14:59 AM	Tube furnace set to 150
8/12/2011	10:15:29 AM	Helium valve closed
8/12/2011	10:15:29 AM	H2 valve closed
8/12/2011	10:15:29 AM	BCl3 valve closed
8/12/2011	10:15:29 AM	PH3 valve closed
8/12/2011	10:15:29 AM	SiCl4 pre valve closed
8/12/2011	10:15:29 AM	SiCl4 post valve closed
8/12/2011	10:15:29 AM	Bypass valve closed
8/12/2011	10:15:29 AM	Bubbler valve closed
8/12/2011	10:15:29 AM	Main Vac valve opened
8/12/2011	10:15:29 AM	Helium MFC set to  0.000000
8/12/2011	10:15:29 AM	H2 MFC set to  0.000000
8/12/2011	10:15:29 AM	BCl3 MFC set to  0.000000
8/12/2011	10:15:29 AM	PHl3 MFC set to  0.000000
8/12/2011	10:15:29 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:15:29 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:15:29 AM	Tube furnace set to 150
8/12/2011	10:15:59 AM	H2 valve closed
8/12/2011	10:15:59 AM	BCl3 valve closed
8/12/2011	10:15:59 AM	PH3 valve closed
8/12/2011	10:15:59 AM	SiCl4 pre valve closed
8/12/2011	10:15:59 AM	SiCl4 post valve closed
8/12/2011	10:15:59 AM	Bypass valve closed
8/12/2011	10:15:59 AM	Bubbler valve closed
8/12/2011	10:15:59 AM	Helium valve opened
8/12/2011	10:15:59 AM	Main Vac valve opened
8/12/2011	10:15:59 AM	Helium MFC set to  20.000000
8/12/2011	10:15:59 AM	H2 MFC set to  0.000000
8/12/2011	10:15:59 AM	BCl3 MFC set to  0.000000
8/12/2011	10:15:59 AM	PHl3 MFC set to  0.000000
8/12/2011	10:15:59 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:15:59 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:15:59 AM	Tube furnace set to 150
8/12/2011	10:16:29 AM	Helium valve closed
8/12/2011	10:16:29 AM	H2 valve closed
8/12/2011	10:16:29 AM	BCl3 valve closed
8/12/2011	10:16:29 AM	PH3 valve closed
8/12/2011	10:16:29 AM	SiCl4 pre valve closed
8/12/2011	10:16:29 AM	SiCl4 post valve closed
8/12/2011	10:16:29 AM	Bypass valve closed
8/12/2011	10:16:29 AM	Bubbler valve closed
8/12/2011	10:16:29 AM	Main Vac valve opened
8/12/2011	10:16:29 AM	Helium MFC set to  0.000000
8/12/2011	10:16:29 AM	H2 MFC set to  0.000000
8/12/2011	10:16:29 AM	BCl3 MFC set to  0.000000
8/12/2011	10:16:29 AM	PHl3 MFC set to  0.000000
8/12/2011	10:16:29 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:16:29 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:16:29 AM	Tube furnace set to 150
8/12/2011	10:16:59 AM	H2 valve closed
8/12/2011	10:16:59 AM	BCl3 valve closed
8/12/2011	10:16:59 AM	PH3 valve closed
8/12/2011	10:16:59 AM	SiCl4 pre valve closed
8/12/2011	10:16:59 AM	SiCl4 post valve closed
8/12/2011	10:16:59 AM	Bypass valve closed
8/12/2011	10:16:59 AM	Bubbler valve closed
8/12/2011	10:16:59 AM	Helium valve opened
8/12/2011	10:16:59 AM	Main Vac valve opened
8/12/2011	10:16:59 AM	Helium MFC set to  20.000000
8/12/2011	10:16:59 AM	H2 MFC set to  0.000000
8/12/2011	10:16:59 AM	BCl3 MFC set to  0.000000
8/12/2011	10:16:59 AM	PHl3 MFC set to  0.000000
8/12/2011	10:16:59 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:16:59 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:16:59 AM	Tube furnace set to 150
8/12/2011	10:17:29 AM	Helium valve closed
8/12/2011	10:17:29 AM	H2 valve closed
8/12/2011	10:17:30 AM	BCl3 valve closed
8/12/2011	10:17:30 AM	PH3 valve closed
8/12/2011	10:17:30 AM	SiCl4 pre valve closed
8/12/2011	10:17:30 AM	SiCl4 post valve closed
8/12/2011	10:17:30 AM	Bypass valve closed
8/12/2011	10:17:30 AM	Bubbler valve closed
8/12/2011	10:17:30 AM	Main Vac valve opened
8/12/2011	10:17:30 AM	Helium MFC set to  0.000000
8/12/2011	10:17:30 AM	H2 MFC set to  0.000000
8/12/2011	10:17:30 AM	BCl3 MFC set to  0.000000
8/12/2011	10:17:30 AM	PHl3 MFC set to  0.000000
8/12/2011	10:17:30 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:17:30 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:17:30 AM	Tube furnace set to 150
8/12/2011	10:18:00 AM	H2 valve closed
8/12/2011	10:18:00 AM	BCl3 valve closed
8/12/2011	10:18:00 AM	PH3 valve closed
8/12/2011	10:18:00 AM	SiCl4 pre valve closed
8/12/2011	10:18:00 AM	SiCl4 post valve closed
8/12/2011	10:18:00 AM	Bypass valve closed
8/12/2011	10:18:00 AM	Bubbler valve closed
8/12/2011	10:18:00 AM	Helium valve opened
8/12/2011	10:18:00 AM	Main Vac valve opened
8/12/2011	10:18:00 AM	Helium MFC set to  20.000000
8/12/2011	10:18:00 AM	H2 MFC set to  0.000000
8/12/2011	10:18:00 AM	BCl3 MFC set to  0.000000
8/12/2011	10:18:00 AM	PHl3 MFC set to  0.000000
8/12/2011	10:18:00 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:18:00 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:18:00 AM	Tube furnace set to 150
8/12/2011	10:18:30 AM	Helium valve closed
8/12/2011	10:18:30 AM	H2 valve closed
8/12/2011	10:18:30 AM	BCl3 valve closed
8/12/2011	10:18:30 AM	PH3 valve closed
8/12/2011	10:18:30 AM	SiCl4 pre valve closed
8/12/2011	10:18:30 AM	SiCl4 post valve closed
8/12/2011	10:18:30 AM	Bypass valve closed
8/12/2011	10:18:30 AM	Bubbler valve closed
8/12/2011	10:18:30 AM	Main Vac valve opened
8/12/2011	10:18:30 AM	Helium MFC set to  0.000000
8/12/2011	10:18:30 AM	H2 MFC set to  0.000000
8/12/2011	10:18:30 AM	BCl3 MFC set to  0.000000
8/12/2011	10:18:30 AM	PHl3 MFC set to  0.000000
8/12/2011	10:18:30 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:18:30 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:18:30 AM	Tube furnace set to 150
8/12/2011	10:19:00 AM	H2 valve closed
8/12/2011	10:19:00 AM	BCl3 valve closed
8/12/2011	10:19:00 AM	PH3 valve closed
8/12/2011	10:19:00 AM	SiCl4 pre valve closed
8/12/2011	10:19:00 AM	SiCl4 post valve closed
8/12/2011	10:19:00 AM	Bypass valve closed
8/12/2011	10:19:00 AM	Bubbler valve closed
8/12/2011	10:19:00 AM	Helium valve opened
8/12/2011	10:19:00 AM	Main Vac valve opened
8/12/2011	10:19:00 AM	Helium MFC set to  20.000000
8/12/2011	10:19:00 AM	H2 MFC set to  0.000000
8/12/2011	10:19:00 AM	BCl3 MFC set to  0.000000
8/12/2011	10:19:00 AM	PHl3 MFC set to  0.000000
8/12/2011	10:19:00 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:19:00 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:19:00 AM	Tube furnace set to 150
8/12/2011	10:19:30 AM	Helium valve closed
8/12/2011	10:19:30 AM	H2 valve closed
8/12/2011	10:19:30 AM	BCl3 valve closed
8/12/2011	10:19:30 AM	PH3 valve closed
8/12/2011	10:19:30 AM	SiCl4 pre valve closed
8/12/2011	10:19:30 AM	SiCl4 post valve closed
8/12/2011	10:19:30 AM	Bypass valve closed
8/12/2011	10:19:30 AM	Bubbler valve closed
8/12/2011	10:19:30 AM	Main Vac valve opened
8/12/2011	10:19:30 AM	Helium MFC set to  0.000000
8/12/2011	10:19:30 AM	H2 MFC set to  0.000000
8/12/2011	10:19:30 AM	BCl3 MFC set to  0.000000
8/12/2011	10:19:30 AM	PHl3 MFC set to  0.000000
8/12/2011	10:19:30 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:19:30 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:19:31 AM	Tube furnace set to 150
8/12/2011	10:20:01 AM	H2 valve closed
8/12/2011	10:20:01 AM	BCl3 valve closed
8/12/2011	10:20:01 AM	PH3 valve closed
8/12/2011	10:20:01 AM	SiCl4 pre valve closed
8/12/2011	10:20:01 AM	SiCl4 post valve closed
8/12/2011	10:20:01 AM	Bypass valve closed
8/12/2011	10:20:01 AM	Bubbler valve closed
8/12/2011	10:20:01 AM	Helium valve opened
8/12/2011	10:20:01 AM	Main Vac valve opened
8/12/2011	10:20:01 AM	Helium MFC set to  20.000000
8/12/2011	10:20:01 AM	H2 MFC set to  0.000000
8/12/2011	10:20:01 AM	BCl3 MFC set to  0.000000
8/12/2011	10:20:01 AM	PHl3 MFC set to  0.000000
8/12/2011	10:20:01 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:20:01 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:20:01 AM	Tube furnace set to 150
8/12/2011	10:20:31 AM	Helium valve closed
8/12/2011	10:20:31 AM	H2 valve closed
8/12/2011	10:20:31 AM	BCl3 valve closed
8/12/2011	10:20:31 AM	PH3 valve closed
8/12/2011	10:20:31 AM	SiCl4 pre valve closed
8/12/2011	10:20:31 AM	SiCl4 post valve closed
8/12/2011	10:20:31 AM	Bypass valve closed
8/12/2011	10:20:31 AM	Bubbler valve closed
8/12/2011	10:20:31 AM	Main Vac valve opened
8/12/2011	10:20:31 AM	Helium MFC set to  0.000000
8/12/2011	10:20:31 AM	H2 MFC set to  0.000000
8/12/2011	10:20:31 AM	BCl3 MFC set to  0.000000
8/12/2011	10:20:31 AM	PHl3 MFC set to  0.000000
8/12/2011	10:20:31 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:20:31 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:20:31 AM	Tube furnace set to 150
8/12/2011	10:21:01 AM	H2 valve closed
8/12/2011	10:21:01 AM	BCl3 valve closed
8/12/2011	10:21:01 AM	PH3 valve closed
8/12/2011	10:21:01 AM	SiCl4 pre valve closed
8/12/2011	10:21:01 AM	SiCl4 post valve closed
8/12/2011	10:21:01 AM	Bypass valve closed
8/12/2011	10:21:01 AM	Bubbler valve closed
8/12/2011	10:21:01 AM	Helium valve opened
8/12/2011	10:21:01 AM	Main Vac valve opened
8/12/2011	10:21:01 AM	Helium MFC set to  20.000000
8/12/2011	10:21:01 AM	H2 MFC set to  0.000000
8/12/2011	10:21:01 AM	BCl3 MFC set to  0.000000
8/12/2011	10:21:01 AM	PHl3 MFC set to  0.000000
8/12/2011	10:21:01 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:21:01 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:21:01 AM	Tube furnace set to 150
8/12/2011	10:21:31 AM	Helium valve closed
8/12/2011	10:21:31 AM	H2 valve closed
8/12/2011	10:21:31 AM	BCl3 valve closed
8/12/2011	10:21:31 AM	PH3 valve closed
8/12/2011	10:21:31 AM	SiCl4 pre valve closed
8/12/2011	10:21:31 AM	SiCl4 post valve closed
8/12/2011	10:21:31 AM	Bypass valve closed
8/12/2011	10:21:31 AM	Bubbler valve closed
8/12/2011	10:21:31 AM	Main Vac valve opened
8/12/2011	10:21:31 AM	Helium MFC set to  0.000000
8/12/2011	10:21:31 AM	H2 MFC set to  0.000000
8/12/2011	10:21:31 AM	BCl3 MFC set to  0.000000
8/12/2011	10:21:31 AM	PHl3 MFC set to  0.000000
8/12/2011	10:21:31 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:21:31 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:21:31 AM	Tube furnace set to 150
8/12/2011	10:21:32 AM	Run finished at 10:21 AM
8/12/2011	10:51:10 AM	Main Vac valve closed
8/12/2011	10:51:16 AM	Main Vac valve opened
8/12/2011	10:51:36 AM	Recipe started at 10:51 AM
8/12/2011	10:51:36 AM	Helium valve closed
8/12/2011	10:51:36 AM	H2 valve closed
8/12/2011	10:51:36 AM	BCl3 valve closed
8/12/2011	10:51:36 AM	PH3 valve closed
8/12/2011	10:51:36 AM	SiCl4 pre valve closed
8/12/2011	10:51:36 AM	SiCl4 post valve closed
8/12/2011	10:51:36 AM	Bypass valve closed
8/12/2011	10:51:36 AM	Bubbler valve closed
8/12/2011	10:51:36 AM	Main Vac valve opened
8/12/2011	10:51:36 AM	Helium MFC set to  0.000000
8/12/2011	10:51:36 AM	H2 MFC set to  0.000000
8/12/2011	10:51:36 AM	BCl3 MFC set to  0.000000
8/12/2011	10:51:36 AM	PHl3 MFC set to  0.000000
8/12/2011	10:51:36 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:51:36 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:51:36 AM	Tube furnace set to 150
8/12/2011	10:52:06 AM	H2 valve closed
8/12/2011	10:52:06 AM	BCl3 valve closed
8/12/2011	10:52:06 AM	PH3 valve closed
8/12/2011	10:52:06 AM	SiCl4 pre valve closed
8/12/2011	10:52:06 AM	SiCl4 post valve closed
8/12/2011	10:52:06 AM	Bypass valve closed
8/12/2011	10:52:06 AM	Bubbler valve closed
8/12/2011	10:52:06 AM	Helium valve opened
8/12/2011	10:52:06 AM	Main Vac valve opened
8/12/2011	10:52:06 AM	Helium MFC set to  20.000000
8/12/2011	10:52:06 AM	H2 MFC set to  0.000000
8/12/2011	10:52:06 AM	BCl3 MFC set to  0.000000
8/12/2011	10:52:06 AM	PHl3 MFC set to  0.000000
8/12/2011	10:52:06 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:52:06 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:52:06 AM	Tube furnace set to 150
8/12/2011	10:52:36 AM	Helium valve closed
8/12/2011	10:52:36 AM	H2 valve closed
8/12/2011	10:52:36 AM	BCl3 valve closed
8/12/2011	10:52:36 AM	PH3 valve closed
8/12/2011	10:52:36 AM	SiCl4 pre valve closed
8/12/2011	10:52:36 AM	SiCl4 post valve closed
8/12/2011	10:52:36 AM	Bypass valve closed
8/12/2011	10:52:36 AM	Bubbler valve closed
8/12/2011	10:52:36 AM	Main Vac valve opened
8/12/2011	10:52:36 AM	Helium MFC set to  0.000000
8/12/2011	10:52:36 AM	H2 MFC set to  0.000000
8/12/2011	10:52:36 AM	BCl3 MFC set to  0.000000
8/12/2011	10:52:36 AM	PHl3 MFC set to  0.000000
8/12/2011	10:52:36 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:52:36 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:52:37 AM	Tube furnace set to 150
8/12/2011	10:53:07 AM	H2 valve closed
8/12/2011	10:53:07 AM	BCl3 valve closed
8/12/2011	10:53:07 AM	PH3 valve closed
8/12/2011	10:53:07 AM	SiCl4 pre valve closed
8/12/2011	10:53:07 AM	SiCl4 post valve closed
8/12/2011	10:53:07 AM	Bypass valve closed
8/12/2011	10:53:07 AM	Bubbler valve closed
8/12/2011	10:53:07 AM	Helium valve opened
8/12/2011	10:53:07 AM	Main Vac valve opened
8/12/2011	10:53:07 AM	Helium MFC set to  20.000000
8/12/2011	10:53:07 AM	H2 MFC set to  0.000000
8/12/2011	10:53:07 AM	BCl3 MFC set to  0.000000
8/12/2011	10:53:07 AM	PHl3 MFC set to  0.000000
8/12/2011	10:53:07 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:53:07 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:53:07 AM	Tube furnace set to 150
8/12/2011	10:53:37 AM	Helium valve closed
8/12/2011	10:53:37 AM	H2 valve closed
8/12/2011	10:53:37 AM	BCl3 valve closed
8/12/2011	10:53:37 AM	PH3 valve closed
8/12/2011	10:53:37 AM	SiCl4 pre valve closed
8/12/2011	10:53:37 AM	SiCl4 post valve closed
8/12/2011	10:53:37 AM	Bypass valve closed
8/12/2011	10:53:37 AM	Bubbler valve closed
8/12/2011	10:53:37 AM	Main Vac valve opened
8/12/2011	10:53:37 AM	Helium MFC set to  0.000000
8/12/2011	10:53:37 AM	H2 MFC set to  0.000000
8/12/2011	10:53:37 AM	BCl3 MFC set to  0.000000
8/12/2011	10:53:37 AM	PHl3 MFC set to  0.000000
8/12/2011	10:53:37 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:53:37 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:53:37 AM	Tube furnace set to 150
8/12/2011	10:54:07 AM	H2 valve closed
8/12/2011	10:54:07 AM	BCl3 valve closed
8/12/2011	10:54:07 AM	PH3 valve closed
8/12/2011	10:54:07 AM	SiCl4 pre valve closed
8/12/2011	10:54:07 AM	SiCl4 post valve closed
8/12/2011	10:54:07 AM	Bypass valve closed
8/12/2011	10:54:07 AM	Bubbler valve closed
8/12/2011	10:54:07 AM	Helium valve opened
8/12/2011	10:54:07 AM	Main Vac valve opened
8/12/2011	10:54:07 AM	Helium MFC set to  20.000000
8/12/2011	10:54:07 AM	H2 MFC set to  0.000000
8/12/2011	10:54:07 AM	BCl3 MFC set to  0.000000
8/12/2011	10:54:07 AM	PHl3 MFC set to  0.000000
8/12/2011	10:54:07 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:54:07 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:54:07 AM	Tube furnace set to 150
8/12/2011	10:54:37 AM	Helium valve closed
8/12/2011	10:54:37 AM	H2 valve closed
8/12/2011	10:54:37 AM	BCl3 valve closed
8/12/2011	10:54:37 AM	PH3 valve closed
8/12/2011	10:54:37 AM	SiCl4 pre valve closed
8/12/2011	10:54:37 AM	SiCl4 post valve closed
8/12/2011	10:54:37 AM	Bypass valve closed
8/12/2011	10:54:37 AM	Bubbler valve closed
8/12/2011	10:54:37 AM	Main Vac valve opened
8/12/2011	10:54:37 AM	Helium MFC set to  0.000000
8/12/2011	10:54:37 AM	H2 MFC set to  0.000000
8/12/2011	10:54:37 AM	BCl3 MFC set to  0.000000
8/12/2011	10:54:37 AM	PHl3 MFC set to  0.000000
8/12/2011	10:54:37 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:54:37 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:54:37 AM	Tube furnace set to 150
8/12/2011	10:55:07 AM	H2 valve closed
8/12/2011	10:55:07 AM	BCl3 valve closed
8/12/2011	10:55:07 AM	PH3 valve closed
8/12/2011	10:55:07 AM	SiCl4 pre valve closed
8/12/2011	10:55:07 AM	SiCl4 post valve closed
8/12/2011	10:55:07 AM	Bypass valve closed
8/12/2011	10:55:07 AM	Bubbler valve closed
8/12/2011	10:55:07 AM	Helium valve opened
8/12/2011	10:55:07 AM	Main Vac valve opened
8/12/2011	10:55:07 AM	Helium MFC set to  20.000000
8/12/2011	10:55:07 AM	H2 MFC set to  0.000000
8/12/2011	10:55:07 AM	BCl3 MFC set to  0.000000
8/12/2011	10:55:07 AM	PHl3 MFC set to  0.000000
8/12/2011	10:55:07 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:55:07 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:55:08 AM	Tube furnace set to 150
8/12/2011	10:55:38 AM	Helium valve closed
8/12/2011	10:55:38 AM	H2 valve closed
8/12/2011	10:55:38 AM	BCl3 valve closed
8/12/2011	10:55:38 AM	PH3 valve closed
8/12/2011	10:55:38 AM	SiCl4 pre valve closed
8/12/2011	10:55:38 AM	SiCl4 post valve closed
8/12/2011	10:55:38 AM	Bypass valve closed
8/12/2011	10:55:38 AM	Bubbler valve closed
8/12/2011	10:55:38 AM	Main Vac valve opened
8/12/2011	10:55:38 AM	Helium MFC set to  0.000000
8/12/2011	10:55:38 AM	H2 MFC set to  0.000000
8/12/2011	10:55:38 AM	BCl3 MFC set to  0.000000
8/12/2011	10:55:38 AM	PHl3 MFC set to  0.000000
8/12/2011	10:55:38 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:55:38 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:55:38 AM	Tube furnace set to 150
8/12/2011	10:56:08 AM	H2 valve closed
8/12/2011	10:56:08 AM	BCl3 valve closed
8/12/2011	10:56:08 AM	PH3 valve closed
8/12/2011	10:56:08 AM	SiCl4 pre valve closed
8/12/2011	10:56:08 AM	SiCl4 post valve closed
8/12/2011	10:56:08 AM	Bypass valve closed
8/12/2011	10:56:08 AM	Bubbler valve closed
8/12/2011	10:56:08 AM	Helium valve opened
8/12/2011	10:56:08 AM	Main Vac valve opened
8/12/2011	10:56:08 AM	Helium MFC set to  20.000000
8/12/2011	10:56:08 AM	H2 MFC set to  0.000000
8/12/2011	10:56:08 AM	BCl3 MFC set to  0.000000
8/12/2011	10:56:08 AM	PHl3 MFC set to  0.000000
8/12/2011	10:56:08 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:56:08 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:56:08 AM	Tube furnace set to 150
8/12/2011	10:56:38 AM	Helium valve closed
8/12/2011	10:56:38 AM	H2 valve closed
8/12/2011	10:56:38 AM	BCl3 valve closed
8/12/2011	10:56:38 AM	PH3 valve closed
8/12/2011	10:56:38 AM	SiCl4 pre valve closed
8/12/2011	10:56:38 AM	SiCl4 post valve closed
8/12/2011	10:56:38 AM	Bypass valve closed
8/12/2011	10:56:38 AM	Bubbler valve closed
8/12/2011	10:56:38 AM	Main Vac valve opened
8/12/2011	10:56:38 AM	Helium MFC set to  0.000000
8/12/2011	10:56:38 AM	H2 MFC set to  0.000000
8/12/2011	10:56:38 AM	BCl3 MFC set to  0.000000
8/12/2011	10:56:38 AM	PHl3 MFC set to  0.000000
8/12/2011	10:56:38 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:56:38 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:56:38 AM	Tube furnace set to 150
8/12/2011	10:57:08 AM	H2 valve closed
8/12/2011	10:57:08 AM	BCl3 valve closed
8/12/2011	10:57:08 AM	PH3 valve closed
8/12/2011	10:57:08 AM	SiCl4 pre valve closed
8/12/2011	10:57:08 AM	SiCl4 post valve closed
8/12/2011	10:57:08 AM	Bypass valve closed
8/12/2011	10:57:08 AM	Bubbler valve closed
8/12/2011	10:57:08 AM	Helium valve opened
8/12/2011	10:57:08 AM	Main Vac valve opened
8/12/2011	10:57:08 AM	Helium MFC set to  20.000000
8/12/2011	10:57:08 AM	H2 MFC set to  0.000000
8/12/2011	10:57:08 AM	BCl3 MFC set to  0.000000
8/12/2011	10:57:08 AM	PHl3 MFC set to  0.000000
8/12/2011	10:57:08 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:57:08 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:57:08 AM	Tube furnace set to 150
8/12/2011	10:57:38 AM	Helium valve closed
8/12/2011	10:57:38 AM	H2 valve closed
8/12/2011	10:57:38 AM	BCl3 valve closed
8/12/2011	10:57:38 AM	PH3 valve closed
8/12/2011	10:57:38 AM	SiCl4 pre valve closed
8/12/2011	10:57:38 AM	SiCl4 post valve closed
8/12/2011	10:57:38 AM	Bypass valve closed
8/12/2011	10:57:38 AM	Bubbler valve closed
8/12/2011	10:57:38 AM	Main Vac valve opened
8/12/2011	10:57:38 AM	Helium MFC set to  0.000000
8/12/2011	10:57:38 AM	H2 MFC set to  0.000000
8/12/2011	10:57:38 AM	BCl3 MFC set to  0.000000
8/12/2011	10:57:38 AM	PHl3 MFC set to  0.000000
8/12/2011	10:57:38 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:57:38 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:57:39 AM	Tube furnace set to 150
8/12/2011	10:58:09 AM	H2 valve closed
8/12/2011	10:58:09 AM	BCl3 valve closed
8/12/2011	10:58:09 AM	PH3 valve closed
8/12/2011	10:58:09 AM	SiCl4 pre valve closed
8/12/2011	10:58:09 AM	SiCl4 post valve closed
8/12/2011	10:58:09 AM	Bypass valve closed
8/12/2011	10:58:09 AM	Bubbler valve closed
8/12/2011	10:58:09 AM	Helium valve opened
8/12/2011	10:58:09 AM	Main Vac valve opened
8/12/2011	10:58:09 AM	Helium MFC set to  20.000000
8/12/2011	10:58:09 AM	H2 MFC set to  0.000000
8/12/2011	10:58:09 AM	BCl3 MFC set to  0.000000
8/12/2011	10:58:09 AM	PHl3 MFC set to  0.000000
8/12/2011	10:58:09 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:58:09 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:58:09 AM	Tube furnace set to 150
8/12/2011	10:58:39 AM	Helium valve closed
8/12/2011	10:58:39 AM	H2 valve closed
8/12/2011	10:58:39 AM	BCl3 valve closed
8/12/2011	10:58:39 AM	PH3 valve closed
8/12/2011	10:58:39 AM	SiCl4 pre valve closed
8/12/2011	10:58:39 AM	SiCl4 post valve closed
8/12/2011	10:58:39 AM	Bypass valve closed
8/12/2011	10:58:39 AM	Bubbler valve closed
8/12/2011	10:58:39 AM	Main Vac valve opened
8/12/2011	10:58:39 AM	Helium MFC set to  0.000000
8/12/2011	10:58:39 AM	H2 MFC set to  0.000000
8/12/2011	10:58:39 AM	BCl3 MFC set to  0.000000
8/12/2011	10:58:39 AM	PHl3 MFC set to  0.000000
8/12/2011	10:58:39 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:58:39 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:58:39 AM	Tube furnace set to 150
8/12/2011	10:59:09 AM	H2 valve closed
8/12/2011	10:59:09 AM	BCl3 valve closed
8/12/2011	10:59:09 AM	PH3 valve closed
8/12/2011	10:59:09 AM	SiCl4 pre valve closed
8/12/2011	10:59:09 AM	SiCl4 post valve closed
8/12/2011	10:59:09 AM	Bypass valve closed
8/12/2011	10:59:09 AM	Bubbler valve closed
8/12/2011	10:59:09 AM	Helium valve opened
8/12/2011	10:59:09 AM	Main Vac valve opened
8/12/2011	10:59:09 AM	Helium MFC set to  20.000000
8/12/2011	10:59:09 AM	H2 MFC set to  0.000000
8/12/2011	10:59:09 AM	BCl3 MFC set to  0.000000
8/12/2011	10:59:09 AM	PHl3 MFC set to  0.000000
8/12/2011	10:59:09 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:59:09 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:59:09 AM	Tube furnace set to 150
8/12/2011	10:59:39 AM	Helium valve closed
8/12/2011	10:59:39 AM	H2 valve closed
8/12/2011	10:59:39 AM	BCl3 valve closed
8/12/2011	10:59:39 AM	PH3 valve closed
8/12/2011	10:59:39 AM	SiCl4 pre valve closed
8/12/2011	10:59:39 AM	SiCl4 post valve closed
8/12/2011	10:59:39 AM	Bypass valve closed
8/12/2011	10:59:39 AM	Bubbler valve closed
8/12/2011	10:59:39 AM	Main Vac valve opened
8/12/2011	10:59:39 AM	Helium MFC set to  0.000000
8/12/2011	10:59:39 AM	H2 MFC set to  0.000000
8/12/2011	10:59:39 AM	BCl3 MFC set to  0.000000
8/12/2011	10:59:39 AM	PHl3 MFC set to  0.000000
8/12/2011	10:59:39 AM	SiCl4 MFC set to  0.000000
8/12/2011	10:59:39 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	10:59:39 AM	Tube furnace set to 150
8/12/2011	11:00:09 AM	H2 valve closed
8/12/2011	11:00:09 AM	BCl3 valve closed
8/12/2011	11:00:09 AM	PH3 valve closed
8/12/2011	11:00:09 AM	SiCl4 pre valve closed
8/12/2011	11:00:09 AM	SiCl4 post valve closed
8/12/2011	11:00:09 AM	Bypass valve closed
8/12/2011	11:00:09 AM	Bubbler valve closed
8/12/2011	11:00:09 AM	Helium valve opened
8/12/2011	11:00:09 AM	Main Vac valve opened
8/12/2011	11:00:09 AM	Helium MFC set to  20.000000
8/12/2011	11:00:09 AM	H2 MFC set to  0.000000
8/12/2011	11:00:09 AM	BCl3 MFC set to  0.000000
8/12/2011	11:00:09 AM	PHl3 MFC set to  0.000000
8/12/2011	11:00:09 AM	SiCl4 MFC set to  0.000000
8/12/2011	11:00:09 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	11:00:10 AM	Tube furnace set to 150
8/12/2011	11:00:40 AM	Helium valve closed
8/12/2011	11:00:40 AM	H2 valve closed
8/12/2011	11:00:40 AM	BCl3 valve closed
8/12/2011	11:00:40 AM	PH3 valve closed
8/12/2011	11:00:40 AM	SiCl4 pre valve closed
8/12/2011	11:00:40 AM	SiCl4 post valve closed
8/12/2011	11:00:40 AM	Bypass valve closed
8/12/2011	11:00:40 AM	Bubbler valve closed
8/12/2011	11:00:40 AM	Main Vac valve opened
8/12/2011	11:00:40 AM	Helium MFC set to  0.000000
8/12/2011	11:00:40 AM	H2 MFC set to  0.000000
8/12/2011	11:00:40 AM	BCl3 MFC set to  0.000000
8/12/2011	11:00:40 AM	PHl3 MFC set to  0.000000
8/12/2011	11:00:40 AM	SiCl4 MFC set to  0.000000
8/12/2011	11:00:40 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	11:00:40 AM	Tube furnace set to 150
8/12/2011	11:01:10 AM	H2 valve closed
8/12/2011	11:01:10 AM	BCl3 valve closed
8/12/2011	11:01:10 AM	PH3 valve closed
8/12/2011	11:01:10 AM	SiCl4 pre valve closed
8/12/2011	11:01:10 AM	SiCl4 post valve closed
8/12/2011	11:01:10 AM	Bypass valve closed
8/12/2011	11:01:10 AM	Bubbler valve closed
8/12/2011	11:01:10 AM	Helium valve opened
8/12/2011	11:01:10 AM	Main Vac valve opened
8/12/2011	11:01:10 AM	Helium MFC set to  20.000000
8/12/2011	11:01:10 AM	H2 MFC set to  0.000000
8/12/2011	11:01:10 AM	BCl3 MFC set to  0.000000
8/12/2011	11:01:10 AM	PHl3 MFC set to  0.000000
8/12/2011	11:01:10 AM	SiCl4 MFC set to  0.000000
8/12/2011	11:01:10 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	11:01:10 AM	Tube furnace set to 150
8/12/2011	11:01:40 AM	Helium valve closed
8/12/2011	11:01:40 AM	H2 valve closed
8/12/2011	11:01:40 AM	BCl3 valve closed
8/12/2011	11:01:40 AM	PH3 valve closed
8/12/2011	11:01:40 AM	SiCl4 pre valve closed
8/12/2011	11:01:40 AM	SiCl4 post valve closed
8/12/2011	11:01:40 AM	Bypass valve closed
8/12/2011	11:01:40 AM	Bubbler valve closed
8/12/2011	11:01:40 AM	Main Vac valve opened
8/12/2011	11:01:40 AM	Helium MFC set to  0.000000
8/12/2011	11:01:40 AM	H2 MFC set to  0.000000
8/12/2011	11:01:40 AM	BCl3 MFC set to  0.000000
8/12/2011	11:01:40 AM	PHl3 MFC set to  0.000000
8/12/2011	11:01:40 AM	SiCl4 MFC set to  0.000000
8/12/2011	11:01:40 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	11:01:40 AM	Tube furnace set to 150
8/12/2011	11:01:41 AM	Run finished at 11:01 AM
8/12/2011	11:34:19 AM	Main Vac valve closed
8/12/2011	11:34:30 AM	Main Vac valve opened
8/12/2011	11:35:30 AM	Recipe started at 11:35 AM
8/12/2011	11:35:30 AM	Helium valve closed
8/12/2011	11:35:30 AM	H2 valve closed
8/12/2011	11:35:30 AM	BCl3 valve closed
8/12/2011	11:35:30 AM	PH3 valve closed
8/12/2011	11:35:30 AM	SiCl4 pre valve closed
8/12/2011	11:35:30 AM	SiCl4 post valve closed
8/12/2011	11:35:30 AM	Main Vac valve closed
8/12/2011	11:35:30 AM	Bypass valve closed
8/12/2011	11:35:30 AM	Bubbler valve closed
8/12/2011	11:35:30 AM	Helium MFC set to  0.000000
8/12/2011	11:35:30 AM	H2 MFC set to  0.000000
8/12/2011	11:35:30 AM	BCl3 MFC set to  0.000000
8/12/2011	11:35:30 AM	PHl3 MFC set to  0.000000
8/12/2011	11:35:30 AM	SiCl4 MFC set to  0.000000
8/12/2011	11:35:30 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	11:35:30 AM	Tube furnace set to 0
8/12/2011	11:35:33 AM	Helium valve closed
8/12/2011	11:35:33 AM	BCl3 valve closed
8/12/2011	11:35:33 AM	PH3 valve closed
8/12/2011	11:35:33 AM	SiCl4 pre valve closed
8/12/2011	11:35:33 AM	SiCl4 post valve closed
8/12/2011	11:35:33 AM	Main Vac valve closed
8/12/2011	11:35:33 AM	Bypass valve closed
8/12/2011	11:35:33 AM	Bubbler valve closed
8/12/2011	11:35:33 AM	H2 valve opened
8/12/2011	11:35:33 AM	Helium MFC set to  0.000000
8/12/2011	11:35:33 AM	H2 MFC set to  500.000000
8/12/2011	11:35:33 AM	BCl3 MFC set to  0.000000
8/12/2011	11:35:33 AM	PHl3 MFC set to  0.000000
8/12/2011	11:35:33 AM	SiCl4 MFC set to  0.000000
8/12/2011	11:35:33 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	11:35:33 AM	Tube furnace set to 0
8/12/2011	11:36:39 AM	Helium valve closed
8/12/2011	11:36:39 AM	BCl3 valve closed
8/12/2011	11:36:39 AM	PH3 valve closed
8/12/2011	11:36:39 AM	SiCl4 pre valve closed
8/12/2011	11:36:39 AM	SiCl4 post valve closed
8/12/2011	11:36:39 AM	Main Vac valve closed
8/12/2011	11:36:39 AM	Bypass valve closed
8/12/2011	11:36:39 AM	H2 valve opened
8/12/2011	11:36:39 AM	Bubbler valve opened
8/12/2011	11:36:39 AM	Helium MFC set to  0.000000
8/12/2011	11:36:39 AM	H2 MFC set to  500.000000
8/12/2011	11:36:39 AM	BCl3 MFC set to  0.000000
8/12/2011	11:36:39 AM	PHl3 MFC set to  0.000000
8/12/2011	11:36:39 AM	SiCl4 MFC set to  0.000000
8/12/2011	11:36:39 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	11:36:39 AM	Tube furnace set to 0
8/12/2011	11:36:40 AM	Helium valve closed
8/12/2011	11:36:40 AM	BCl3 valve closed
8/12/2011	11:36:40 AM	PH3 valve closed
8/12/2011	11:36:40 AM	SiCl4 pre valve closed
8/12/2011	11:36:40 AM	SiCl4 post valve closed
8/12/2011	11:36:40 AM	Main Vac valve closed
8/12/2011	11:36:40 AM	Bypass valve closed
8/12/2011	11:36:40 AM	H2 valve opened
8/12/2011	11:36:40 AM	Bubbler valve opened
8/12/2011	11:36:40 AM	Helium MFC set to  0.000000
8/12/2011	11:36:40 AM	H2 MFC set to  500.000000
8/12/2011	11:36:40 AM	BCl3 MFC set to  0.000000
8/12/2011	11:36:40 AM	PHl3 MFC set to  0.000000
8/12/2011	11:36:40 AM	SiCl4 MFC set to  0.000000
8/12/2011	11:36:40 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	11:36:40 AM	Tube furnace set to 1000
8/12/2011	11:56:40 AM	Helium valve closed
8/12/2011	11:56:40 AM	PH3 valve closed
8/12/2011	11:56:40 AM	Main Vac valve closed
8/12/2011	11:56:40 AM	Bypass valve closed
8/12/2011	11:56:40 AM	H2 valve opened
8/12/2011	11:56:40 AM	BCl3 valve opened
8/12/2011	11:56:40 AM	SiCl4 pre valve opened
8/12/2011	11:56:40 AM	SiCl4 post valve opened
8/12/2011	11:56:40 AM	Bubbler valve opened
8/12/2011	11:56:40 AM	Helium MFC set to  0.000000
8/12/2011	11:56:40 AM	H2 MFC set to  500.000000
8/12/2011	11:56:40 AM	BCl3 MFC set to  2.500000
8/12/2011	11:56:40 AM	PHl3 MFC set to  0.000000
8/12/2011	11:56:40 AM	SiCl4 MFC set to  50.000000
8/12/2011	11:56:40 AM	Bypass solenoid MFC set to  0.000000
8/12/2011	11:56:40 AM	Tube furnace set to 1000
8/12/2011	12:09:40 PM	Helium valve closed
8/12/2011	12:09:40 PM	BCl3 valve closed
8/12/2011	12:09:40 PM	Main Vac valve closed
8/12/2011	12:09:40 PM	Bypass valve closed
8/12/2011	12:09:40 PM	H2 valve opened
8/12/2011	12:09:40 PM	PH3 valve opened
8/12/2011	12:09:40 PM	SiCl4 pre valve opened
8/12/2011	12:09:40 PM	SiCl4 post valve opened
8/12/2011	12:09:40 PM	Bubbler valve opened
8/12/2011	12:09:40 PM	Helium MFC set to  0.000000
8/12/2011	12:09:40 PM	H2 MFC set to  500.000000
8/12/2011	12:09:40 PM	BCl3 MFC set to  0.000000
8/12/2011	12:09:40 PM	PHl3 MFC set to  15.000000
8/12/2011	12:09:40 PM	SiCl4 MFC set to  50.000000
8/12/2011	12:09:40 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	12:09:40 PM	Tube furnace set to 1000
8/12/2011	12:12:40 PM	Helium valve closed
8/12/2011	12:12:40 PM	BCl3 valve closed
8/12/2011	12:12:40 PM	PH3 valve closed
8/12/2011	12:12:40 PM	SiCl4 pre valve closed
8/12/2011	12:12:40 PM	SiCl4 post valve closed
8/12/2011	12:12:40 PM	Main Vac valve closed
8/12/2011	12:12:40 PM	Bypass valve closed
8/12/2011	12:12:40 PM	H2 valve opened
8/12/2011	12:12:40 PM	Bubbler valve opened
8/12/2011	12:12:40 PM	Helium MFC set to  0.000000
8/12/2011	12:12:40 PM	H2 MFC set to  500.000000
8/12/2011	12:12:40 PM	BCl3 MFC set to  0.000000
8/12/2011	12:12:40 PM	PHl3 MFC set to  0.000000
8/12/2011	12:12:40 PM	SiCl4 MFC set to  0.000000
8/12/2011	12:12:40 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	12:12:40 PM	Tube furnace set to 950
8/12/2011	12:15:40 PM	Helium valve closed
8/12/2011	12:15:40 PM	BCl3 valve closed
8/12/2011	12:15:40 PM	PH3 valve closed
8/12/2011	12:15:40 PM	SiCl4 pre valve closed
8/12/2011	12:15:40 PM	SiCl4 post valve closed
8/12/2011	12:15:40 PM	Main Vac valve closed
8/12/2011	12:15:40 PM	Bypass valve closed
8/12/2011	12:15:40 PM	H2 valve opened
8/12/2011	12:15:40 PM	Bubbler valve opened
8/12/2011	12:15:40 PM	Helium MFC set to  0.000000
8/12/2011	12:15:40 PM	H2 MFC set to  500.000000
8/12/2011	12:15:40 PM	BCl3 MFC set to  0.000000
8/12/2011	12:15:40 PM	PHl3 MFC set to  0.000000
8/12/2011	12:15:40 PM	SiCl4 MFC set to  0.000000
8/12/2011	12:15:40 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	12:15:41 PM	Tube furnace set to 900
8/12/2011	12:18:41 PM	Helium valve closed
8/12/2011	12:18:41 PM	BCl3 valve closed
8/12/2011	12:18:41 PM	PH3 valve closed
8/12/2011	12:18:41 PM	SiCl4 pre valve closed
8/12/2011	12:18:41 PM	SiCl4 post valve closed
8/12/2011	12:18:41 PM	Main Vac valve closed
8/12/2011	12:18:41 PM	Bypass valve closed
8/12/2011	12:18:41 PM	H2 valve opened
8/12/2011	12:18:41 PM	Bubbler valve opened
8/12/2011	12:18:41 PM	Helium MFC set to  0.000000
8/12/2011	12:18:41 PM	H2 MFC set to  500.000000
8/12/2011	12:18:41 PM	BCl3 MFC set to  0.000000
8/12/2011	12:18:41 PM	PHl3 MFC set to  0.000000
8/12/2011	12:18:41 PM	SiCl4 MFC set to  0.000000
8/12/2011	12:18:41 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	12:18:41 PM	Tube furnace set to 850
8/12/2011	12:21:41 PM	Helium valve closed
8/12/2011	12:21:41 PM	BCl3 valve closed
8/12/2011	12:21:41 PM	PH3 valve closed
8/12/2011	12:21:41 PM	SiCl4 pre valve closed
8/12/2011	12:21:41 PM	SiCl4 post valve closed
8/12/2011	12:21:41 PM	Main Vac valve closed
8/12/2011	12:21:41 PM	Bypass valve closed
8/12/2011	12:21:41 PM	H2 valve opened
8/12/2011	12:21:41 PM	Bubbler valve opened
8/12/2011	12:21:41 PM	Helium MFC set to  0.000000
8/12/2011	12:21:41 PM	H2 MFC set to  500.000000
8/12/2011	12:21:41 PM	BCl3 MFC set to  0.000000
8/12/2011	12:21:41 PM	PHl3 MFC set to  0.000000
8/12/2011	12:21:41 PM	SiCl4 MFC set to  0.000000
8/12/2011	12:21:41 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	12:21:41 PM	Tube furnace set to 800
8/12/2011	12:24:41 PM	Helium valve closed
8/12/2011	12:24:41 PM	BCl3 valve closed
8/12/2011	12:24:41 PM	PH3 valve closed
8/12/2011	12:24:41 PM	SiCl4 pre valve closed
8/12/2011	12:24:41 PM	SiCl4 post valve closed
8/12/2011	12:24:41 PM	Main Vac valve closed
8/12/2011	12:24:41 PM	Bypass valve closed
8/12/2011	12:24:41 PM	H2 valve opened
8/12/2011	12:24:41 PM	Bubbler valve opened
8/12/2011	12:24:41 PM	Helium MFC set to  0.000000
8/12/2011	12:24:41 PM	H2 MFC set to  500.000000
8/12/2011	12:24:41 PM	BCl3 MFC set to  0.000000
8/12/2011	12:24:41 PM	PHl3 MFC set to  0.000000
8/12/2011	12:24:41 PM	SiCl4 MFC set to  0.000000
8/12/2011	12:24:41 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	12:24:41 PM	Tube furnace set to 750
8/12/2011	12:27:41 PM	H2 valve closed
8/12/2011	12:27:41 PM	BCl3 valve closed
8/12/2011	12:27:41 PM	PH3 valve closed
8/12/2011	12:27:41 PM	SiCl4 pre valve closed
8/12/2011	12:27:41 PM	SiCl4 post valve closed
8/12/2011	12:27:41 PM	Main Vac valve closed
8/12/2011	12:27:41 PM	Bypass valve closed
8/12/2011	12:27:41 PM	Helium valve opened
8/12/2011	12:27:41 PM	Bubbler valve opened
8/12/2011	12:27:41 PM	Helium MFC set to  500.000000
8/12/2011	12:27:41 PM	H2 MFC set to  0.000000
8/12/2011	12:27:41 PM	BCl3 MFC set to  0.000000
8/12/2011	12:27:41 PM	PHl3 MFC set to  0.000000
8/12/2011	12:27:41 PM	SiCl4 MFC set to  0.000000
8/12/2011	12:27:41 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	12:27:41 PM	Tube furnace set to 0
8/12/2011	12:47:41 PM	Helium valve closed
8/12/2011	12:47:41 PM	H2 valve closed
8/12/2011	12:47:41 PM	BCl3 valve closed
8/12/2011	12:47:41 PM	PH3 valve closed
8/12/2011	12:47:41 PM	SiCl4 pre valve closed
8/12/2011	12:47:41 PM	SiCl4 post valve closed
8/12/2011	12:47:41 PM	Main Vac valve closed
8/12/2011	12:47:41 PM	Bypass valve closed
8/12/2011	12:47:41 PM	Bubbler valve closed
8/12/2011	12:47:41 PM	Helium MFC set to  0.000000
8/12/2011	12:47:41 PM	H2 MFC set to  0.000000
8/12/2011	12:47:41 PM	BCl3 MFC set to  0.000000
8/12/2011	12:47:41 PM	PHl3 MFC set to  0.000000
8/12/2011	12:47:41 PM	SiCl4 MFC set to  0.000000
8/12/2011	12:47:41 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	12:47:41 PM	Tube furnace set to 0
8/12/2011	12:47:42 PM	Run finished at 12:47 PM
8/12/2011	1:10:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/12/2011	1:10:50 PM	Recipe started at 1:10 PM
8/12/2011	1:10:50 PM	Helium valve closed
8/12/2011	1:10:50 PM	H2 valve closed
8/12/2011	1:10:50 PM	BCl3 valve closed
8/12/2011	1:10:50 PM	PH3 valve closed
8/12/2011	1:10:50 PM	SiCl4 pre valve closed
8/12/2011	1:10:50 PM	SiCl4 post valve closed
8/12/2011	1:10:50 PM	Main Vac valve closed
8/12/2011	1:10:50 PM	Bypass valve closed
8/12/2011	1:10:50 PM	Bubbler valve closed
8/12/2011	1:10:50 PM	Helium MFC set to  0.000000
8/12/2011	1:10:50 PM	H2 MFC set to  0.000000
8/12/2011	1:10:50 PM	BCl3 MFC set to  0.000000
8/12/2011	1:10:50 PM	PHl3 MFC set to  0.000000
8/12/2011	1:10:50 PM	SiCl4 MFC set to  0.000000
8/12/2011	1:10:50 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	1:10:50 PM	Tube furnace set to 0
8/12/2011	1:10:53 PM	H2 valve closed
8/12/2011	1:10:53 PM	BCl3 valve closed
8/12/2011	1:10:53 PM	PH3 valve closed
8/12/2011	1:10:53 PM	SiCl4 pre valve closed
8/12/2011	1:10:53 PM	SiCl4 post valve closed
8/12/2011	1:10:53 PM	Main Vac valve closed
8/12/2011	1:10:53 PM	Bypass valve closed
8/12/2011	1:10:53 PM	Bubbler valve closed
8/12/2011	1:10:53 PM	Helium valve opened
8/12/2011	1:10:53 PM	Helium MFC set to  500.000000
8/12/2011	1:10:53 PM	H2 MFC set to  0.000000
8/12/2011	1:10:53 PM	BCl3 MFC set to  0.000000
8/12/2011	1:10:53 PM	PHl3 MFC set to  0.000000
8/12/2011	1:10:53 PM	SiCl4 MFC set to  0.000000
8/12/2011	1:10:53 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	1:10:53 PM	Tube furnace set to 0
8/12/2011	1:10:53 PM	Helium valve closed
8/12/2011	1:10:53 PM	H2 valve closed
8/12/2011	1:10:53 PM	BCl3 valve closed
8/12/2011	1:10:53 PM	PH3 valve closed
8/12/2011	1:10:53 PM	SiCl4 pre valve closed
8/12/2011	1:10:53 PM	SiCl4 post valve closed
8/12/2011	1:10:53 PM	Main Vac valve closed
8/12/2011	1:10:53 PM	Bypass valve closed
8/12/2011	1:10:53 PM	Bubbler valve closed
8/12/2011	1:10:53 PM	Helium MFC set to  0.000000
8/12/2011	1:10:53 PM	H2 MFC set to  0.000000
8/12/2011	1:10:53 PM	BCl3 MFC set to  0.000000
8/12/2011	1:10:53 PM	PHl3 MFC set to  0.000000
8/12/2011	1:10:53 PM	SiCl4 MFC set to  0.000000
8/12/2011	1:10:53 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	1:10:54 PM	Tube furnace set to 0
8/12/2011	1:10:55 PM	Run finished at 1:10 PM
8/12/2011	1:10:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/12/2011	1:13:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/12/2011	1:13:28 PM	Recipe started at 1:13 PM
8/12/2011	1:13:28 PM	Helium valve closed
8/12/2011	1:13:28 PM	H2 valve closed
8/12/2011	1:13:28 PM	BCl3 valve closed
8/12/2011	1:13:28 PM	PH3 valve closed
8/12/2011	1:13:28 PM	SiCl4 pre valve closed
8/12/2011	1:13:28 PM	SiCl4 post valve closed
8/12/2011	1:13:28 PM	Main Vac valve closed
8/12/2011	1:13:28 PM	Bubbler valve closed
8/12/2011	1:13:28 PM	Bypass valve opened
8/12/2011	1:13:28 PM	Helium MFC set to  0.000000
8/12/2011	1:13:28 PM	H2 MFC set to  0.000000
8/12/2011	1:13:28 PM	BCl3 MFC set to  0.000000
8/12/2011	1:13:28 PM	PHl3 MFC set to  0.000000
8/12/2011	1:13:28 PM	SiCl4 MFC set to  0.000000
8/12/2011	1:13:28 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	1:13:28 PM	Tube furnace set to 0
8/12/2011	1:14:28 PM	Helium valve closed
8/12/2011	1:14:28 PM	H2 valve closed
8/12/2011	1:14:28 PM	BCl3 valve closed
8/12/2011	1:14:28 PM	PH3 valve closed
8/12/2011	1:14:28 PM	SiCl4 pre valve closed
8/12/2011	1:14:28 PM	SiCl4 post valve closed
8/12/2011	1:14:28 PM	Main Vac valve closed
8/12/2011	1:14:28 PM	Bubbler valve closed
8/12/2011	1:14:28 PM	Bypass valve opened
8/12/2011	1:14:28 PM	Helium MFC set to  0.000000
8/12/2011	1:14:28 PM	H2 MFC set to  0.000000
8/12/2011	1:14:28 PM	BCl3 MFC set to  0.000000
8/12/2011	1:14:28 PM	PHl3 MFC set to  0.000000
8/12/2011	1:14:28 PM	SiCl4 MFC set to  0.000000
8/12/2011	1:14:28 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	1:14:28 PM	Tube furnace set to 0
8/12/2011	1:15:28 PM	Helium valve closed
8/12/2011	1:15:28 PM	H2 valve closed
8/12/2011	1:15:28 PM	BCl3 valve closed
8/12/2011	1:15:28 PM	PH3 valve closed
8/12/2011	1:15:28 PM	SiCl4 pre valve closed
8/12/2011	1:15:28 PM	SiCl4 post valve closed
8/12/2011	1:15:28 PM	Bypass valve closed
8/12/2011	1:15:28 PM	Bubbler valve closed
8/12/2011	1:15:28 PM	Main Vac valve opened
8/12/2011	1:15:28 PM	Helium MFC set to  0.000000
8/12/2011	1:15:28 PM	H2 MFC set to  0.000000
8/12/2011	1:15:28 PM	BCl3 MFC set to  0.000000
8/12/2011	1:15:28 PM	PHl3 MFC set to  0.000000
8/12/2011	1:15:28 PM	SiCl4 MFC set to  0.000000
8/12/2011	1:15:28 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	1:15:28 PM	Tube furnace set to 0
8/12/2011	1:15:29 PM	Run finished at 1:15 PM
8/12/2011	1:15:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/12/2011	1:16:31 PM	Recipe started at 1:16 PM
8/12/2011	1:16:31 PM	Helium valve closed
8/12/2011	1:16:31 PM	H2 valve closed
8/12/2011	1:16:31 PM	BCl3 valve closed
8/12/2011	1:16:31 PM	PH3 valve closed
8/12/2011	1:16:31 PM	SiCl4 pre valve closed
8/12/2011	1:16:31 PM	SiCl4 post valve closed
8/12/2011	1:16:31 PM	Bypass valve closed
8/12/2011	1:16:31 PM	Bubbler valve closed
8/12/2011	1:16:31 PM	Main Vac valve opened
8/12/2011	1:16:31 PM	Helium MFC set to  0.000000
8/12/2011	1:16:31 PM	H2 MFC set to  0.000000
8/12/2011	1:16:31 PM	BCl3 MFC set to  0.000000
8/12/2011	1:16:31 PM	PHl3 MFC set to  0.000000
8/12/2011	1:16:31 PM	SiCl4 MFC set to  0.000000
8/12/2011	1:16:31 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	1:16:31 PM	Tube furnace set to 150
8/12/2011	1:17:01 PM	H2 valve closed
8/12/2011	1:17:01 PM	BCl3 valve closed
8/12/2011	1:17:01 PM	PH3 valve closed
8/12/2011	1:17:01 PM	SiCl4 pre valve closed
8/12/2011	1:17:01 PM	SiCl4 post valve closed
8/12/2011	1:17:01 PM	Bypass valve closed
8/12/2011	1:17:01 PM	Bubbler valve closed
8/12/2011	1:17:01 PM	Helium valve opened
8/12/2011	1:17:01 PM	Main Vac valve opened
8/12/2011	1:17:01 PM	Helium MFC set to  20.000000
8/12/2011	1:17:01 PM	H2 MFC set to  0.000000
8/12/2011	1:17:01 PM	BCl3 MFC set to  0.000000
8/12/2011	1:17:01 PM	PHl3 MFC set to  0.000000
8/12/2011	1:17:01 PM	SiCl4 MFC set to  0.000000
8/12/2011	1:17:01 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	1:17:01 PM	Tube furnace set to 150
8/12/2011	1:17:31 PM	Helium valve closed
8/12/2011	1:17:31 PM	H2 valve closed
8/12/2011	1:17:31 PM	BCl3 valve closed
8/12/2011	1:17:31 PM	PH3 valve closed
8/12/2011	1:17:31 PM	SiCl4 pre valve closed
8/12/2011	1:17:31 PM	SiCl4 post valve closed
8/12/2011	1:17:31 PM	Bypass valve closed
8/12/2011	1:17:31 PM	Bubbler valve closed
8/12/2011	1:17:31 PM	Main Vac valve opened
8/12/2011	1:17:31 PM	Helium MFC set to  0.000000
8/12/2011	1:17:31 PM	H2 MFC set to  0.000000
8/12/2011	1:17:31 PM	BCl3 MFC set to  0.000000
8/12/2011	1:17:31 PM	PHl3 MFC set to  0.000000
8/12/2011	1:17:31 PM	SiCl4 MFC set to  0.000000
8/12/2011	1:17:31 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	1:17:31 PM	Tube furnace set to 150
8/12/2011	1:18:01 PM	H2 valve closed
8/12/2011	1:18:01 PM	BCl3 valve closed
8/12/2011	1:18:01 PM	PH3 valve closed
8/12/2011	1:18:01 PM	SiCl4 pre valve closed
8/12/2011	1:18:01 PM	SiCl4 post valve closed
8/12/2011	1:18:01 PM	Bypass valve closed
8/12/2011	1:18:01 PM	Bubbler valve closed
8/12/2011	1:18:01 PM	Helium valve opened
8/12/2011	1:18:01 PM	Main Vac valve opened
8/12/2011	1:18:01 PM	Helium MFC set to  20.000000
8/12/2011	1:18:01 PM	H2 MFC set to  0.000000
8/12/2011	1:18:01 PM	BCl3 MFC set to  0.000000
8/12/2011	1:18:01 PM	PHl3 MFC set to  0.000000
8/12/2011	1:18:01 PM	SiCl4 MFC set to  0.000000
8/12/2011	1:18:01 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	1:18:02 PM	Tube furnace set to 150
8/12/2011	1:18:32 PM	Helium valve closed
8/12/2011	1:18:32 PM	H2 valve closed
8/12/2011	1:18:32 PM	BCl3 valve closed
8/12/2011	1:18:32 PM	PH3 valve closed
8/12/2011	1:18:32 PM	SiCl4 pre valve closed
8/12/2011	1:18:32 PM	SiCl4 post valve closed
8/12/2011	1:18:32 PM	Bypass valve closed
8/12/2011	1:18:32 PM	Bubbler valve closed
8/12/2011	1:18:32 PM	Main Vac valve opened
8/12/2011	1:18:32 PM	Helium MFC set to  0.000000
8/12/2011	1:18:32 PM	H2 MFC set to  0.000000
8/12/2011	1:18:32 PM	BCl3 MFC set to  0.000000
8/12/2011	1:18:32 PM	PHl3 MFC set to  0.000000
8/12/2011	1:18:32 PM	SiCl4 MFC set to  0.000000
8/12/2011	1:18:32 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	1:18:32 PM	Tube furnace set to 150
8/12/2011	1:19:02 PM	H2 valve closed
8/12/2011	1:19:02 PM	BCl3 valve closed
8/12/2011	1:19:02 PM	PH3 valve closed
8/12/2011	1:19:02 PM	SiCl4 pre valve closed
8/12/2011	1:19:02 PM	SiCl4 post valve closed
8/12/2011	1:19:02 PM	Bypass valve closed
8/12/2011	1:19:02 PM	Bubbler valve closed
8/12/2011	1:19:02 PM	Helium valve opened
8/12/2011	1:19:02 PM	Main Vac valve opened
8/12/2011	1:19:02 PM	Helium MFC set to  20.000000
8/12/2011	1:19:02 PM	H2 MFC set to  0.000000
8/12/2011	1:19:02 PM	BCl3 MFC set to  0.000000
8/12/2011	1:19:02 PM	PHl3 MFC set to  0.000000
8/12/2011	1:19:02 PM	SiCl4 MFC set to  0.000000
8/12/2011	1:19:02 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	1:19:02 PM	Tube furnace set to 150
8/12/2011	1:19:32 PM	Helium valve closed
8/12/2011	1:19:32 PM	H2 valve closed
8/12/2011	1:19:32 PM	BCl3 valve closed
8/12/2011	1:19:32 PM	PH3 valve closed
8/12/2011	1:19:32 PM	SiCl4 pre valve closed
8/12/2011	1:19:32 PM	SiCl4 post valve closed
8/12/2011	1:19:32 PM	Bypass valve closed
8/12/2011	1:19:32 PM	Bubbler valve closed
8/12/2011	1:19:32 PM	Main Vac valve opened
8/12/2011	1:19:32 PM	Helium MFC set to  0.000000
8/12/2011	1:19:32 PM	H2 MFC set to  0.000000
8/12/2011	1:19:32 PM	BCl3 MFC set to  0.000000
8/12/2011	1:19:32 PM	PHl3 MFC set to  0.000000
8/12/2011	1:19:32 PM	SiCl4 MFC set to  0.000000
8/12/2011	1:19:32 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	1:19:32 PM	Tube furnace set to 150
8/12/2011	1:20:02 PM	H2 valve closed
8/12/2011	1:20:02 PM	BCl3 valve closed
8/12/2011	1:20:02 PM	PH3 valve closed
8/12/2011	1:20:02 PM	SiCl4 pre valve closed
8/12/2011	1:20:02 PM	SiCl4 post valve closed
8/12/2011	1:20:02 PM	Bypass valve closed
8/12/2011	1:20:02 PM	Bubbler valve closed
8/12/2011	1:20:02 PM	Helium valve opened
8/12/2011	1:20:02 PM	Main Vac valve opened
8/12/2011	1:20:02 PM	Helium MFC set to  20.000000
8/12/2011	1:20:02 PM	H2 MFC set to  0.000000
8/12/2011	1:20:02 PM	BCl3 MFC set to  0.000000
8/12/2011	1:20:02 PM	PHl3 MFC set to  0.000000
8/12/2011	1:20:02 PM	SiCl4 MFC set to  0.000000
8/12/2011	1:20:02 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	1:20:02 PM	Tube furnace set to 150
8/12/2011	1:20:32 PM	Helium valve closed
8/12/2011	1:20:32 PM	H2 valve closed
8/12/2011	1:20:32 PM	BCl3 valve closed
8/12/2011	1:20:32 PM	PH3 valve closed
8/12/2011	1:20:32 PM	SiCl4 pre valve closed
8/12/2011	1:20:32 PM	SiCl4 post valve closed
8/12/2011	1:20:32 PM	Bypass valve closed
8/12/2011	1:20:32 PM	Bubbler valve closed
8/12/2011	1:20:32 PM	Main Vac valve opened
8/12/2011	1:20:32 PM	Helium MFC set to  0.000000
8/12/2011	1:20:32 PM	H2 MFC set to  0.000000
8/12/2011	1:20:32 PM	BCl3 MFC set to  0.000000
8/12/2011	1:20:32 PM	PHl3 MFC set to  0.000000
8/12/2011	1:20:32 PM	SiCl4 MFC set to  0.000000
8/12/2011	1:20:32 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	1:20:33 PM	Tube furnace set to 150
8/12/2011	1:21:03 PM	H2 valve closed
8/12/2011	1:21:03 PM	BCl3 valve closed
8/12/2011	1:21:03 PM	PH3 valve closed
8/12/2011	1:21:03 PM	SiCl4 pre valve closed
8/12/2011	1:21:03 PM	SiCl4 post valve closed
8/12/2011	1:21:03 PM	Bypass valve closed
8/12/2011	1:21:03 PM	Bubbler valve closed
8/12/2011	1:21:03 PM	Helium valve opened
8/12/2011	1:21:03 PM	Main Vac valve opened
8/12/2011	1:21:03 PM	Helium MFC set to  20.000000
8/12/2011	1:21:03 PM	H2 MFC set to  0.000000
8/12/2011	1:21:03 PM	BCl3 MFC set to  0.000000
8/12/2011	1:21:03 PM	PHl3 MFC set to  0.000000
8/12/2011	1:21:03 PM	SiCl4 MFC set to  0.000000
8/12/2011	1:21:03 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	1:21:03 PM	Tube furnace set to 150
8/12/2011	1:21:33 PM	Helium valve closed
8/12/2011	1:21:33 PM	H2 valve closed
8/12/2011	1:21:33 PM	BCl3 valve closed
8/12/2011	1:21:33 PM	PH3 valve closed
8/12/2011	1:21:33 PM	SiCl4 pre valve closed
8/12/2011	1:21:33 PM	SiCl4 post valve closed
8/12/2011	1:21:33 PM	Bypass valve closed
8/12/2011	1:21:33 PM	Bubbler valve closed
8/12/2011	1:21:33 PM	Main Vac valve opened
8/12/2011	1:21:33 PM	Helium MFC set to  0.000000
8/12/2011	1:21:33 PM	H2 MFC set to  0.000000
8/12/2011	1:21:33 PM	BCl3 MFC set to  0.000000
8/12/2011	1:21:33 PM	PHl3 MFC set to  0.000000
8/12/2011	1:21:33 PM	SiCl4 MFC set to  0.000000
8/12/2011	1:21:33 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	1:21:33 PM	Tube furnace set to 150
8/12/2011	1:22:03 PM	H2 valve closed
8/12/2011	1:22:03 PM	BCl3 valve closed
8/12/2011	1:22:03 PM	PH3 valve closed
8/12/2011	1:22:03 PM	SiCl4 pre valve closed
8/12/2011	1:22:03 PM	SiCl4 post valve closed
8/12/2011	1:22:03 PM	Bypass valve closed
8/12/2011	1:22:03 PM	Bubbler valve closed
8/12/2011	1:22:03 PM	Helium valve opened
8/12/2011	1:22:03 PM	Main Vac valve opened
8/12/2011	1:22:03 PM	Helium MFC set to  20.000000
8/12/2011	1:22:03 PM	H2 MFC set to  0.000000
8/12/2011	1:22:03 PM	BCl3 MFC set to  0.000000
8/12/2011	1:22:03 PM	PHl3 MFC set to  0.000000
8/12/2011	1:22:03 PM	SiCl4 MFC set to  0.000000
8/12/2011	1:22:03 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	1:22:03 PM	Tube furnace set to 150
8/12/2011	1:22:33 PM	Helium valve closed
8/12/2011	1:22:33 PM	H2 valve closed
8/12/2011	1:22:33 PM	BCl3 valve closed
8/12/2011	1:22:33 PM	PH3 valve closed
8/12/2011	1:22:33 PM	SiCl4 pre valve closed
8/12/2011	1:22:33 PM	SiCl4 post valve closed
8/12/2011	1:22:33 PM	Bypass valve closed
8/12/2011	1:22:33 PM	Bubbler valve closed
8/12/2011	1:22:33 PM	Main Vac valve opened
8/12/2011	1:22:33 PM	Helium MFC set to  0.000000
8/12/2011	1:22:33 PM	H2 MFC set to  0.000000
8/12/2011	1:22:33 PM	BCl3 MFC set to  0.000000
8/12/2011	1:22:33 PM	PHl3 MFC set to  0.000000
8/12/2011	1:22:33 PM	SiCl4 MFC set to  0.000000
8/12/2011	1:22:33 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	1:22:33 PM	Tube furnace set to 150
8/12/2011	1:23:03 PM	H2 valve closed
8/12/2011	1:23:03 PM	BCl3 valve closed
8/12/2011	1:23:03 PM	PH3 valve closed
8/12/2011	1:23:03 PM	SiCl4 pre valve closed
8/12/2011	1:23:03 PM	SiCl4 post valve closed
8/12/2011	1:23:03 PM	Bypass valve closed
8/12/2011	1:23:03 PM	Bubbler valve closed
8/12/2011	1:23:03 PM	Helium valve opened
8/12/2011	1:23:03 PM	Main Vac valve opened
8/12/2011	1:23:03 PM	Helium MFC set to  20.000000
8/12/2011	1:23:03 PM	H2 MFC set to  0.000000
8/12/2011	1:23:03 PM	BCl3 MFC set to  0.000000
8/12/2011	1:23:03 PM	PHl3 MFC set to  0.000000
8/12/2011	1:23:03 PM	SiCl4 MFC set to  0.000000
8/12/2011	1:23:03 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	1:23:04 PM	Tube furnace set to 150
8/12/2011	1:23:34 PM	Helium valve closed
8/12/2011	1:23:34 PM	H2 valve closed
8/12/2011	1:23:34 PM	BCl3 valve closed
8/12/2011	1:23:34 PM	PH3 valve closed
8/12/2011	1:23:34 PM	SiCl4 pre valve closed
8/12/2011	1:23:34 PM	SiCl4 post valve closed
8/12/2011	1:23:34 PM	Bypass valve closed
8/12/2011	1:23:34 PM	Bubbler valve closed
8/12/2011	1:23:34 PM	Main Vac valve opened
8/12/2011	1:23:34 PM	Helium MFC set to  0.000000
8/12/2011	1:23:34 PM	H2 MFC set to  0.000000
8/12/2011	1:23:34 PM	BCl3 MFC set to  0.000000
8/12/2011	1:23:34 PM	PHl3 MFC set to  0.000000
8/12/2011	1:23:34 PM	SiCl4 MFC set to  0.000000
8/12/2011	1:23:34 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	1:23:34 PM	Tube furnace set to 150
8/12/2011	1:24:04 PM	H2 valve closed
8/12/2011	1:24:04 PM	BCl3 valve closed
8/12/2011	1:24:04 PM	PH3 valve closed
8/12/2011	1:24:04 PM	SiCl4 pre valve closed
8/12/2011	1:24:04 PM	SiCl4 post valve closed
8/12/2011	1:24:04 PM	Bypass valve closed
8/12/2011	1:24:04 PM	Bubbler valve closed
8/12/2011	1:24:04 PM	Helium valve opened
8/12/2011	1:24:04 PM	Main Vac valve opened
8/12/2011	1:24:04 PM	Helium MFC set to  20.000000
8/12/2011	1:24:04 PM	H2 MFC set to  0.000000
8/12/2011	1:24:04 PM	BCl3 MFC set to  0.000000
8/12/2011	1:24:04 PM	PHl3 MFC set to  0.000000
8/12/2011	1:24:04 PM	SiCl4 MFC set to  0.000000
8/12/2011	1:24:04 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	1:24:04 PM	Tube furnace set to 150
8/12/2011	1:24:34 PM	Helium valve closed
8/12/2011	1:24:34 PM	H2 valve closed
8/12/2011	1:24:34 PM	BCl3 valve closed
8/12/2011	1:24:34 PM	PH3 valve closed
8/12/2011	1:24:34 PM	SiCl4 pre valve closed
8/12/2011	1:24:34 PM	SiCl4 post valve closed
8/12/2011	1:24:34 PM	Bypass valve closed
8/12/2011	1:24:34 PM	Bubbler valve closed
8/12/2011	1:24:34 PM	Main Vac valve opened
8/12/2011	1:24:34 PM	Helium MFC set to  0.000000
8/12/2011	1:24:34 PM	H2 MFC set to  0.000000
8/12/2011	1:24:34 PM	BCl3 MFC set to  0.000000
8/12/2011	1:24:34 PM	PHl3 MFC set to  0.000000
8/12/2011	1:24:34 PM	SiCl4 MFC set to  0.000000
8/12/2011	1:24:34 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	1:24:34 PM	Tube furnace set to 150
8/12/2011	1:25:04 PM	H2 valve closed
8/12/2011	1:25:04 PM	BCl3 valve closed
8/12/2011	1:25:04 PM	PH3 valve closed
8/12/2011	1:25:04 PM	SiCl4 pre valve closed
8/12/2011	1:25:04 PM	SiCl4 post valve closed
8/12/2011	1:25:04 PM	Bypass valve closed
8/12/2011	1:25:04 PM	Bubbler valve closed
8/12/2011	1:25:04 PM	Helium valve opened
8/12/2011	1:25:04 PM	Main Vac valve opened
8/12/2011	1:25:04 PM	Helium MFC set to  20.000000
8/12/2011	1:25:04 PM	H2 MFC set to  0.000000
8/12/2011	1:25:04 PM	BCl3 MFC set to  0.000000
8/12/2011	1:25:04 PM	PHl3 MFC set to  0.000000
8/12/2011	1:25:04 PM	SiCl4 MFC set to  0.000000
8/12/2011	1:25:04 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	1:25:04 PM	Tube furnace set to 150
8/12/2011	1:25:35 PM	Helium valve closed
8/12/2011	1:25:35 PM	H2 valve closed
8/12/2011	1:25:35 PM	BCl3 valve closed
8/12/2011	1:25:35 PM	PH3 valve closed
8/12/2011	1:25:35 PM	SiCl4 pre valve closed
8/12/2011	1:25:35 PM	SiCl4 post valve closed
8/12/2011	1:25:35 PM	Bypass valve closed
8/12/2011	1:25:35 PM	Bubbler valve closed
8/12/2011	1:25:35 PM	Main Vac valve opened
8/12/2011	1:25:35 PM	Helium MFC set to  0.000000
8/12/2011	1:25:35 PM	H2 MFC set to  0.000000
8/12/2011	1:25:35 PM	BCl3 MFC set to  0.000000
8/12/2011	1:25:35 PM	PHl3 MFC set to  0.000000
8/12/2011	1:25:35 PM	SiCl4 MFC set to  0.000000
8/12/2011	1:25:35 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	1:25:35 PM	Tube furnace set to 150
8/12/2011	1:26:05 PM	H2 valve closed
8/12/2011	1:26:05 PM	BCl3 valve closed
8/12/2011	1:26:05 PM	PH3 valve closed
8/12/2011	1:26:05 PM	SiCl4 pre valve closed
8/12/2011	1:26:05 PM	SiCl4 post valve closed
8/12/2011	1:26:05 PM	Bypass valve closed
8/12/2011	1:26:05 PM	Bubbler valve closed
8/12/2011	1:26:05 PM	Helium valve opened
8/12/2011	1:26:05 PM	Main Vac valve opened
8/12/2011	1:26:05 PM	Helium MFC set to  20.000000
8/12/2011	1:26:05 PM	H2 MFC set to  0.000000
8/12/2011	1:26:05 PM	BCl3 MFC set to  0.000000
8/12/2011	1:26:05 PM	PHl3 MFC set to  0.000000
8/12/2011	1:26:05 PM	SiCl4 MFC set to  0.000000
8/12/2011	1:26:05 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	1:26:05 PM	Tube furnace set to 150
8/12/2011	1:26:35 PM	Helium valve closed
8/12/2011	1:26:35 PM	H2 valve closed
8/12/2011	1:26:35 PM	BCl3 valve closed
8/12/2011	1:26:35 PM	PH3 valve closed
8/12/2011	1:26:35 PM	SiCl4 pre valve closed
8/12/2011	1:26:35 PM	SiCl4 post valve closed
8/12/2011	1:26:35 PM	Bypass valve closed
8/12/2011	1:26:35 PM	Bubbler valve closed
8/12/2011	1:26:35 PM	Main Vac valve opened
8/12/2011	1:26:35 PM	Helium MFC set to  0.000000
8/12/2011	1:26:35 PM	H2 MFC set to  0.000000
8/12/2011	1:26:35 PM	BCl3 MFC set to  0.000000
8/12/2011	1:26:35 PM	PHl3 MFC set to  0.000000
8/12/2011	1:26:35 PM	SiCl4 MFC set to  0.000000
8/12/2011	1:26:35 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	1:26:35 PM	Tube furnace set to 150
8/12/2011	1:26:36 PM	Run finished at 1:26 PM
8/12/2011	2:06:46 PM	Main Vac valve closed
8/12/2011	2:06:52 PM	Main Vac valve opened
8/12/2011	2:07:02 PM	Recipe started at 2:06 PM
8/12/2011	2:07:02 PM	Helium valve closed
8/12/2011	2:07:02 PM	H2 valve closed
8/12/2011	2:07:02 PM	BCl3 valve closed
8/12/2011	2:07:02 PM	PH3 valve closed
8/12/2011	2:07:02 PM	SiCl4 pre valve closed
8/12/2011	2:07:02 PM	SiCl4 post valve closed
8/12/2011	2:07:02 PM	Bypass valve closed
8/12/2011	2:07:02 PM	Bubbler valve closed
8/12/2011	2:07:02 PM	Main Vac valve opened
8/12/2011	2:07:02 PM	Helium MFC set to  0.000000
8/12/2011	2:07:02 PM	H2 MFC set to  0.000000
8/12/2011	2:07:02 PM	BCl3 MFC set to  0.000000
8/12/2011	2:07:02 PM	PHl3 MFC set to  0.000000
8/12/2011	2:07:02 PM	SiCl4 MFC set to  0.000000
8/12/2011	2:07:02 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	2:07:02 PM	Tube furnace set to 150
8/12/2011	2:07:32 PM	H2 valve closed
8/12/2011	2:07:32 PM	BCl3 valve closed
8/12/2011	2:07:32 PM	PH3 valve closed
8/12/2011	2:07:32 PM	SiCl4 pre valve closed
8/12/2011	2:07:32 PM	SiCl4 post valve closed
8/12/2011	2:07:32 PM	Bypass valve closed
8/12/2011	2:07:32 PM	Bubbler valve closed
8/12/2011	2:07:32 PM	Helium valve opened
8/12/2011	2:07:32 PM	Main Vac valve opened
8/12/2011	2:07:32 PM	Helium MFC set to  20.000000
8/12/2011	2:07:32 PM	H2 MFC set to  0.000000
8/12/2011	2:07:32 PM	BCl3 MFC set to  0.000000
8/12/2011	2:07:32 PM	PHl3 MFC set to  0.000000
8/12/2011	2:07:32 PM	SiCl4 MFC set to  0.000000
8/12/2011	2:07:32 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	2:07:32 PM	Tube furnace set to 150
8/12/2011	2:08:02 PM	Helium valve closed
8/12/2011	2:08:02 PM	H2 valve closed
8/12/2011	2:08:02 PM	BCl3 valve closed
8/12/2011	2:08:02 PM	PH3 valve closed
8/12/2011	2:08:02 PM	SiCl4 pre valve closed
8/12/2011	2:08:02 PM	SiCl4 post valve closed
8/12/2011	2:08:02 PM	Bypass valve closed
8/12/2011	2:08:02 PM	Bubbler valve closed
8/12/2011	2:08:02 PM	Main Vac valve opened
8/12/2011	2:08:02 PM	Helium MFC set to  0.000000
8/12/2011	2:08:02 PM	H2 MFC set to  0.000000
8/12/2011	2:08:02 PM	BCl3 MFC set to  0.000000
8/12/2011	2:08:02 PM	PHl3 MFC set to  0.000000
8/12/2011	2:08:02 PM	SiCl4 MFC set to  0.000000
8/12/2011	2:08:02 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	2:08:02 PM	Tube furnace set to 150
8/12/2011	2:08:32 PM	H2 valve closed
8/12/2011	2:08:32 PM	BCl3 valve closed
8/12/2011	2:08:32 PM	PH3 valve closed
8/12/2011	2:08:32 PM	SiCl4 pre valve closed
8/12/2011	2:08:32 PM	SiCl4 post valve closed
8/12/2011	2:08:32 PM	Bypass valve closed
8/12/2011	2:08:32 PM	Bubbler valve closed
8/12/2011	2:08:32 PM	Helium valve opened
8/12/2011	2:08:32 PM	Main Vac valve opened
8/12/2011	2:08:32 PM	Helium MFC set to  20.000000
8/12/2011	2:08:32 PM	H2 MFC set to  0.000000
8/12/2011	2:08:32 PM	BCl3 MFC set to  0.000000
8/12/2011	2:08:32 PM	PHl3 MFC set to  0.000000
8/12/2011	2:08:32 PM	SiCl4 MFC set to  0.000000
8/12/2011	2:08:32 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	2:08:32 PM	Tube furnace set to 150
8/12/2011	2:09:02 PM	Helium valve closed
8/12/2011	2:09:02 PM	H2 valve closed
8/12/2011	2:09:02 PM	BCl3 valve closed
8/12/2011	2:09:02 PM	PH3 valve closed
8/12/2011	2:09:02 PM	SiCl4 pre valve closed
8/12/2011	2:09:02 PM	SiCl4 post valve closed
8/12/2011	2:09:02 PM	Bypass valve closed
8/12/2011	2:09:02 PM	Bubbler valve closed
8/12/2011	2:09:02 PM	Main Vac valve opened
8/12/2011	2:09:02 PM	Helium MFC set to  0.000000
8/12/2011	2:09:02 PM	H2 MFC set to  0.000000
8/12/2011	2:09:02 PM	BCl3 MFC set to  0.000000
8/12/2011	2:09:02 PM	PHl3 MFC set to  0.000000
8/12/2011	2:09:02 PM	SiCl4 MFC set to  0.000000
8/12/2011	2:09:02 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	2:09:02 PM	Tube furnace set to 150
8/12/2011	2:09:25 PM	Run aborted at 2:09 PM
8/12/2011	2:09:25 PM	Helium valve closed
8/12/2011	2:09:25 PM	H2 valve closed
8/12/2011	2:09:25 PM	BCl3 valve closed
8/12/2011	2:09:25 PM	PH3 valve closed
8/12/2011	2:09:25 PM	SiCl4 pre valve closed
8/12/2011	2:09:25 PM	SiCl4 post valve closed
8/12/2011	2:09:25 PM	Bypass valve closed
8/12/2011	2:09:25 PM	Main Vac valve closed
8/12/2011	2:09:25 PM	Bubbler valve closed
8/12/2011	2:09:25 PM	Helium MFC set to  0.000000
8/12/2011	2:09:25 PM	H2 MFC set to  0.000000
8/12/2011	2:09:25 PM	BCl3 MFC set to  0.000000
8/12/2011	2:09:25 PM	PHl3 MFC set to  0.000000
8/12/2011	2:09:25 PM	SiCl4 MFC set to  0.000000
8/12/2011	2:09:25 PM	Tube furnace set to 0
8/12/2011	2:09:35 PM	Main Vac valve opened
8/12/2011	2:09:56 PM	Recipe started at 2:09 PM
8/12/2011	2:09:56 PM	Helium valve closed
8/12/2011	2:09:56 PM	H2 valve closed
8/12/2011	2:09:56 PM	BCl3 valve closed
8/12/2011	2:09:56 PM	PH3 valve closed
8/12/2011	2:09:56 PM	SiCl4 pre valve closed
8/12/2011	2:09:56 PM	SiCl4 post valve closed
8/12/2011	2:09:56 PM	Main Vac valve closed
8/12/2011	2:09:56 PM	Bypass valve closed
8/12/2011	2:09:56 PM	Bubbler valve closed
8/12/2011	2:09:56 PM	Helium MFC set to  0.000000
8/12/2011	2:09:56 PM	H2 MFC set to  0.000000
8/12/2011	2:09:56 PM	BCl3 MFC set to  0.000000
8/12/2011	2:09:56 PM	PHl3 MFC set to  0.000000
8/12/2011	2:09:56 PM	SiCl4 MFC set to  0.000000
8/12/2011	2:09:56 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	2:09:57 PM	Tube furnace set to 0
8/12/2011	2:10:00 PM	Helium valve closed
8/12/2011	2:10:00 PM	BCl3 valve closed
8/12/2011	2:10:00 PM	PH3 valve closed
8/12/2011	2:10:00 PM	SiCl4 pre valve closed
8/12/2011	2:10:00 PM	SiCl4 post valve closed
8/12/2011	2:10:00 PM	Main Vac valve closed
8/12/2011	2:10:00 PM	Bypass valve closed
8/12/2011	2:10:00 PM	Bubbler valve closed
8/12/2011	2:10:00 PM	H2 valve opened
8/12/2011	2:10:00 PM	Helium MFC set to  0.000000
8/12/2011	2:10:00 PM	H2 MFC set to  500.000000
8/12/2011	2:10:00 PM	BCl3 MFC set to  0.000000
8/12/2011	2:10:00 PM	PHl3 MFC set to  0.000000
8/12/2011	2:10:00 PM	SiCl4 MFC set to  0.000000
8/12/2011	2:10:00 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	2:10:00 PM	Tube furnace set to 0
8/12/2011	2:11:04 PM	Helium valve closed
8/12/2011	2:11:04 PM	BCl3 valve closed
8/12/2011	2:11:04 PM	PH3 valve closed
8/12/2011	2:11:04 PM	SiCl4 pre valve closed
8/12/2011	2:11:04 PM	SiCl4 post valve closed
8/12/2011	2:11:04 PM	Main Vac valve closed
8/12/2011	2:11:04 PM	Bypass valve closed
8/12/2011	2:11:04 PM	H2 valve opened
8/12/2011	2:11:04 PM	Bubbler valve opened
8/12/2011	2:11:04 PM	Helium MFC set to  0.000000
8/12/2011	2:11:04 PM	H2 MFC set to  500.000000
8/12/2011	2:11:04 PM	BCl3 MFC set to  0.000000
8/12/2011	2:11:04 PM	PHl3 MFC set to  0.000000
8/12/2011	2:11:04 PM	SiCl4 MFC set to  0.000000
8/12/2011	2:11:04 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	2:11:04 PM	Tube furnace set to 0
8/12/2011	2:11:05 PM	Helium valve closed
8/12/2011	2:11:05 PM	BCl3 valve closed
8/12/2011	2:11:05 PM	PH3 valve closed
8/12/2011	2:11:05 PM	SiCl4 pre valve closed
8/12/2011	2:11:05 PM	SiCl4 post valve closed
8/12/2011	2:11:05 PM	Main Vac valve closed
8/12/2011	2:11:05 PM	Bypass valve closed
8/12/2011	2:11:05 PM	H2 valve opened
8/12/2011	2:11:05 PM	Bubbler valve opened
8/12/2011	2:11:05 PM	Helium MFC set to  0.000000
8/12/2011	2:11:05 PM	H2 MFC set to  500.000000
8/12/2011	2:11:05 PM	BCl3 MFC set to  0.000000
8/12/2011	2:11:05 PM	PHl3 MFC set to  0.000000
8/12/2011	2:11:05 PM	SiCl4 MFC set to  0.000000
8/12/2011	2:11:05 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	2:11:05 PM	Tube furnace set to 1000
8/12/2011	2:31:05 PM	Helium valve closed
8/12/2011	2:31:05 PM	PH3 valve closed
8/12/2011	2:31:05 PM	Main Vac valve closed
8/12/2011	2:31:05 PM	Bypass valve closed
8/12/2011	2:31:05 PM	H2 valve opened
8/12/2011	2:31:05 PM	BCl3 valve opened
8/12/2011	2:31:05 PM	SiCl4 pre valve opened
8/12/2011	2:31:05 PM	SiCl4 post valve opened
8/12/2011	2:31:05 PM	Bubbler valve opened
8/12/2011	2:31:05 PM	Helium MFC set to  0.000000
8/12/2011	2:31:05 PM	H2 MFC set to  500.000000
8/12/2011	2:31:05 PM	BCl3 MFC set to  2.500000
8/12/2011	2:31:05 PM	PHl3 MFC set to  0.000000
8/12/2011	2:31:05 PM	SiCl4 MFC set to  50.000000
8/12/2011	2:31:05 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	2:31:05 PM	Tube furnace set to 1000
8/12/2011	2:44:05 PM	Helium valve closed
8/12/2011	2:44:05 PM	BCl3 valve closed
8/12/2011	2:44:05 PM	Main Vac valve closed
8/12/2011	2:44:05 PM	Bypass valve closed
8/12/2011	2:44:05 PM	H2 valve opened
8/12/2011	2:44:05 PM	PH3 valve opened
8/12/2011	2:44:05 PM	SiCl4 pre valve opened
8/12/2011	2:44:05 PM	SiCl4 post valve opened
8/12/2011	2:44:05 PM	Bubbler valve opened
8/12/2011	2:44:05 PM	Helium MFC set to  0.000000
8/12/2011	2:44:05 PM	H2 MFC set to  500.000000
8/12/2011	2:44:05 PM	BCl3 MFC set to  0.000000
8/12/2011	2:44:05 PM	PHl3 MFC set to  15.000000
8/12/2011	2:44:05 PM	SiCl4 MFC set to  50.000000
8/12/2011	2:44:05 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	2:44:05 PM	Tube furnace set to 1000
8/12/2011	2:47:05 PM	Helium valve closed
8/12/2011	2:47:05 PM	BCl3 valve closed
8/12/2011	2:47:05 PM	PH3 valve closed
8/12/2011	2:47:06 PM	SiCl4 pre valve closed
8/12/2011	2:47:06 PM	SiCl4 post valve closed
8/12/2011	2:47:06 PM	Main Vac valve closed
8/12/2011	2:47:06 PM	Bypass valve closed
8/12/2011	2:47:06 PM	H2 valve opened
8/12/2011	2:47:06 PM	Bubbler valve opened
8/12/2011	2:47:06 PM	Helium MFC set to  0.000000
8/12/2011	2:47:06 PM	H2 MFC set to  500.000000
8/12/2011	2:47:06 PM	BCl3 MFC set to  0.000000
8/12/2011	2:47:06 PM	PHl3 MFC set to  0.000000
8/12/2011	2:47:06 PM	SiCl4 MFC set to  0.000000
8/12/2011	2:47:06 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	2:47:06 PM	Tube furnace set to 950
8/12/2011	2:50:06 PM	Helium valve closed
8/12/2011	2:50:06 PM	BCl3 valve closed
8/12/2011	2:50:06 PM	PH3 valve closed
8/12/2011	2:50:06 PM	SiCl4 pre valve closed
8/12/2011	2:50:06 PM	SiCl4 post valve closed
8/12/2011	2:50:06 PM	Main Vac valve closed
8/12/2011	2:50:06 PM	Bypass valve closed
8/12/2011	2:50:06 PM	H2 valve opened
8/12/2011	2:50:06 PM	Bubbler valve opened
8/12/2011	2:50:06 PM	Helium MFC set to  0.000000
8/12/2011	2:50:06 PM	H2 MFC set to  500.000000
8/12/2011	2:50:06 PM	BCl3 MFC set to  0.000000
8/12/2011	2:50:06 PM	PHl3 MFC set to  0.000000
8/12/2011	2:50:06 PM	SiCl4 MFC set to  0.000000
8/12/2011	2:50:06 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	2:50:06 PM	Tube furnace set to 900
8/12/2011	2:53:06 PM	Helium valve closed
8/12/2011	2:53:06 PM	BCl3 valve closed
8/12/2011	2:53:06 PM	PH3 valve closed
8/12/2011	2:53:06 PM	SiCl4 pre valve closed
8/12/2011	2:53:06 PM	SiCl4 post valve closed
8/12/2011	2:53:06 PM	Main Vac valve closed
8/12/2011	2:53:06 PM	Bypass valve closed
8/12/2011	2:53:06 PM	H2 valve opened
8/12/2011	2:53:06 PM	Bubbler valve opened
8/12/2011	2:53:06 PM	Helium MFC set to  0.000000
8/12/2011	2:53:06 PM	H2 MFC set to  500.000000
8/12/2011	2:53:06 PM	BCl3 MFC set to  0.000000
8/12/2011	2:53:06 PM	PHl3 MFC set to  0.000000
8/12/2011	2:53:06 PM	SiCl4 MFC set to  0.000000
8/12/2011	2:53:06 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	2:53:06 PM	Tube furnace set to 850
8/12/2011	2:56:06 PM	Helium valve closed
8/12/2011	2:56:06 PM	BCl3 valve closed
8/12/2011	2:56:06 PM	PH3 valve closed
8/12/2011	2:56:06 PM	SiCl4 pre valve closed
8/12/2011	2:56:06 PM	SiCl4 post valve closed
8/12/2011	2:56:06 PM	Main Vac valve closed
8/12/2011	2:56:06 PM	Bypass valve closed
8/12/2011	2:56:06 PM	H2 valve opened
8/12/2011	2:56:06 PM	Bubbler valve opened
8/12/2011	2:56:06 PM	Helium MFC set to  0.000000
8/12/2011	2:56:06 PM	H2 MFC set to  500.000000
8/12/2011	2:56:06 PM	BCl3 MFC set to  0.000000
8/12/2011	2:56:06 PM	PHl3 MFC set to  0.000000
8/12/2011	2:56:06 PM	SiCl4 MFC set to  0.000000
8/12/2011	2:56:06 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	2:56:06 PM	Tube furnace set to 800
8/12/2011	2:59:06 PM	Helium valve closed
8/12/2011	2:59:06 PM	BCl3 valve closed
8/12/2011	2:59:06 PM	PH3 valve closed
8/12/2011	2:59:06 PM	SiCl4 pre valve closed
8/12/2011	2:59:06 PM	SiCl4 post valve closed
8/12/2011	2:59:06 PM	Main Vac valve closed
8/12/2011	2:59:06 PM	Bypass valve closed
8/12/2011	2:59:06 PM	H2 valve opened
8/12/2011	2:59:06 PM	Bubbler valve opened
8/12/2011	2:59:06 PM	Helium MFC set to  0.000000
8/12/2011	2:59:06 PM	H2 MFC set to  500.000000
8/12/2011	2:59:06 PM	BCl3 MFC set to  0.000000
8/12/2011	2:59:06 PM	PHl3 MFC set to  0.000000
8/12/2011	2:59:06 PM	SiCl4 MFC set to  0.000000
8/12/2011	2:59:06 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	2:59:06 PM	Tube furnace set to 750
8/12/2011	3:02:06 PM	H2 valve closed
8/12/2011	3:02:06 PM	BCl3 valve closed
8/12/2011	3:02:06 PM	PH3 valve closed
8/12/2011	3:02:06 PM	SiCl4 pre valve closed
8/12/2011	3:02:06 PM	SiCl4 post valve closed
8/12/2011	3:02:06 PM	Main Vac valve closed
8/12/2011	3:02:06 PM	Bypass valve closed
8/12/2011	3:02:06 PM	Helium valve opened
8/12/2011	3:02:06 PM	Bubbler valve opened
8/12/2011	3:02:06 PM	Helium MFC set to  500.000000
8/12/2011	3:02:06 PM	H2 MFC set to  0.000000
8/12/2011	3:02:06 PM	BCl3 MFC set to  0.000000
8/12/2011	3:02:06 PM	PHl3 MFC set to  0.000000
8/12/2011	3:02:06 PM	SiCl4 MFC set to  0.000000
8/12/2011	3:02:06 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	3:02:07 PM	Tube furnace set to 0
8/12/2011	3:22:07 PM	Helium valve closed
8/12/2011	3:22:07 PM	H2 valve closed
8/12/2011	3:22:07 PM	BCl3 valve closed
8/12/2011	3:22:07 PM	PH3 valve closed
8/12/2011	3:22:07 PM	SiCl4 pre valve closed
8/12/2011	3:22:07 PM	SiCl4 post valve closed
8/12/2011	3:22:07 PM	Main Vac valve closed
8/12/2011	3:22:07 PM	Bypass valve closed
8/12/2011	3:22:07 PM	Bubbler valve closed
8/12/2011	3:22:07 PM	Helium MFC set to  0.000000
8/12/2011	3:22:07 PM	H2 MFC set to  0.000000
8/12/2011	3:22:07 PM	BCl3 MFC set to  0.000000
8/12/2011	3:22:07 PM	PHl3 MFC set to  0.000000
8/12/2011	3:22:07 PM	SiCl4 MFC set to  0.000000
8/12/2011	3:22:07 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	3:22:07 PM	Tube furnace set to 0
8/12/2011	3:22:08 PM	Run finished at 3:22 PM
8/12/2011	3:26:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/12/2011	3:26:26 PM	Recipe started at 3:26 PM
8/12/2011	3:26:26 PM	Helium valve closed
8/12/2011	3:26:26 PM	H2 valve closed
8/12/2011	3:26:26 PM	BCl3 valve closed
8/12/2011	3:26:26 PM	PH3 valve closed
8/12/2011	3:26:26 PM	SiCl4 pre valve closed
8/12/2011	3:26:26 PM	SiCl4 post valve closed
8/12/2011	3:26:26 PM	Main Vac valve closed
8/12/2011	3:26:26 PM	Bubbler valve closed
8/12/2011	3:26:26 PM	Bypass valve opened
8/12/2011	3:26:26 PM	Helium MFC set to  0.000000
8/12/2011	3:26:26 PM	H2 MFC set to  0.000000
8/12/2011	3:26:26 PM	BCl3 MFC set to  0.000000
8/12/2011	3:26:26 PM	PHl3 MFC set to  0.000000
8/12/2011	3:26:26 PM	SiCl4 MFC set to  0.000000
8/12/2011	3:26:26 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	3:26:26 PM	Tube furnace set to 0
8/12/2011	3:27:28 PM	Helium valve closed
8/12/2011	3:27:28 PM	H2 valve closed
8/12/2011	3:27:28 PM	BCl3 valve closed
8/12/2011	3:27:29 PM	PH3 valve closed
8/12/2011	3:27:29 PM	SiCl4 pre valve closed
8/12/2011	3:27:29 PM	SiCl4 post valve closed
8/12/2011	3:27:29 PM	Main Vac valve closed
8/12/2011	3:27:29 PM	Bubbler valve closed
8/12/2011	3:27:29 PM	Bypass valve opened
8/12/2011	3:27:29 PM	Helium MFC set to  0.000000
8/12/2011	3:27:29 PM	H2 MFC set to  0.000000
8/12/2011	3:27:29 PM	BCl3 MFC set to  0.000000
8/12/2011	3:27:29 PM	PHl3 MFC set to  0.000000
8/12/2011	3:27:29 PM	SiCl4 MFC set to  0.000000
8/12/2011	3:27:29 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	3:27:29 PM	Tube furnace set to 0
8/12/2011	3:28:29 PM	Helium valve closed
8/12/2011	3:28:29 PM	H2 valve closed
8/12/2011	3:28:29 PM	BCl3 valve closed
8/12/2011	3:28:29 PM	PH3 valve closed
8/12/2011	3:28:29 PM	SiCl4 pre valve closed
8/12/2011	3:28:29 PM	SiCl4 post valve closed
8/12/2011	3:28:29 PM	Bypass valve closed
8/12/2011	3:28:29 PM	Bubbler valve closed
8/12/2011	3:28:29 PM	Main Vac valve opened
8/12/2011	3:28:29 PM	Helium MFC set to  0.000000
8/12/2011	3:28:29 PM	H2 MFC set to  0.000000
8/12/2011	3:28:29 PM	BCl3 MFC set to  0.000000
8/12/2011	3:28:29 PM	PHl3 MFC set to  0.000000
8/12/2011	3:28:29 PM	SiCl4 MFC set to  0.000000
8/12/2011	3:28:29 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	3:28:29 PM	Tube furnace set to 0
8/12/2011	3:28:30 PM	Run finished at 3:28 PM
8/12/2011	3:28:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/12/2011	3:29:38 PM	Recipe started at 3:29 PM
8/12/2011	3:29:38 PM	Helium valve closed
8/12/2011	3:29:38 PM	H2 valve closed
8/12/2011	3:29:38 PM	BCl3 valve closed
8/12/2011	3:29:38 PM	PH3 valve closed
8/12/2011	3:29:38 PM	SiCl4 pre valve closed
8/12/2011	3:29:38 PM	SiCl4 post valve closed
8/12/2011	3:29:38 PM	Bypass valve closed
8/12/2011	3:29:38 PM	Bubbler valve closed
8/12/2011	3:29:38 PM	Main Vac valve opened
8/12/2011	3:29:38 PM	Helium MFC set to  0.000000
8/12/2011	3:29:38 PM	H2 MFC set to  0.000000
8/12/2011	3:29:38 PM	BCl3 MFC set to  0.000000
8/12/2011	3:29:38 PM	PHl3 MFC set to  0.000000
8/12/2011	3:29:38 PM	SiCl4 MFC set to  0.000000
8/12/2011	3:29:38 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	3:29:38 PM	Tube furnace set to 150
8/12/2011	3:30:08 PM	H2 valve closed
8/12/2011	3:30:08 PM	BCl3 valve closed
8/12/2011	3:30:08 PM	PH3 valve closed
8/12/2011	3:30:08 PM	SiCl4 pre valve closed
8/12/2011	3:30:08 PM	SiCl4 post valve closed
8/12/2011	3:30:08 PM	Bypass valve closed
8/12/2011	3:30:08 PM	Bubbler valve closed
8/12/2011	3:30:08 PM	Helium valve opened
8/12/2011	3:30:08 PM	Main Vac valve opened
8/12/2011	3:30:08 PM	Helium MFC set to  20.000000
8/12/2011	3:30:08 PM	H2 MFC set to  0.000000
8/12/2011	3:30:08 PM	BCl3 MFC set to  0.000000
8/12/2011	3:30:08 PM	PHl3 MFC set to  0.000000
8/12/2011	3:30:08 PM	SiCl4 MFC set to  0.000000
8/12/2011	3:30:08 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	3:30:09 PM	Tube furnace set to 150
8/12/2011	3:30:39 PM	Helium valve closed
8/12/2011	3:30:39 PM	H2 valve closed
8/12/2011	3:30:39 PM	BCl3 valve closed
8/12/2011	3:30:39 PM	PH3 valve closed
8/12/2011	3:30:39 PM	SiCl4 pre valve closed
8/12/2011	3:30:39 PM	SiCl4 post valve closed
8/12/2011	3:30:39 PM	Bypass valve closed
8/12/2011	3:30:39 PM	Bubbler valve closed
8/12/2011	3:30:39 PM	Main Vac valve opened
8/12/2011	3:30:39 PM	Helium MFC set to  0.000000
8/12/2011	3:30:39 PM	H2 MFC set to  0.000000
8/12/2011	3:30:39 PM	BCl3 MFC set to  0.000000
8/12/2011	3:30:39 PM	PHl3 MFC set to  0.000000
8/12/2011	3:30:39 PM	SiCl4 MFC set to  0.000000
8/12/2011	3:30:39 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	3:30:39 PM	Tube furnace set to 150
8/12/2011	3:31:09 PM	H2 valve closed
8/12/2011	3:31:09 PM	BCl3 valve closed
8/12/2011	3:31:09 PM	PH3 valve closed
8/12/2011	3:31:09 PM	SiCl4 pre valve closed
8/12/2011	3:31:09 PM	SiCl4 post valve closed
8/12/2011	3:31:09 PM	Bypass valve closed
8/12/2011	3:31:09 PM	Bubbler valve closed
8/12/2011	3:31:09 PM	Helium valve opened
8/12/2011	3:31:09 PM	Main Vac valve opened
8/12/2011	3:31:09 PM	Helium MFC set to  20.000000
8/12/2011	3:31:09 PM	H2 MFC set to  0.000000
8/12/2011	3:31:09 PM	BCl3 MFC set to  0.000000
8/12/2011	3:31:09 PM	PHl3 MFC set to  0.000000
8/12/2011	3:31:09 PM	SiCl4 MFC set to  0.000000
8/12/2011	3:31:09 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	3:31:09 PM	Tube furnace set to 150
8/12/2011	3:31:39 PM	Helium valve closed
8/12/2011	3:31:39 PM	H2 valve closed
8/12/2011	3:31:39 PM	BCl3 valve closed
8/12/2011	3:31:39 PM	PH3 valve closed
8/12/2011	3:31:39 PM	SiCl4 pre valve closed
8/12/2011	3:31:39 PM	SiCl4 post valve closed
8/12/2011	3:31:39 PM	Bypass valve closed
8/12/2011	3:31:39 PM	Bubbler valve closed
8/12/2011	3:31:39 PM	Main Vac valve opened
8/12/2011	3:31:39 PM	Helium MFC set to  0.000000
8/12/2011	3:31:39 PM	H2 MFC set to  0.000000
8/12/2011	3:31:39 PM	BCl3 MFC set to  0.000000
8/12/2011	3:31:39 PM	PHl3 MFC set to  0.000000
8/12/2011	3:31:39 PM	SiCl4 MFC set to  0.000000
8/12/2011	3:31:39 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	3:31:39 PM	Tube furnace set to 150
8/12/2011	3:32:09 PM	H2 valve closed
8/12/2011	3:32:09 PM	BCl3 valve closed
8/12/2011	3:32:09 PM	PH3 valve closed
8/12/2011	3:32:09 PM	SiCl4 pre valve closed
8/12/2011	3:32:09 PM	SiCl4 post valve closed
8/12/2011	3:32:09 PM	Bypass valve closed
8/12/2011	3:32:09 PM	Bubbler valve closed
8/12/2011	3:32:09 PM	Helium valve opened
8/12/2011	3:32:09 PM	Main Vac valve opened
8/12/2011	3:32:09 PM	Helium MFC set to  20.000000
8/12/2011	3:32:09 PM	H2 MFC set to  0.000000
8/12/2011	3:32:09 PM	BCl3 MFC set to  0.000000
8/12/2011	3:32:09 PM	PHl3 MFC set to  0.000000
8/12/2011	3:32:09 PM	SiCl4 MFC set to  0.000000
8/12/2011	3:32:09 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	3:32:09 PM	Tube furnace set to 150
8/12/2011	3:32:39 PM	Helium valve closed
8/12/2011	3:32:39 PM	H2 valve closed
8/12/2011	3:32:39 PM	BCl3 valve closed
8/12/2011	3:32:39 PM	PH3 valve closed
8/12/2011	3:32:39 PM	SiCl4 pre valve closed
8/12/2011	3:32:39 PM	SiCl4 post valve closed
8/12/2011	3:32:39 PM	Bypass valve closed
8/12/2011	3:32:39 PM	Bubbler valve closed
8/12/2011	3:32:39 PM	Main Vac valve opened
8/12/2011	3:32:39 PM	Helium MFC set to  0.000000
8/12/2011	3:32:39 PM	H2 MFC set to  0.000000
8/12/2011	3:32:39 PM	BCl3 MFC set to  0.000000
8/12/2011	3:32:39 PM	PHl3 MFC set to  0.000000
8/12/2011	3:32:39 PM	SiCl4 MFC set to  0.000000
8/12/2011	3:32:39 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	3:32:40 PM	Tube furnace set to 150
8/12/2011	3:33:10 PM	H2 valve closed
8/12/2011	3:33:10 PM	BCl3 valve closed
8/12/2011	3:33:10 PM	PH3 valve closed
8/12/2011	3:33:10 PM	SiCl4 pre valve closed
8/12/2011	3:33:10 PM	SiCl4 post valve closed
8/12/2011	3:33:10 PM	Bypass valve closed
8/12/2011	3:33:10 PM	Bubbler valve closed
8/12/2011	3:33:10 PM	Helium valve opened
8/12/2011	3:33:10 PM	Main Vac valve opened
8/12/2011	3:33:10 PM	Helium MFC set to  20.000000
8/12/2011	3:33:10 PM	H2 MFC set to  0.000000
8/12/2011	3:33:10 PM	BCl3 MFC set to  0.000000
8/12/2011	3:33:10 PM	PHl3 MFC set to  0.000000
8/12/2011	3:33:10 PM	SiCl4 MFC set to  0.000000
8/12/2011	3:33:10 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	3:33:10 PM	Tube furnace set to 150
8/12/2011	3:33:40 PM	Helium valve closed
8/12/2011	3:33:40 PM	H2 valve closed
8/12/2011	3:33:40 PM	BCl3 valve closed
8/12/2011	3:33:40 PM	PH3 valve closed
8/12/2011	3:33:40 PM	SiCl4 pre valve closed
8/12/2011	3:33:40 PM	SiCl4 post valve closed
8/12/2011	3:33:40 PM	Bypass valve closed
8/12/2011	3:33:40 PM	Bubbler valve closed
8/12/2011	3:33:40 PM	Main Vac valve opened
8/12/2011	3:33:40 PM	Helium MFC set to  0.000000
8/12/2011	3:33:40 PM	H2 MFC set to  0.000000
8/12/2011	3:33:40 PM	BCl3 MFC set to  0.000000
8/12/2011	3:33:40 PM	PHl3 MFC set to  0.000000
8/12/2011	3:33:40 PM	SiCl4 MFC set to  0.000000
8/12/2011	3:33:40 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	3:33:40 PM	Tube furnace set to 150
8/12/2011	3:34:10 PM	H2 valve closed
8/12/2011	3:34:10 PM	BCl3 valve closed
8/12/2011	3:34:10 PM	PH3 valve closed
8/12/2011	3:34:10 PM	SiCl4 pre valve closed
8/12/2011	3:34:10 PM	SiCl4 post valve closed
8/12/2011	3:34:10 PM	Bypass valve closed
8/12/2011	3:34:10 PM	Bubbler valve closed
8/12/2011	3:34:10 PM	Helium valve opened
8/12/2011	3:34:10 PM	Main Vac valve opened
8/12/2011	3:34:10 PM	Helium MFC set to  20.000000
8/12/2011	3:34:10 PM	H2 MFC set to  0.000000
8/12/2011	3:34:10 PM	BCl3 MFC set to  0.000000
8/12/2011	3:34:10 PM	PHl3 MFC set to  0.000000
8/12/2011	3:34:10 PM	SiCl4 MFC set to  0.000000
8/12/2011	3:34:10 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	3:34:10 PM	Tube furnace set to 150
8/12/2011	3:34:40 PM	Helium valve closed
8/12/2011	3:34:40 PM	H2 valve closed
8/12/2011	3:34:40 PM	BCl3 valve closed
8/12/2011	3:34:40 PM	PH3 valve closed
8/12/2011	3:34:40 PM	SiCl4 pre valve closed
8/12/2011	3:34:40 PM	SiCl4 post valve closed
8/12/2011	3:34:40 PM	Bypass valve closed
8/12/2011	3:34:40 PM	Bubbler valve closed
8/12/2011	3:34:40 PM	Main Vac valve opened
8/12/2011	3:34:40 PM	Helium MFC set to  0.000000
8/12/2011	3:34:40 PM	H2 MFC set to  0.000000
8/12/2011	3:34:40 PM	BCl3 MFC set to  0.000000
8/12/2011	3:34:40 PM	PHl3 MFC set to  0.000000
8/12/2011	3:34:40 PM	SiCl4 MFC set to  0.000000
8/12/2011	3:34:40 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	3:34:40 PM	Tube furnace set to 150
8/12/2011	3:35:10 PM	H2 valve closed
8/12/2011	3:35:10 PM	BCl3 valve closed
8/12/2011	3:35:10 PM	PH3 valve closed
8/12/2011	3:35:10 PM	SiCl4 pre valve closed
8/12/2011	3:35:10 PM	SiCl4 post valve closed
8/12/2011	3:35:11 PM	Bypass valve closed
8/12/2011	3:35:11 PM	Bubbler valve closed
8/12/2011	3:35:11 PM	Helium valve opened
8/12/2011	3:35:11 PM	Main Vac valve opened
8/12/2011	3:35:11 PM	Helium MFC set to  20.000000
8/12/2011	3:35:11 PM	H2 MFC set to  0.000000
8/12/2011	3:35:11 PM	BCl3 MFC set to  0.000000
8/12/2011	3:35:11 PM	PHl3 MFC set to  0.000000
8/12/2011	3:35:11 PM	SiCl4 MFC set to  0.000000
8/12/2011	3:35:11 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	3:35:11 PM	Tube furnace set to 150
8/12/2011	3:35:41 PM	Helium valve closed
8/12/2011	3:35:41 PM	H2 valve closed
8/12/2011	3:35:41 PM	BCl3 valve closed
8/12/2011	3:35:41 PM	PH3 valve closed
8/12/2011	3:35:41 PM	SiCl4 pre valve closed
8/12/2011	3:35:41 PM	SiCl4 post valve closed
8/12/2011	3:35:41 PM	Bypass valve closed
8/12/2011	3:35:41 PM	Bubbler valve closed
8/12/2011	3:35:41 PM	Main Vac valve opened
8/12/2011	3:35:41 PM	Helium MFC set to  0.000000
8/12/2011	3:35:41 PM	H2 MFC set to  0.000000
8/12/2011	3:35:41 PM	BCl3 MFC set to  0.000000
8/12/2011	3:35:41 PM	PHl3 MFC set to  0.000000
8/12/2011	3:35:41 PM	SiCl4 MFC set to  0.000000
8/12/2011	3:35:41 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	3:35:41 PM	Tube furnace set to 150
8/12/2011	3:36:11 PM	H2 valve closed
8/12/2011	3:36:11 PM	BCl3 valve closed
8/12/2011	3:36:11 PM	PH3 valve closed
8/12/2011	3:36:11 PM	SiCl4 pre valve closed
8/12/2011	3:36:11 PM	SiCl4 post valve closed
8/12/2011	3:36:11 PM	Bypass valve closed
8/12/2011	3:36:11 PM	Bubbler valve closed
8/12/2011	3:36:11 PM	Helium valve opened
8/12/2011	3:36:11 PM	Main Vac valve opened
8/12/2011	3:36:11 PM	Helium MFC set to  20.000000
8/12/2011	3:36:11 PM	H2 MFC set to  0.000000
8/12/2011	3:36:11 PM	BCl3 MFC set to  0.000000
8/12/2011	3:36:11 PM	PHl3 MFC set to  0.000000
8/12/2011	3:36:11 PM	SiCl4 MFC set to  0.000000
8/12/2011	3:36:11 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	3:36:11 PM	Tube furnace set to 150
8/12/2011	3:36:41 PM	Helium valve closed
8/12/2011	3:36:41 PM	H2 valve closed
8/12/2011	3:36:41 PM	BCl3 valve closed
8/12/2011	3:36:41 PM	PH3 valve closed
8/12/2011	3:36:41 PM	SiCl4 pre valve closed
8/12/2011	3:36:41 PM	SiCl4 post valve closed
8/12/2011	3:36:41 PM	Bypass valve closed
8/12/2011	3:36:41 PM	Bubbler valve closed
8/12/2011	3:36:41 PM	Main Vac valve opened
8/12/2011	3:36:41 PM	Helium MFC set to  0.000000
8/12/2011	3:36:41 PM	H2 MFC set to  0.000000
8/12/2011	3:36:41 PM	BCl3 MFC set to  0.000000
8/12/2011	3:36:41 PM	PHl3 MFC set to  0.000000
8/12/2011	3:36:41 PM	SiCl4 MFC set to  0.000000
8/12/2011	3:36:41 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	3:36:41 PM	Tube furnace set to 150
8/12/2011	3:37:11 PM	H2 valve closed
8/12/2011	3:37:11 PM	BCl3 valve closed
8/12/2011	3:37:11 PM	PH3 valve closed
8/12/2011	3:37:11 PM	SiCl4 pre valve closed
8/12/2011	3:37:11 PM	SiCl4 post valve closed
8/12/2011	3:37:11 PM	Bypass valve closed
8/12/2011	3:37:11 PM	Bubbler valve closed
8/12/2011	3:37:11 PM	Helium valve opened
8/12/2011	3:37:11 PM	Main Vac valve opened
8/12/2011	3:37:11 PM	Helium MFC set to  20.000000
8/12/2011	3:37:11 PM	H2 MFC set to  0.000000
8/12/2011	3:37:11 PM	BCl3 MFC set to  0.000000
8/12/2011	3:37:11 PM	PHl3 MFC set to  0.000000
8/12/2011	3:37:11 PM	SiCl4 MFC set to  0.000000
8/12/2011	3:37:11 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	3:37:12 PM	Tube furnace set to 150
8/12/2011	3:37:42 PM	Helium valve closed
8/12/2011	3:37:42 PM	H2 valve closed
8/12/2011	3:37:42 PM	BCl3 valve closed
8/12/2011	3:37:42 PM	PH3 valve closed
8/12/2011	3:37:42 PM	SiCl4 pre valve closed
8/12/2011	3:37:42 PM	SiCl4 post valve closed
8/12/2011	3:37:42 PM	Bypass valve closed
8/12/2011	3:37:42 PM	Bubbler valve closed
8/12/2011	3:37:42 PM	Main Vac valve opened
8/12/2011	3:37:42 PM	Helium MFC set to  0.000000
8/12/2011	3:37:42 PM	H2 MFC set to  0.000000
8/12/2011	3:37:42 PM	BCl3 MFC set to  0.000000
8/12/2011	3:37:42 PM	PHl3 MFC set to  0.000000
8/12/2011	3:37:42 PM	SiCl4 MFC set to  0.000000
8/12/2011	3:37:42 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	3:37:42 PM	Tube furnace set to 150
8/12/2011	3:38:12 PM	H2 valve closed
8/12/2011	3:38:12 PM	BCl3 valve closed
8/12/2011	3:38:12 PM	PH3 valve closed
8/12/2011	3:38:12 PM	SiCl4 pre valve closed
8/12/2011	3:38:12 PM	SiCl4 post valve closed
8/12/2011	3:38:12 PM	Bypass valve closed
8/12/2011	3:38:12 PM	Bubbler valve closed
8/12/2011	3:38:12 PM	Helium valve opened
8/12/2011	3:38:12 PM	Main Vac valve opened
8/12/2011	3:38:12 PM	Helium MFC set to  20.000000
8/12/2011	3:38:12 PM	H2 MFC set to  0.000000
8/12/2011	3:38:12 PM	BCl3 MFC set to  0.000000
8/12/2011	3:38:12 PM	PHl3 MFC set to  0.000000
8/12/2011	3:38:12 PM	SiCl4 MFC set to  0.000000
8/12/2011	3:38:12 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	3:38:12 PM	Tube furnace set to 150
8/12/2011	3:38:42 PM	Helium valve closed
8/12/2011	3:38:42 PM	H2 valve closed
8/12/2011	3:38:42 PM	BCl3 valve closed
8/12/2011	3:38:42 PM	PH3 valve closed
8/12/2011	3:38:42 PM	SiCl4 pre valve closed
8/12/2011	3:38:42 PM	SiCl4 post valve closed
8/12/2011	3:38:42 PM	Bypass valve closed
8/12/2011	3:38:42 PM	Bubbler valve closed
8/12/2011	3:38:42 PM	Main Vac valve opened
8/12/2011	3:38:42 PM	Helium MFC set to  0.000000
8/12/2011	3:38:42 PM	H2 MFC set to  0.000000
8/12/2011	3:38:42 PM	BCl3 MFC set to  0.000000
8/12/2011	3:38:42 PM	PHl3 MFC set to  0.000000
8/12/2011	3:38:42 PM	SiCl4 MFC set to  0.000000
8/12/2011	3:38:42 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	3:38:42 PM	Tube furnace set to 150
8/12/2011	3:39:12 PM	H2 valve closed
8/12/2011	3:39:12 PM	BCl3 valve closed
8/12/2011	3:39:12 PM	PH3 valve closed
8/12/2011	3:39:12 PM	SiCl4 pre valve closed
8/12/2011	3:39:12 PM	SiCl4 post valve closed
8/12/2011	3:39:12 PM	Bypass valve closed
8/12/2011	3:39:12 PM	Bubbler valve closed
8/12/2011	3:39:12 PM	Helium valve opened
8/12/2011	3:39:12 PM	Main Vac valve opened
8/12/2011	3:39:12 PM	Helium MFC set to  20.000000
8/12/2011	3:39:12 PM	H2 MFC set to  0.000000
8/12/2011	3:39:12 PM	BCl3 MFC set to  0.000000
8/12/2011	3:39:12 PM	PHl3 MFC set to  0.000000
8/12/2011	3:39:12 PM	SiCl4 MFC set to  0.000000
8/12/2011	3:39:12 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	3:39:12 PM	Tube furnace set to 150
8/12/2011	3:39:42 PM	Helium valve closed
8/12/2011	3:39:42 PM	H2 valve closed
8/12/2011	3:39:42 PM	BCl3 valve closed
8/12/2011	3:39:42 PM	PH3 valve closed
8/12/2011	3:39:42 PM	SiCl4 pre valve closed
8/12/2011	3:39:42 PM	SiCl4 post valve closed
8/12/2011	3:39:42 PM	Bypass valve closed
8/12/2011	3:39:42 PM	Bubbler valve closed
8/12/2011	3:39:42 PM	Main Vac valve opened
8/12/2011	3:39:42 PM	Helium MFC set to  0.000000
8/12/2011	3:39:42 PM	H2 MFC set to  0.000000
8/12/2011	3:39:42 PM	BCl3 MFC set to  0.000000
8/12/2011	3:39:42 PM	PHl3 MFC set to  0.000000
8/12/2011	3:39:42 PM	SiCl4 MFC set to  0.000000
8/12/2011	3:39:42 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	3:39:43 PM	Tube furnace set to 150
8/12/2011	3:39:44 PM	Run finished at 3:39 PM
8/12/2011	4:00:36 PM	Main Vac valve closed
8/12/2011	4:00:50 PM	Recipe started at 4:00 PM
8/12/2011	4:00:50 PM	Helium valve closed
8/12/2011	4:00:50 PM	H2 valve closed
8/12/2011	4:00:50 PM	BCl3 valve closed
8/12/2011	4:00:50 PM	PH3 valve closed
8/12/2011	4:00:50 PM	SiCl4 pre valve closed
8/12/2011	4:00:50 PM	SiCl4 post valve closed
8/12/2011	4:00:50 PM	Bypass valve closed
8/12/2011	4:00:50 PM	Bubbler valve closed
8/12/2011	4:00:50 PM	Main Vac valve opened
8/12/2011	4:00:50 PM	Helium MFC set to  0.000000
8/12/2011	4:00:50 PM	H2 MFC set to  0.000000
8/12/2011	4:00:50 PM	BCl3 MFC set to  0.000000
8/12/2011	4:00:50 PM	PHl3 MFC set to  0.000000
8/12/2011	4:00:50 PM	SiCl4 MFC set to  0.000000
8/12/2011	4:00:50 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	4:00:50 PM	Tube furnace set to 150
8/12/2011	4:01:20 PM	H2 valve closed
8/12/2011	4:01:20 PM	BCl3 valve closed
8/12/2011	4:01:20 PM	PH3 valve closed
8/12/2011	4:01:20 PM	SiCl4 pre valve closed
8/12/2011	4:01:20 PM	SiCl4 post valve closed
8/12/2011	4:01:20 PM	Bypass valve closed
8/12/2011	4:01:20 PM	Bubbler valve closed
8/12/2011	4:01:20 PM	Helium valve opened
8/12/2011	4:01:20 PM	Main Vac valve opened
8/12/2011	4:01:20 PM	Helium MFC set to  20.000000
8/12/2011	4:01:20 PM	H2 MFC set to  0.000000
8/12/2011	4:01:20 PM	BCl3 MFC set to  0.000000
8/12/2011	4:01:20 PM	PHl3 MFC set to  0.000000
8/12/2011	4:01:20 PM	SiCl4 MFC set to  0.000000
8/12/2011	4:01:20 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	4:01:20 PM	Tube furnace set to 150
8/12/2011	4:01:50 PM	Helium valve closed
8/12/2011	4:01:50 PM	H2 valve closed
8/12/2011	4:01:50 PM	BCl3 valve closed
8/12/2011	4:01:50 PM	PH3 valve closed
8/12/2011	4:01:50 PM	SiCl4 pre valve closed
8/12/2011	4:01:50 PM	SiCl4 post valve closed
8/12/2011	4:01:50 PM	Bypass valve closed
8/12/2011	4:01:50 PM	Bubbler valve closed
8/12/2011	4:01:50 PM	Main Vac valve opened
8/12/2011	4:01:50 PM	Helium MFC set to  0.000000
8/12/2011	4:01:50 PM	H2 MFC set to  0.000000
8/12/2011	4:01:50 PM	BCl3 MFC set to  0.000000
8/12/2011	4:01:50 PM	PHl3 MFC set to  0.000000
8/12/2011	4:01:50 PM	SiCl4 MFC set to  0.000000
8/12/2011	4:01:50 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	4:01:50 PM	Tube furnace set to 150
8/12/2011	4:02:20 PM	H2 valve closed
8/12/2011	4:02:20 PM	BCl3 valve closed
8/12/2011	4:02:20 PM	PH3 valve closed
8/12/2011	4:02:20 PM	SiCl4 pre valve closed
8/12/2011	4:02:20 PM	SiCl4 post valve closed
8/12/2011	4:02:20 PM	Bypass valve closed
8/12/2011	4:02:20 PM	Bubbler valve closed
8/12/2011	4:02:20 PM	Helium valve opened
8/12/2011	4:02:20 PM	Main Vac valve opened
8/12/2011	4:02:20 PM	Helium MFC set to  20.000000
8/12/2011	4:02:20 PM	H2 MFC set to  0.000000
8/12/2011	4:02:20 PM	BCl3 MFC set to  0.000000
8/12/2011	4:02:20 PM	PHl3 MFC set to  0.000000
8/12/2011	4:02:20 PM	SiCl4 MFC set to  0.000000
8/12/2011	4:02:20 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	4:02:21 PM	Tube furnace set to 150
8/12/2011	4:02:51 PM	Helium valve closed
8/12/2011	4:02:51 PM	H2 valve closed
8/12/2011	4:02:51 PM	BCl3 valve closed
8/12/2011	4:02:51 PM	PH3 valve closed
8/12/2011	4:02:51 PM	SiCl4 pre valve closed
8/12/2011	4:02:51 PM	SiCl4 post valve closed
8/12/2011	4:02:51 PM	Bypass valve closed
8/12/2011	4:02:51 PM	Bubbler valve closed
8/12/2011	4:02:51 PM	Main Vac valve opened
8/12/2011	4:02:51 PM	Helium MFC set to  0.000000
8/12/2011	4:02:51 PM	H2 MFC set to  0.000000
8/12/2011	4:02:51 PM	BCl3 MFC set to  0.000000
8/12/2011	4:02:51 PM	PHl3 MFC set to  0.000000
8/12/2011	4:02:51 PM	SiCl4 MFC set to  0.000000
8/12/2011	4:02:51 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	4:02:51 PM	Tube furnace set to 150
8/12/2011	4:03:21 PM	H2 valve closed
8/12/2011	4:03:21 PM	BCl3 valve closed
8/12/2011	4:03:21 PM	PH3 valve closed
8/12/2011	4:03:21 PM	SiCl4 pre valve closed
8/12/2011	4:03:21 PM	SiCl4 post valve closed
8/12/2011	4:03:21 PM	Bypass valve closed
8/12/2011	4:03:21 PM	Bubbler valve closed
8/12/2011	4:03:21 PM	Helium valve opened
8/12/2011	4:03:21 PM	Main Vac valve opened
8/12/2011	4:03:21 PM	Helium MFC set to  20.000000
8/12/2011	4:03:21 PM	H2 MFC set to  0.000000
8/12/2011	4:03:21 PM	BCl3 MFC set to  0.000000
8/12/2011	4:03:21 PM	PHl3 MFC set to  0.000000
8/12/2011	4:03:21 PM	SiCl4 MFC set to  0.000000
8/12/2011	4:03:21 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	4:03:21 PM	Tube furnace set to 150
8/12/2011	4:03:51 PM	Helium valve closed
8/12/2011	4:03:51 PM	H2 valve closed
8/12/2011	4:03:51 PM	BCl3 valve closed
8/12/2011	4:03:51 PM	PH3 valve closed
8/12/2011	4:03:51 PM	SiCl4 pre valve closed
8/12/2011	4:03:51 PM	SiCl4 post valve closed
8/12/2011	4:03:51 PM	Bypass valve closed
8/12/2011	4:03:51 PM	Bubbler valve closed
8/12/2011	4:03:51 PM	Main Vac valve opened
8/12/2011	4:03:51 PM	Helium MFC set to  0.000000
8/12/2011	4:03:51 PM	H2 MFC set to  0.000000
8/12/2011	4:03:51 PM	BCl3 MFC set to  0.000000
8/12/2011	4:03:51 PM	PHl3 MFC set to  0.000000
8/12/2011	4:03:51 PM	SiCl4 MFC set to  0.000000
8/12/2011	4:03:51 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	4:03:51 PM	Tube furnace set to 150
8/12/2011	4:04:21 PM	H2 valve closed
8/12/2011	4:04:21 PM	BCl3 valve closed
8/12/2011	4:04:21 PM	PH3 valve closed
8/12/2011	4:04:21 PM	SiCl4 pre valve closed
8/12/2011	4:04:21 PM	SiCl4 post valve closed
8/12/2011	4:04:21 PM	Bypass valve closed
8/12/2011	4:04:21 PM	Bubbler valve closed
8/12/2011	4:04:21 PM	Helium valve opened
8/12/2011	4:04:21 PM	Main Vac valve opened
8/12/2011	4:04:21 PM	Helium MFC set to  20.000000
8/12/2011	4:04:21 PM	H2 MFC set to  0.000000
8/12/2011	4:04:21 PM	BCl3 MFC set to  0.000000
8/12/2011	4:04:21 PM	PHl3 MFC set to  0.000000
8/12/2011	4:04:21 PM	SiCl4 MFC set to  0.000000
8/12/2011	4:04:21 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	4:04:21 PM	Tube furnace set to 150
8/12/2011	4:04:51 PM	Helium valve closed
8/12/2011	4:04:51 PM	H2 valve closed
8/12/2011	4:04:51 PM	BCl3 valve closed
8/12/2011	4:04:51 PM	PH3 valve closed
8/12/2011	4:04:51 PM	SiCl4 pre valve closed
8/12/2011	4:04:51 PM	SiCl4 post valve closed
8/12/2011	4:04:51 PM	Bypass valve closed
8/12/2011	4:04:51 PM	Bubbler valve closed
8/12/2011	4:04:51 PM	Main Vac valve opened
8/12/2011	4:04:51 PM	Helium MFC set to  0.000000
8/12/2011	4:04:51 PM	H2 MFC set to  0.000000
8/12/2011	4:04:51 PM	BCl3 MFC set to  0.000000
8/12/2011	4:04:51 PM	PHl3 MFC set to  0.000000
8/12/2011	4:04:51 PM	SiCl4 MFC set to  0.000000
8/12/2011	4:04:51 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	4:04:52 PM	Tube furnace set to 150
8/12/2011	4:05:22 PM	H2 valve closed
8/12/2011	4:05:22 PM	BCl3 valve closed
8/12/2011	4:05:22 PM	PH3 valve closed
8/12/2011	4:05:22 PM	SiCl4 pre valve closed
8/12/2011	4:05:22 PM	SiCl4 post valve closed
8/12/2011	4:05:22 PM	Bypass valve closed
8/12/2011	4:05:22 PM	Bubbler valve closed
8/12/2011	4:05:22 PM	Helium valve opened
8/12/2011	4:05:22 PM	Main Vac valve opened
8/12/2011	4:05:22 PM	Helium MFC set to  20.000000
8/12/2011	4:05:22 PM	H2 MFC set to  0.000000
8/12/2011	4:05:22 PM	BCl3 MFC set to  0.000000
8/12/2011	4:05:22 PM	PHl3 MFC set to  0.000000
8/12/2011	4:05:22 PM	SiCl4 MFC set to  0.000000
8/12/2011	4:05:22 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	4:05:22 PM	Tube furnace set to 150
8/12/2011	4:05:52 PM	Helium valve closed
8/12/2011	4:05:52 PM	H2 valve closed
8/12/2011	4:05:52 PM	BCl3 valve closed
8/12/2011	4:05:52 PM	PH3 valve closed
8/12/2011	4:05:52 PM	SiCl4 pre valve closed
8/12/2011	4:05:52 PM	SiCl4 post valve closed
8/12/2011	4:05:52 PM	Bypass valve closed
8/12/2011	4:05:52 PM	Bubbler valve closed
8/12/2011	4:05:52 PM	Main Vac valve opened
8/12/2011	4:05:52 PM	Helium MFC set to  0.000000
8/12/2011	4:05:52 PM	H2 MFC set to  0.000000
8/12/2011	4:05:52 PM	BCl3 MFC set to  0.000000
8/12/2011	4:05:52 PM	PHl3 MFC set to  0.000000
8/12/2011	4:05:52 PM	SiCl4 MFC set to  0.000000
8/12/2011	4:05:52 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	4:05:52 PM	Tube furnace set to 150
8/12/2011	4:06:22 PM	H2 valve closed
8/12/2011	4:06:22 PM	BCl3 valve closed
8/12/2011	4:06:22 PM	PH3 valve closed
8/12/2011	4:06:22 PM	SiCl4 pre valve closed
8/12/2011	4:06:22 PM	SiCl4 post valve closed
8/12/2011	4:06:22 PM	Bypass valve closed
8/12/2011	4:06:22 PM	Bubbler valve closed
8/12/2011	4:06:22 PM	Helium valve opened
8/12/2011	4:06:22 PM	Main Vac valve opened
8/12/2011	4:06:22 PM	Helium MFC set to  20.000000
8/12/2011	4:06:22 PM	H2 MFC set to  0.000000
8/12/2011	4:06:22 PM	BCl3 MFC set to  0.000000
8/12/2011	4:06:22 PM	PHl3 MFC set to  0.000000
8/12/2011	4:06:22 PM	SiCl4 MFC set to  0.000000
8/12/2011	4:06:22 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	4:06:22 PM	Tube furnace set to 150
8/12/2011	4:06:52 PM	Helium valve closed
8/12/2011	4:06:52 PM	H2 valve closed
8/12/2011	4:06:52 PM	BCl3 valve closed
8/12/2011	4:06:52 PM	PH3 valve closed
8/12/2011	4:06:52 PM	SiCl4 pre valve closed
8/12/2011	4:06:52 PM	SiCl4 post valve closed
8/12/2011	4:06:52 PM	Bypass valve closed
8/12/2011	4:06:52 PM	Bubbler valve closed
8/12/2011	4:06:52 PM	Main Vac valve opened
8/12/2011	4:06:52 PM	Helium MFC set to  0.000000
8/12/2011	4:06:52 PM	H2 MFC set to  0.000000
8/12/2011	4:06:52 PM	BCl3 MFC set to  0.000000
8/12/2011	4:06:52 PM	PHl3 MFC set to  0.000000
8/12/2011	4:06:52 PM	SiCl4 MFC set to  0.000000
8/12/2011	4:06:52 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	4:06:52 PM	Tube furnace set to 150
8/12/2011	4:07:22 PM	H2 valve closed
8/12/2011	4:07:22 PM	BCl3 valve closed
8/12/2011	4:07:22 PM	PH3 valve closed
8/12/2011	4:07:22 PM	SiCl4 pre valve closed
8/12/2011	4:07:22 PM	SiCl4 post valve closed
8/12/2011	4:07:22 PM	Bypass valve closed
8/12/2011	4:07:22 PM	Bubbler valve closed
8/12/2011	4:07:22 PM	Helium valve opened
8/12/2011	4:07:22 PM	Main Vac valve opened
8/12/2011	4:07:22 PM	Helium MFC set to  20.000000
8/12/2011	4:07:22 PM	H2 MFC set to  0.000000
8/12/2011	4:07:22 PM	BCl3 MFC set to  0.000000
8/12/2011	4:07:22 PM	PHl3 MFC set to  0.000000
8/12/2011	4:07:22 PM	SiCl4 MFC set to  0.000000
8/12/2011	4:07:22 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	4:07:23 PM	Tube furnace set to 150
8/12/2011	4:07:53 PM	Helium valve closed
8/12/2011	4:07:53 PM	H2 valve closed
8/12/2011	4:07:53 PM	BCl3 valve closed
8/12/2011	4:07:53 PM	PH3 valve closed
8/12/2011	4:07:53 PM	SiCl4 pre valve closed
8/12/2011	4:07:53 PM	SiCl4 post valve closed
8/12/2011	4:07:53 PM	Bypass valve closed
8/12/2011	4:07:53 PM	Bubbler valve closed
8/12/2011	4:07:53 PM	Main Vac valve opened
8/12/2011	4:07:53 PM	Helium MFC set to  0.000000
8/12/2011	4:07:53 PM	H2 MFC set to  0.000000
8/12/2011	4:07:53 PM	BCl3 MFC set to  0.000000
8/12/2011	4:07:53 PM	PHl3 MFC set to  0.000000
8/12/2011	4:07:53 PM	SiCl4 MFC set to  0.000000
8/12/2011	4:07:53 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	4:07:53 PM	Tube furnace set to 150
8/12/2011	4:08:23 PM	H2 valve closed
8/12/2011	4:08:23 PM	BCl3 valve closed
8/12/2011	4:08:23 PM	PH3 valve closed
8/12/2011	4:08:23 PM	SiCl4 pre valve closed
8/12/2011	4:08:23 PM	SiCl4 post valve closed
8/12/2011	4:08:23 PM	Bypass valve closed
8/12/2011	4:08:23 PM	Bubbler valve closed
8/12/2011	4:08:23 PM	Helium valve opened
8/12/2011	4:08:23 PM	Main Vac valve opened
8/12/2011	4:08:23 PM	Helium MFC set to  20.000000
8/12/2011	4:08:23 PM	H2 MFC set to  0.000000
8/12/2011	4:08:23 PM	BCl3 MFC set to  0.000000
8/12/2011	4:08:23 PM	PHl3 MFC set to  0.000000
8/12/2011	4:08:23 PM	SiCl4 MFC set to  0.000000
8/12/2011	4:08:23 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	4:08:23 PM	Tube furnace set to 150
8/12/2011	4:08:53 PM	Helium valve closed
8/12/2011	4:08:53 PM	H2 valve closed
8/12/2011	4:08:53 PM	BCl3 valve closed
8/12/2011	4:08:53 PM	PH3 valve closed
8/12/2011	4:08:53 PM	SiCl4 pre valve closed
8/12/2011	4:08:53 PM	SiCl4 post valve closed
8/12/2011	4:08:53 PM	Bypass valve closed
8/12/2011	4:08:53 PM	Bubbler valve closed
8/12/2011	4:08:53 PM	Main Vac valve opened
8/12/2011	4:08:53 PM	Helium MFC set to  0.000000
8/12/2011	4:08:53 PM	H2 MFC set to  0.000000
8/12/2011	4:08:53 PM	BCl3 MFC set to  0.000000
8/12/2011	4:08:53 PM	PHl3 MFC set to  0.000000
8/12/2011	4:08:53 PM	SiCl4 MFC set to  0.000000
8/12/2011	4:08:53 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	4:08:53 PM	Tube furnace set to 150
8/12/2011	4:09:23 PM	H2 valve closed
8/12/2011	4:09:23 PM	BCl3 valve closed
8/12/2011	4:09:23 PM	PH3 valve closed
8/12/2011	4:09:23 PM	SiCl4 pre valve closed
8/12/2011	4:09:23 PM	SiCl4 post valve closed
8/12/2011	4:09:23 PM	Bypass valve closed
8/12/2011	4:09:23 PM	Bubbler valve closed
8/12/2011	4:09:23 PM	Helium valve opened
8/12/2011	4:09:23 PM	Main Vac valve opened
8/12/2011	4:09:23 PM	Helium MFC set to  20.000000
8/12/2011	4:09:23 PM	H2 MFC set to  0.000000
8/12/2011	4:09:23 PM	BCl3 MFC set to  0.000000
8/12/2011	4:09:23 PM	PHl3 MFC set to  0.000000
8/12/2011	4:09:23 PM	SiCl4 MFC set to  0.000000
8/12/2011	4:09:23 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	4:09:23 PM	Tube furnace set to 150
8/12/2011	4:09:53 PM	Helium valve closed
8/12/2011	4:09:53 PM	H2 valve closed
8/12/2011	4:09:53 PM	BCl3 valve closed
8/12/2011	4:09:53 PM	PH3 valve closed
8/12/2011	4:09:53 PM	SiCl4 pre valve closed
8/12/2011	4:09:53 PM	SiCl4 post valve closed
8/12/2011	4:09:53 PM	Bypass valve closed
8/12/2011	4:09:53 PM	Bubbler valve closed
8/12/2011	4:09:53 PM	Main Vac valve opened
8/12/2011	4:09:53 PM	Helium MFC set to  0.000000
8/12/2011	4:09:53 PM	H2 MFC set to  0.000000
8/12/2011	4:09:53 PM	BCl3 MFC set to  0.000000
8/12/2011	4:09:53 PM	PHl3 MFC set to  0.000000
8/12/2011	4:09:53 PM	SiCl4 MFC set to  0.000000
8/12/2011	4:09:53 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	4:09:54 PM	Tube furnace set to 150
8/12/2011	4:10:24 PM	H2 valve closed
8/12/2011	4:10:24 PM	BCl3 valve closed
8/12/2011	4:10:24 PM	PH3 valve closed
8/12/2011	4:10:24 PM	SiCl4 pre valve closed
8/12/2011	4:10:24 PM	SiCl4 post valve closed
8/12/2011	4:10:24 PM	Bypass valve closed
8/12/2011	4:10:24 PM	Bubbler valve closed
8/12/2011	4:10:24 PM	Helium valve opened
8/12/2011	4:10:24 PM	Main Vac valve opened
8/12/2011	4:10:24 PM	Helium MFC set to  20.000000
8/12/2011	4:10:24 PM	H2 MFC set to  0.000000
8/12/2011	4:10:24 PM	BCl3 MFC set to  0.000000
8/12/2011	4:10:24 PM	PHl3 MFC set to  0.000000
8/12/2011	4:10:24 PM	SiCl4 MFC set to  0.000000
8/12/2011	4:10:24 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	4:10:24 PM	Tube furnace set to 150
8/12/2011	4:10:54 PM	Helium valve closed
8/12/2011	4:10:54 PM	H2 valve closed
8/12/2011	4:10:54 PM	BCl3 valve closed
8/12/2011	4:10:54 PM	PH3 valve closed
8/12/2011	4:10:54 PM	SiCl4 pre valve closed
8/12/2011	4:10:54 PM	SiCl4 post valve closed
8/12/2011	4:10:54 PM	Bypass valve closed
8/12/2011	4:10:54 PM	Bubbler valve closed
8/12/2011	4:10:54 PM	Main Vac valve opened
8/12/2011	4:10:54 PM	Helium MFC set to  0.000000
8/12/2011	4:10:54 PM	H2 MFC set to  0.000000
8/12/2011	4:10:54 PM	BCl3 MFC set to  0.000000
8/12/2011	4:10:54 PM	PHl3 MFC set to  0.000000
8/12/2011	4:10:54 PM	SiCl4 MFC set to  0.000000
8/12/2011	4:10:54 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	4:10:54 PM	Tube furnace set to 150
8/12/2011	4:10:55 PM	Run finished at 4:10 PM
8/12/2011	4:18:56 PM	Main Vac valve closed
8/12/2011	4:19:14 PM	Main Vac valve opened
8/12/2011	4:20:01 PM	Recipe started at 4:19 PM
8/12/2011	4:20:01 PM	Helium valve closed
8/12/2011	4:20:01 PM	H2 valve closed
8/12/2011	4:20:01 PM	BCl3 valve closed
8/12/2011	4:20:01 PM	PH3 valve closed
8/12/2011	4:20:01 PM	SiCl4 pre valve closed
8/12/2011	4:20:01 PM	SiCl4 post valve closed
8/12/2011	4:20:01 PM	Main Vac valve closed
8/12/2011	4:20:01 PM	Bypass valve closed
8/12/2011	4:20:01 PM	Bubbler valve closed
8/12/2011	4:20:01 PM	Helium MFC set to  0.000000
8/12/2011	4:20:01 PM	H2 MFC set to  0.000000
8/12/2011	4:20:01 PM	BCl3 MFC set to  0.000000
8/12/2011	4:20:01 PM	PHl3 MFC set to  0.000000
8/12/2011	4:20:01 PM	SiCl4 MFC set to  0.000000
8/12/2011	4:20:01 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	4:20:01 PM	Tube furnace set to 0
8/12/2011	4:20:04 PM	Helium valve closed
8/12/2011	4:20:04 PM	BCl3 valve closed
8/12/2011	4:20:04 PM	PH3 valve closed
8/12/2011	4:20:04 PM	SiCl4 pre valve closed
8/12/2011	4:20:04 PM	SiCl4 post valve closed
8/12/2011	4:20:04 PM	Main Vac valve closed
8/12/2011	4:20:04 PM	Bypass valve closed
8/12/2011	4:20:04 PM	Bubbler valve closed
8/12/2011	4:20:04 PM	H2 valve opened
8/12/2011	4:20:04 PM	Helium MFC set to  0.000000
8/12/2011	4:20:04 PM	H2 MFC set to  500.000000
8/12/2011	4:20:04 PM	BCl3 MFC set to  0.000000
8/12/2011	4:20:04 PM	PHl3 MFC set to  0.000000
8/12/2011	4:20:04 PM	SiCl4 MFC set to  0.000000
8/12/2011	4:20:04 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	4:20:05 PM	Tube furnace set to 0
8/12/2011	4:21:08 PM	Helium valve closed
8/12/2011	4:21:08 PM	BCl3 valve closed
8/12/2011	4:21:08 PM	PH3 valve closed
8/12/2011	4:21:08 PM	SiCl4 pre valve closed
8/12/2011	4:21:08 PM	SiCl4 post valve closed
8/12/2011	4:21:08 PM	Main Vac valve closed
8/12/2011	4:21:08 PM	Bypass valve closed
8/12/2011	4:21:08 PM	H2 valve opened
8/12/2011	4:21:08 PM	Bubbler valve opened
8/12/2011	4:21:08 PM	Helium MFC set to  0.000000
8/12/2011	4:21:08 PM	H2 MFC set to  500.000000
8/12/2011	4:21:08 PM	BCl3 MFC set to  0.000000
8/12/2011	4:21:08 PM	PHl3 MFC set to  0.000000
8/12/2011	4:21:08 PM	SiCl4 MFC set to  0.000000
8/12/2011	4:21:08 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	4:21:08 PM	Tube furnace set to 0
8/12/2011	4:21:09 PM	Helium valve closed
8/12/2011	4:21:09 PM	BCl3 valve closed
8/12/2011	4:21:09 PM	PH3 valve closed
8/12/2011	4:21:09 PM	SiCl4 pre valve closed
8/12/2011	4:21:09 PM	SiCl4 post valve closed
8/12/2011	4:21:09 PM	Main Vac valve closed
8/12/2011	4:21:09 PM	Bypass valve closed
8/12/2011	4:21:09 PM	H2 valve opened
8/12/2011	4:21:09 PM	Bubbler valve opened
8/12/2011	4:21:09 PM	Helium MFC set to  0.000000
8/12/2011	4:21:09 PM	H2 MFC set to  500.000000
8/12/2011	4:21:09 PM	BCl3 MFC set to  0.000000
8/12/2011	4:21:09 PM	PHl3 MFC set to  0.000000
8/12/2011	4:21:09 PM	SiCl4 MFC set to  0.000000
8/12/2011	4:21:09 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	4:21:09 PM	Tube furnace set to 1000
8/12/2011	4:41:09 PM	Helium valve closed
8/12/2011	4:41:09 PM	PH3 valve closed
8/12/2011	4:41:09 PM	Main Vac valve closed
8/12/2011	4:41:09 PM	Bypass valve closed
8/12/2011	4:41:09 PM	H2 valve opened
8/12/2011	4:41:09 PM	BCl3 valve opened
8/12/2011	4:41:09 PM	SiCl4 pre valve opened
8/12/2011	4:41:09 PM	SiCl4 post valve opened
8/12/2011	4:41:09 PM	Bubbler valve opened
8/12/2011	4:41:09 PM	Helium MFC set to  0.000000
8/12/2011	4:41:09 PM	H2 MFC set to  500.000000
8/12/2011	4:41:09 PM	BCl3 MFC set to  2.500000
8/12/2011	4:41:09 PM	PHl3 MFC set to  0.000000
8/12/2011	4:41:09 PM	SiCl4 MFC set to  50.000000
8/12/2011	4:41:09 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	4:41:10 PM	Tube furnace set to 1000
8/12/2011	4:54:10 PM	Helium valve closed
8/12/2011	4:54:10 PM	BCl3 valve closed
8/12/2011	4:54:10 PM	Main Vac valve closed
8/12/2011	4:54:10 PM	Bypass valve closed
8/12/2011	4:54:10 PM	H2 valve opened
8/12/2011	4:54:10 PM	PH3 valve opened
8/12/2011	4:54:10 PM	SiCl4 pre valve opened
8/12/2011	4:54:10 PM	SiCl4 post valve opened
8/12/2011	4:54:10 PM	Bubbler valve opened
8/12/2011	4:54:10 PM	Helium MFC set to  0.000000
8/12/2011	4:54:10 PM	H2 MFC set to  500.000000
8/12/2011	4:54:10 PM	BCl3 MFC set to  0.000000
8/12/2011	4:54:10 PM	PHl3 MFC set to  15.000000
8/12/2011	4:54:10 PM	SiCl4 MFC set to  50.000000
8/12/2011	4:54:10 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	4:54:10 PM	Tube furnace set to 1000
8/12/2011	4:57:10 PM	Helium valve closed
8/12/2011	4:57:10 PM	BCl3 valve closed
8/12/2011	4:57:10 PM	PH3 valve closed
8/12/2011	4:57:10 PM	SiCl4 pre valve closed
8/12/2011	4:57:10 PM	SiCl4 post valve closed
8/12/2011	4:57:10 PM	Main Vac valve closed
8/12/2011	4:57:10 PM	Bypass valve closed
8/12/2011	4:57:10 PM	H2 valve opened
8/12/2011	4:57:10 PM	Bubbler valve opened
8/12/2011	4:57:10 PM	Helium MFC set to  0.000000
8/12/2011	4:57:10 PM	H2 MFC set to  500.000000
8/12/2011	4:57:10 PM	BCl3 MFC set to  0.000000
8/12/2011	4:57:10 PM	PHl3 MFC set to  0.000000
8/12/2011	4:57:10 PM	SiCl4 MFC set to  0.000000
8/12/2011	4:57:10 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	4:57:10 PM	Tube furnace set to 950
8/12/2011	5:00:10 PM	Helium valve closed
8/12/2011	5:00:10 PM	BCl3 valve closed
8/12/2011	5:00:10 PM	PH3 valve closed
8/12/2011	5:00:10 PM	SiCl4 pre valve closed
8/12/2011	5:00:10 PM	SiCl4 post valve closed
8/12/2011	5:00:10 PM	Main Vac valve closed
8/12/2011	5:00:10 PM	Bypass valve closed
8/12/2011	5:00:10 PM	H2 valve opened
8/12/2011	5:00:10 PM	Bubbler valve opened
8/12/2011	5:00:10 PM	Helium MFC set to  0.000000
8/12/2011	5:00:10 PM	H2 MFC set to  500.000000
8/12/2011	5:00:10 PM	BCl3 MFC set to  0.000000
8/12/2011	5:00:10 PM	PHl3 MFC set to  0.000000
8/12/2011	5:00:10 PM	SiCl4 MFC set to  0.000000
8/12/2011	5:00:10 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	5:00:10 PM	Tube furnace set to 900
8/12/2011	5:03:10 PM	Helium valve closed
8/12/2011	5:03:10 PM	BCl3 valve closed
8/12/2011	5:03:10 PM	PH3 valve closed
8/12/2011	5:03:10 PM	SiCl4 pre valve closed
8/12/2011	5:03:10 PM	SiCl4 post valve closed
8/12/2011	5:03:10 PM	Main Vac valve closed
8/12/2011	5:03:10 PM	Bypass valve closed
8/12/2011	5:03:10 PM	H2 valve opened
8/12/2011	5:03:10 PM	Bubbler valve opened
8/12/2011	5:03:10 PM	Helium MFC set to  0.000000
8/12/2011	5:03:10 PM	H2 MFC set to  500.000000
8/12/2011	5:03:10 PM	BCl3 MFC set to  0.000000
8/12/2011	5:03:10 PM	PHl3 MFC set to  0.000000
8/12/2011	5:03:10 PM	SiCl4 MFC set to  0.000000
8/12/2011	5:03:10 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	5:03:10 PM	Tube furnace set to 850
8/12/2011	5:06:10 PM	Helium valve closed
8/12/2011	5:06:10 PM	BCl3 valve closed
8/12/2011	5:06:10 PM	PH3 valve closed
8/12/2011	5:06:10 PM	SiCl4 pre valve closed
8/12/2011	5:06:10 PM	SiCl4 post valve closed
8/12/2011	5:06:10 PM	Main Vac valve closed
8/12/2011	5:06:10 PM	Bypass valve closed
8/12/2011	5:06:10 PM	H2 valve opened
8/12/2011	5:06:10 PM	Bubbler valve opened
8/12/2011	5:06:10 PM	Helium MFC set to  0.000000
8/12/2011	5:06:10 PM	H2 MFC set to  500.000000
8/12/2011	5:06:10 PM	BCl3 MFC set to  0.000000
8/12/2011	5:06:10 PM	PHl3 MFC set to  0.000000
8/12/2011	5:06:10 PM	SiCl4 MFC set to  0.000000
8/12/2011	5:06:10 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	5:06:11 PM	Tube furnace set to 800
8/12/2011	5:09:11 PM	Helium valve closed
8/12/2011	5:09:11 PM	BCl3 valve closed
8/12/2011	5:09:11 PM	PH3 valve closed
8/12/2011	5:09:11 PM	SiCl4 pre valve closed
8/12/2011	5:09:11 PM	SiCl4 post valve closed
8/12/2011	5:09:11 PM	Main Vac valve closed
8/12/2011	5:09:11 PM	Bypass valve closed
8/12/2011	5:09:11 PM	H2 valve opened
8/12/2011	5:09:11 PM	Bubbler valve opened
8/12/2011	5:09:11 PM	Helium MFC set to  0.000000
8/12/2011	5:09:11 PM	H2 MFC set to  500.000000
8/12/2011	5:09:11 PM	BCl3 MFC set to  0.000000
8/12/2011	5:09:11 PM	PHl3 MFC set to  0.000000
8/12/2011	5:09:11 PM	SiCl4 MFC set to  0.000000
8/12/2011	5:09:11 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	5:09:11 PM	Tube furnace set to 750
8/12/2011	5:12:11 PM	H2 valve closed
8/12/2011	5:12:11 PM	BCl3 valve closed
8/12/2011	5:12:11 PM	PH3 valve closed
8/12/2011	5:12:11 PM	SiCl4 pre valve closed
8/12/2011	5:12:11 PM	SiCl4 post valve closed
8/12/2011	5:12:11 PM	Main Vac valve closed
8/12/2011	5:12:11 PM	Bypass valve closed
8/12/2011	5:12:11 PM	Helium valve opened
8/12/2011	5:12:11 PM	Bubbler valve opened
8/12/2011	5:12:11 PM	Helium MFC set to  500.000000
8/12/2011	5:12:11 PM	H2 MFC set to  0.000000
8/12/2011	5:12:11 PM	BCl3 MFC set to  0.000000
8/12/2011	5:12:11 PM	PHl3 MFC set to  0.000000
8/12/2011	5:12:11 PM	SiCl4 MFC set to  0.000000
8/12/2011	5:12:11 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	5:12:11 PM	Tube furnace set to 0
8/12/2011	5:21:42 PM	Run aborted at 5:21 PM
8/12/2011	5:21:42 PM	Helium valve closed
8/12/2011	5:21:42 PM	H2 valve closed
8/12/2011	5:21:42 PM	BCl3 valve closed
8/12/2011	5:21:42 PM	PH3 valve closed
8/12/2011	5:21:42 PM	SiCl4 pre valve closed
8/12/2011	5:21:42 PM	SiCl4 post valve closed
8/12/2011	5:21:42 PM	Bypass valve closed
8/12/2011	5:21:42 PM	Main Vac valve closed
8/12/2011	5:21:42 PM	Bubbler valve closed
8/12/2011	5:21:42 PM	Helium MFC set to  0.000000
8/12/2011	5:21:42 PM	H2 MFC set to  0.000000
8/12/2011	5:21:42 PM	BCl3 MFC set to  0.000000
8/12/2011	5:21:42 PM	PHl3 MFC set to  0.000000
8/12/2011	5:21:42 PM	SiCl4 MFC set to  0.000000
8/12/2011	5:21:42 PM	Tube furnace set to 0
8/12/2011	5:21:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/12/2011	5:21:46 PM	Recipe started at 5:21 PM
8/12/2011	5:21:46 PM	Helium valve closed
8/12/2011	5:21:46 PM	H2 valve closed
8/12/2011	5:21:46 PM	BCl3 valve closed
8/12/2011	5:21:46 PM	PH3 valve closed
8/12/2011	5:21:46 PM	SiCl4 pre valve closed
8/12/2011	5:21:46 PM	SiCl4 post valve closed
8/12/2011	5:21:46 PM	Main Vac valve closed
8/12/2011	5:21:46 PM	Bubbler valve closed
8/12/2011	5:21:46 PM	Bypass valve opened
8/12/2011	5:21:46 PM	Helium MFC set to  0.000000
8/12/2011	5:21:46 PM	H2 MFC set to  0.000000
8/12/2011	5:21:46 PM	BCl3 MFC set to  0.000000
8/12/2011	5:21:46 PM	PHl3 MFC set to  0.000000
8/12/2011	5:21:46 PM	SiCl4 MFC set to  0.000000
8/12/2011	5:21:46 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	5:21:46 PM	Tube furnace set to 0
8/12/2011	5:21:47 PM	Run aborted at 5:21 PM
8/12/2011	5:21:47 PM	Helium valve closed
8/12/2011	5:21:47 PM	H2 valve closed
8/12/2011	5:21:47 PM	BCl3 valve closed
8/12/2011	5:21:47 PM	PH3 valve closed
8/12/2011	5:21:47 PM	SiCl4 pre valve closed
8/12/2011	5:21:47 PM	SiCl4 post valve closed
8/12/2011	5:21:47 PM	Bypass valve closed
8/12/2011	5:21:47 PM	Main Vac valve closed
8/12/2011	5:21:47 PM	Bubbler valve closed
8/12/2011	5:21:47 PM	Helium MFC set to  0.000000
8/12/2011	5:21:47 PM	H2 MFC set to  0.000000
8/12/2011	5:21:47 PM	BCl3 MFC set to  0.000000
8/12/2011	5:21:47 PM	PHl3 MFC set to  0.000000
8/12/2011	5:21:47 PM	SiCl4 MFC set to  0.000000
8/12/2011	5:21:47 PM	Tube furnace set to 0
8/12/2011	5:21:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/12/2011	5:21:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/12/2011	5:21:50 PM	Recipe started at 5:21 PM
8/12/2011	5:21:50 PM	Helium valve closed
8/12/2011	5:21:50 PM	H2 valve closed
8/12/2011	5:21:50 PM	BCl3 valve closed
8/12/2011	5:21:50 PM	PH3 valve closed
8/12/2011	5:21:50 PM	SiCl4 pre valve closed
8/12/2011	5:21:50 PM	SiCl4 post valve closed
8/12/2011	5:21:50 PM	Main Vac valve closed
8/12/2011	5:21:50 PM	Bypass valve closed
8/12/2011	5:21:50 PM	Bubbler valve closed
8/12/2011	5:21:50 PM	Helium MFC set to  0.000000
8/12/2011	5:21:50 PM	H2 MFC set to  0.000000
8/12/2011	5:21:50 PM	BCl3 MFC set to  0.000000
8/12/2011	5:21:50 PM	PHl3 MFC set to  0.000000
8/12/2011	5:21:50 PM	SiCl4 MFC set to  0.000000
8/12/2011	5:21:50 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	5:21:50 PM	Tube furnace set to 0
8/12/2011	5:21:53 PM	H2 valve closed
8/12/2011	5:21:53 PM	BCl3 valve closed
8/12/2011	5:21:53 PM	PH3 valve closed
8/12/2011	5:21:53 PM	SiCl4 pre valve closed
8/12/2011	5:21:53 PM	SiCl4 post valve closed
8/12/2011	5:21:53 PM	Main Vac valve closed
8/12/2011	5:21:53 PM	Bypass valve closed
8/12/2011	5:21:53 PM	Bubbler valve closed
8/12/2011	5:21:53 PM	Helium valve opened
8/12/2011	5:21:53 PM	Helium MFC set to  500.000000
8/12/2011	5:21:53 PM	H2 MFC set to  0.000000
8/12/2011	5:21:53 PM	BCl3 MFC set to  0.000000
8/12/2011	5:21:53 PM	PHl3 MFC set to  0.000000
8/12/2011	5:21:53 PM	SiCl4 MFC set to  0.000000
8/12/2011	5:21:53 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	5:21:53 PM	Tube furnace set to 0
8/12/2011	5:22:16 PM	Helium valve closed
8/12/2011	5:22:16 PM	H2 valve closed
8/12/2011	5:22:16 PM	BCl3 valve closed
8/12/2011	5:22:16 PM	PH3 valve closed
8/12/2011	5:22:16 PM	SiCl4 pre valve closed
8/12/2011	5:22:16 PM	SiCl4 post valve closed
8/12/2011	5:22:16 PM	Main Vac valve closed
8/12/2011	5:22:16 PM	Bypass valve closed
8/12/2011	5:22:16 PM	Bubbler valve closed
8/12/2011	5:22:16 PM	Helium MFC set to  0.000000
8/12/2011	5:22:16 PM	H2 MFC set to  0.000000
8/12/2011	5:22:16 PM	BCl3 MFC set to  0.000000
8/12/2011	5:22:16 PM	PHl3 MFC set to  0.000000
8/12/2011	5:22:16 PM	SiCl4 MFC set to  0.000000
8/12/2011	5:22:16 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	5:22:16 PM	Tube furnace set to 0
8/12/2011	5:22:17 PM	Run finished at 5:22 PM
8/12/2011	5:22:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/12/2011	5:26:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/12/2011	5:26:13 PM	Recipe started at 5:26 PM
8/12/2011	5:26:13 PM	Helium valve closed
8/12/2011	5:26:13 PM	H2 valve closed
8/12/2011	5:26:13 PM	BCl3 valve closed
8/12/2011	5:26:13 PM	PH3 valve closed
8/12/2011	5:26:13 PM	SiCl4 pre valve closed
8/12/2011	5:26:13 PM	SiCl4 post valve closed
8/12/2011	5:26:13 PM	Main Vac valve closed
8/12/2011	5:26:13 PM	Bubbler valve closed
8/12/2011	5:26:13 PM	Bypass valve opened
8/12/2011	5:26:13 PM	Helium MFC set to  0.000000
8/12/2011	5:26:13 PM	H2 MFC set to  0.000000
8/12/2011	5:26:13 PM	BCl3 MFC set to  0.000000
8/12/2011	5:26:13 PM	PHl3 MFC set to  0.000000
8/12/2011	5:26:13 PM	SiCl4 MFC set to  0.000000
8/12/2011	5:26:13 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	5:26:14 PM	Tube furnace set to 0
8/12/2011	5:27:14 PM	Helium valve closed
8/12/2011	5:27:14 PM	H2 valve closed
8/12/2011	5:27:14 PM	BCl3 valve closed
8/12/2011	5:27:14 PM	PH3 valve closed
8/12/2011	5:27:14 PM	SiCl4 pre valve closed
8/12/2011	5:27:14 PM	SiCl4 post valve closed
8/12/2011	5:27:14 PM	Main Vac valve closed
8/12/2011	5:27:14 PM	Bubbler valve closed
8/12/2011	5:27:14 PM	Bypass valve opened
8/12/2011	5:27:14 PM	Helium MFC set to  0.000000
8/12/2011	5:27:14 PM	H2 MFC set to  0.000000
8/12/2011	5:27:14 PM	BCl3 MFC set to  0.000000
8/12/2011	5:27:14 PM	PHl3 MFC set to  0.000000
8/12/2011	5:27:14 PM	SiCl4 MFC set to  0.000000
8/12/2011	5:27:14 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	5:27:14 PM	Tube furnace set to 0
8/12/2011	5:28:14 PM	Helium valve closed
8/12/2011	5:28:14 PM	H2 valve closed
8/12/2011	5:28:14 PM	BCl3 valve closed
8/12/2011	5:28:14 PM	PH3 valve closed
8/12/2011	5:28:14 PM	SiCl4 pre valve closed
8/12/2011	5:28:14 PM	SiCl4 post valve closed
8/12/2011	5:28:14 PM	Bypass valve closed
8/12/2011	5:28:14 PM	Bubbler valve closed
8/12/2011	5:28:14 PM	Main Vac valve opened
8/12/2011	5:28:14 PM	Helium MFC set to  0.000000
8/12/2011	5:28:14 PM	H2 MFC set to  0.000000
8/12/2011	5:28:14 PM	BCl3 MFC set to  0.000000
8/12/2011	5:28:14 PM	PHl3 MFC set to  0.000000
8/12/2011	5:28:14 PM	SiCl4 MFC set to  0.000000
8/12/2011	5:28:14 PM	Bypass solenoid MFC set to  0.000000
8/12/2011	5:28:15 PM	Tube furnace set to 0
8/12/2011	5:28:16 PM	Run finished at 5:28 PM
8/12/2011	5:28:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
